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Cantilever for scanning probe microscope and scanning probe microscope equipped with it

外国特許コード F110003386
整理番号 A252-28WO
掲載日 2011年6月23日
出願国 アメリカ合衆国
出願番号 88734806
公報番号 20100154085
公報番号 8601608
出願日 平成18年3月30日(2006.3.30)
公報発行日 平成22年6月17日(2010.6.17)
公報発行日 平成25年12月3日(2013.12.3)
国際出願番号 JP2006306648
国際公開番号 WO2006106818
国際出願日 平成18年3月30日(2006.3.30)
国際公開日 平成18年10月12日(2006.10.12)
優先権データ
  • 特願2005-100934 (2005.3.31) JP
  • 2006WO-JP306648 (2006.3.30) WO
発明の名称 (英語) Cantilever for scanning probe microscope and scanning probe microscope equipped with it
発明の概要(英語) (US8601608)
A microscope including both an atomic force microscope and a near-field optical microscope and capable of performing electrochemical measurements and a cantilever for the microscope are disclosed.
A pointed light transmitting material employed as the probe of an atomic force microscope is coated with a metal layer; the metal layer is further coated with an insulating layer; the insulating layer is removed only at the distal end to expose the metal layer; the slightly exposed metal layer is employed as a working electrode; and the probe can be employed not only as the probe of the atomic force microscope and the near-field optical microscope but also as the electrode of an electrochemical microscope.
Consequently, the microscope can have the functions of an atomic force microscope, a near-field optical microscope and an electrochemical microscope.
特許請求の範囲(英語) [claim1]
1. A cantilever for a scanning probe microscope, said cantilever comprising: a probe provided on the tip of said cantilever, the probe comprising: a substrate that is at least partly light transmitting;
a conductive layer formed on said substrate; and
an insulating layer laminated on said conductive layer; and
an optical waveguide communicating with said light transmitting substrate of said probe, said light transmitting substrate existing continuously up to the tip of said probe,
wherein when said probe is viewed from the tip end, said conductive layer is formed on the periphery of an opening of the tip of said probe on which said conductive layer is absent,
wherein said insulating layer is formed on the periphery of said conductive layer,
wherein a distal end of the substrate does not extend past a distal end of the insulating layer,
wherein the surface of said conductive layer is formed smoothly without a step or edge, and
wherein a distal end of the conductive layer, the distal end of the substrate and the distal end of the insulating layer are coplanar.
[claim2]
2. The cantilever of claim 1, wherein said cantilever is formed of an optical fiber integrally with said probe, and wherein the tip of said optical fiber is pointed and the tip of said optical fiber is curved from the longitudinal axis of said optical fiber.
[claim3]
3. The cantilever of claim 1 or 2, wherein the outermost surface of said conductive layer is made of gold, gold alloy, platinum or carbon.
[claim4]
4. The cantilever of claim 1, wherein said scanning probe microscope has functions of an atomic force microscope, an electrochemical microscope and a near-field optical microscope; wherein said conductive layer is used as a working electrode of said electrochemical microscope; and
wherein an evanescent light is radiated and/or an evanescent light generated from a surface of a sample is condensed through said light transmitting substrate.
[claim5]
5. A straight probe for a scanning probe microscope, said probe comprising: a substrate that is at least partly light transmitting;
a conductive layer formed on said substrate; and
an insulating layer laminated on said conductive layer;
said light transmitting substrate existing continuously up to the tip of said probe,
wherein when said probe is viewed from the tip end, said conductive layer is formed on the periphery of an opening of the tip of said probe on which said conductive layer is absent,
wherein said insulating layer is formed on the periphery of said conductive layer,
wherein a distal end of the substrate does not extend past a distal end of the insulating layer, and
wherein the surface of said conductive layer is formed smoothly without a step or edge,
wherein a distal end of the conductive layer, the distal end of the substrate and the distal end of the insulating layer are coplanar.
[claim6]
6. The probe of claim 5, wherein the outermost surface of said conductive layer is made of gold, gold alloy, platinum or carbon.
[claim7]
7. The probe of claim 5, wherein said scanning probe microscope has functions of an atomic force microscope, an electrochemical microscope and a near-field optical microscope; wherein said conductive layer is used as a working electrode of said electrochemical microscope; and
wherein an evanescent light is radiated and/or an evanescent light generated from a surface of a sample is condensed through said light transmitting substrate.
[claim8]
8. A process of producing said cantilever of claim 1, said process comprising the steps of: forming said conductive layer on said substrate;
forming said insulating layer by electrodeposition of an insulative paint using said conductive layer as one of electrodes;
heating the formed insulating layer to expose said conductive layer at the tip of said probe; and
removing at least a part of the conductive layer exposed from said insulating layer at the tip of said probe to form an opening.
[claim9]
9. The process of claim 8, wherein at least a part of the conductive layer is removed together with the substrate thereunder by irradiation of an ion beam.
[claim10]
10. A scanning probe microscope comprising said cantilever of claim 1.
[claim11]
11. A scanning probe microscope comprising said probe of claim 5.
[claim12]
12. The scanning probe microscope of claim 10 which has a function of an atomic force microscope by measuring the displacement of said cantilever; a function of an electrochemical microscope by measuring electrochemical reactions using said conductive layer as a working electrode; and
a function of a near-field optical microscope by radiating an evanescent light and/or condensing an evanescent light generated from a surface of a sample through light transmitting substrate on the tip of said probe.
[claim13]
13. The scanning probe microscope of claim 11 which has a function of an atomic force microscope by measuring the displacement of said cantilever; a function of an electrochemical microscope by measuring electrochemical reactions using said conductive layer as a working electrode; and
a function of a near-field optical microscope by radiating an evanescent light and/or condensing an evanescent light generated from a surface of a sample through light transmitting substrate on the tip of said probe.
[claim14]
14. The cantilever of claim 1, wherein the substrate comprises a core and a cladding layer.
[claim15]
15. The probe of claim 5, wherein the substrate comprises a core and a cladding layer.
[claim16]
16. The cantilever of claim 1, wherein the conductive layer directly contacts the substrate and the insulating layer, and wherein the insulating layer forms an outermost layer.
[claim17]
17. The probe of claim 5, wherein the conductive layer directly contacts the substrate and the insulating layer, and wherein the insulating layer forms an outer most layer.
[claim18]
18. The cantilever of claim 1, wherein a diameter at a distal end of the opening at the tip end is between 0.2 nm and 200 nm.
[claim19]
19. The probe of claim 5, wherein a diameter at a distal end of the opening at the tip end is between 0.2 nm and 200 nm.
  • 発明者/出願人(英語)
  • MARUYAMA KENICHI
  • SUZUKI KOJI
  • IYOKI MASATO
  • HITACHI
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY
国際特許分類(IPC)
参考情報 (研究プロジェクト等) CREST Creation of Bio-Devices and Bio-Systems with Chemical and Biological Molecules for Medical Use AREA
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