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Photoacid generator

Foreign code F110003155
File No. A121-58WO
Posted date Jun 17, 2011
Country United States of America
Application number 57378004
Gazette No. 20070059633
Gazette No. 7550246
Date of filing Sep 24, 2004
Gazette Date Mar 15, 2007
Gazette Date Jun 23, 2009
International application number JP2004014433
International publication number WO2005030784
Date of international filing Sep 24, 2004
Date of international publication Apr 7, 2005
Priority data
  • P2003-338664 (Sep 29, 2003) JP
  • 2004WO-JP14433 (Sep 24, 2004) WO
Title Photoacid generator
Abstract (US7550246)
A photoacid generator comprising a metal hydride complex represented by the formula (I): wherein X represents a metal atom.
The iridium hydride complex of the present invention can be used as an acid generator for chemically-amplified photoresists or color filters for liquid crystal, and in addition, can be widely applied in photographic-related or printing-related fields, or the like.
Scope of claims [claim1]
1. A method for generating an acid, said method comprising: (a) providing a metal hydride complex of the following formula (I) dissolved in a solution consisting essentially of a solvent
wherein X represents a metal atom; and
(b) exciting the metal hydride complex by irradiating the complex with a laser beam until deprotonation of the metal hydride complex takes place; thereby
(c) producing an acidic solution.
[claim2]
2. The method for generating acid of claim 1 wherein the metal hydride complex is dissolved in an organic solvent.
[claim3]
3. The method for generating an acid of claim 1, wherein the metal hydride complex is dissolved in water.
[claim4]
4. The method for generating an acid of claim 1, wherein the metal atom is iridium.
[claim5]
5. The method for generating acid of claim 1, wherein the metal atom is ruthenium.
[claim6]
6. The method for generating an acid of claim 1, wherein the metal atom is rhodium.
[claim7]
7. The method for generating acid of claim 1, wherein the metal atom is cobalt.
[claim8]
8. The method for generating an acid of claim 2, wherein the organic solvent is one or more of acetonitrile, a primary, secondary or tertiary alcohol, a polyhydric alcohol, dimethyl formamide, dimethyl sulfoxide and ethyl acetate.
[claim9]
9. A method for generating an acid for a chemically-amplified photoresist or a color filter for liquid crystals, said method comprising: (a) providing a metal hydride complex of formula (I) dissolved in a solution consisting essentially of a solvent
wherein X represents a metal atom; and
(b) exciting the metal hydride complex by irradiating the complex with a laser beam until deprotonation of the metal hydride complex takes place; thereby
(c) producing an acidic solution.
[claim10]
10. The method for generating an acid for a chemically-amplified photoresist or a color filter for liquid crystals of claim 9, wherein the metal atom is iridium.
[claim11]
11. The method for generating an acid for a chemically-amplified photoresist or a color filter for liquid crystals of claim 9, wherein the metal atom is ruthenium.
[claim12]
12. The method for generating an acid for a chemically-amplified photoresist or a color filter for liquid crystals of claim 9, wherein the metal atom is rhodium.
[claim13]
13. The method for generating an acid for a chemically-amplified photoresist or a color filter for liquid crystals of claim 9, wherein the metal atom is cobalt.
[claim14]
14. The method for generating acid of claim 9, wherein the metal hydride complex is dissolved in an organic solvent.
[claim15]
15. The method for generating acid of claim 9, wherein the metal hydride complex is dissolved in water.
[claim16]
16. The method for generating an acid of claim 14, wherein the organic solvent is one or more of acetonitrile, a primary, secondary or tertiary alcohol, a polyhydric alcohol, dimethyl formamide, dimethyl sulfoxide and ethyl acetate.
[claim17]
17. The method for generating acid of claim 2, wherein the organic solvent is methanol.
[claim18]
18. The method for generating an acid of claim 14, wherein the organic solvent is methanol.
[claim19]
19. A method for generating an acid, said method comprising: (a) providing a metal hydride complex of the following formula (I) in solution
wherein X represents a metal atom; and
(b) exciting the metal hydride complex by irradiating the complex with a laser beam until deprotonation of the metal hydride complex takes place wherein deprotonation is caused only by excitation by said laser beam; thereby
(c) producing an acidic solution.
[claim20]
20. A method for generating an acid, said method consisting essentially of: (a) providing a metal hydride complex of the following formula (I) in solution
wherein X represents a metal atom; and
(b) exciting the metal hydride complex by irradiating the complex with a laser beam until deprotonation of the metal hydride complex takes place; thereby
(c) producing an acidic solution.
[claim21]
21. A method for generating an acid for a chemically-amplified photoresist or a color filter for liquid crystals, said method comprising: (a) providing a metal hydride complex of formula (I) in solution
wherein X represents a metal atom; and
(b) exciting the metal hydride complex by irradiating the complex with a laser beam until deprotonation of the metal hydride complex takes place wherein deprotonation is caused only by excitation by said laser beam; thereby
(c) producing an acidic solution.
[claim22]
22. A method for generating an acid for a chemically-amplified photoresist or a color filter for liquid crystals, said method consisting essentially of: (a) providing a metal hydride complex of formula (I) in solution
wherein X represents a metal atom; and
(b) exciting the metal hydride complex by irradiating the complex with a laser beam until deprotonation of the metal hydride complex takes place; thereby
(c) producing an acidic solution.
  • Inventor, and Inventor/Applicant
  • FUKUZUMI SHUNICHI
  • OGO SEIJI
  • SUENOBU TOMOYOSHI
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY
IPC(International Patent Classification)
Reference ( R and D project ) CREST Creation and Functions of New Molecules and Molecular Assemblies AREA
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