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TACTILE SENSOR ELEMENT, TACTILE SENSOR, TRIAXIAL TACTILE SENSOR, AND TACTILE SENSOR ELEMENT MANUFACTURING METHOD

外国特許コード F210010391
整理番号 (S2019-0633-N0)
掲載日 2021年5月6日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2020JP031521
国際公開番号 WO 2021039600
国際出願日 令和2年8月20日(2020.8.20)
国際公開日 令和3年3月4日(2021.3.4)
優先権データ
  • 特願2019-155358 (2019.8.28) JP
発明の名称 (英語) TACTILE SENSOR ELEMENT, TACTILE SENSOR, TRIAXIAL TACTILE SENSOR, AND TACTILE SENSOR ELEMENT MANUFACTURING METHOD
発明の概要(英語) Provided are a tactile sensor element, and the like, that make it possible to reduce tactile sensor thickness, measure with a high degree of accuracy by enhancing measurement stability under low stress, and manufacture with a high degree of consistency by reducing differences between individual units in production. The cross-sectional structure of a tactile sensor element (10) comprises a lower electrode (12), a PEDOT:PSS stress reception layer (14) formed so as to extend over one end side (12r) of the lower electrode (12), and an upper electrode (16) formed on the stress reception layer (14). These components are laminated in close contact. The tactile sensor element (10) is manufactured using a lamination process. When sheer stress is applied in the horizontal direction to the upper electrode (16), a planar overlapping area S where the lower electrode (12) and upper electrode (16) overlap in the vertical direction via the stress reception layer (14) shrinks or grows according to the orientation of the sheer stress, and as a result, the electrical resistance value between the upper electrode (16) and lower electrode (12) increases or decreases. Thus, it is possible to measure the sheer stress applied to the tactile sensor element (10) on the basis of the relationship between the variation in the electrical resistance value and the sheer stress.
従来技術、競合技術の概要(英語) BACKGROUND ART
Known conventional pressure sensitive sensors have a structure in which two electrodes face each other and a conductive layer or a resin layer is sandwiched between the electrodes. The pressure sensitive sensor detects, as pressure or shear stress, a physical amount between the electrodes (for example, an electrical resistance value between the electrodes) that changes as a result of deformation due to an applied force to the conductive layer or the resin layer.
PTL 1 discloses a pressure sensitive device in which a conductor (made of a material in which silver particles are dispersed in a resin such as polyester) and a resistor are formed on a first substrate, a conductor and a resistor are formed on a second substrate, and the two substrates are caused to face each other with the resistor in contact with each other. When a load is applied to the pressure sensitive device, both substrates and the like deflect and press against the two resistors increases. as a result, the contact area between the two resistors increases and the contact resistance decreases. thus, the output resistance value decreases. The pressure sensitive device of PTL 1 can be said to be a resistive-type pressure sensitive sensor.
Patent Document 2 discloses a tactile sensor having a configuration in which a pair of electrodes are attached to a magnetic rubber body. A force (shear stress, shear stress, and the like) from the object to be inspected is applied to the magnetic rubber member by changing the contact state between the tactile sensor and the object to be inspected, and the amount of current between the pair of electrodes changes. The amount of current is detected to detect the object to be inspected.
In order to detect pressure and shear stress using the pressure sensitive sensor or the tactile sensor disclosed in Patent Document 1 or 2 described above, it is necessary that a force detection layer, such as a conductive body or a magnetic rubber body, between opposing electrodes, has room for sufficient deformation in the direction of the force. In other words, the greater the amount of deformation before and after the application of stress, the better the stress can be detected, so it is preferable that the detection layer be deformed. In order to make it easier to deform using the same material, it is necessary to increase the thickness of the sensing layer. This prevents a reduction in thickness of the pressure sensitive sensor or the tactile sensor. In addition to the pressure sensitive sensor and the like described above, there is also an example in which a tactile sensor is configured by applying a conductive polymer to two electrodes and bonding them together. However, since the electrodes are not in contact with each other (in close contact with each other), there is a problem in that the reaction under low stress (such as in a case where deformation in the horizontal direction when a shear stress is applied is small) is unstable, and measurement is difficult. Furthermore, with this sensor, there is a problem in that individual differences in manufacturing are large and it is difficult to suppress variations.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • HIROSAKI UNIVERSITY
  • 発明者(英語)
  • SASAGAWA Kazuhiko
国際特許分類(IPC)
指定国 National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DJ DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS IT JO JP KE KG KH KN KP KR KW KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN WS ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG

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