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MASKING MECHANISM FOR FILM-FORMING DEVICE

Foreign code F110003294
File No. A051-93EP
Posted date Jun 22, 2011
Country EPO
Application number 03797681
Gazette No. 1541706
Gazette No. 1541706
Date of filing Sep 19, 2003
Gazette Date Jun 15, 2005
Gazette Date May 30, 2012
International application number PCT/JP2003/011950
International publication number WO2004/027107
Date of international filing Sep 19, 2003
Date of international publication Apr 1, 2004
Priority data
  • P2002-275365 (Sep 20, 2002) JP
Title MASKING MECHANISM FOR FILM-FORMING DEVICE
  • Applicant
  • Japan Science and Technology Agency
  • Inventor
  • KOINUMA, Hideomi
  • YAMAMOTO, Yukio
  • MATSUMOTO, Yuji
  • TAKAHASHI, Ryota
IPC(International Patent Classification)
Reference ( R and D project ) CREST Single Molecule and Atom Level Reactions AREA
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