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MEASURING PROBE, SAMPLE SURFACE MEASURING APPARATUS AND SAMPLE SURFACE MEASURING METHOD meetings

Foreign code F110004015
File No. K02206WO
Posted date Jul 8, 2011
Country EPO
Application number 07714179
Gazette No. 1985991
Gazette No. 1985991
Date of filing Feb 14, 2007
Gazette Date Oct 29, 2008
Gazette Date Jun 13, 2012
International application number PCT/JP2007/052626
International publication number WO2007/094365
Date of international filing Feb 14, 2007
Date of international publication Aug 23, 2007
Priority data
  • P2006-037030 (Feb 14, 2006) JP
Title MEASURING PROBE, SAMPLE SURFACE MEASURING APPARATUS AND SAMPLE SURFACE MEASURING METHOD meetings
  • Applicant
  • Japan Science and Technology Agency
  • Inventor
  • FUKUZAWA, Kenji
  • SHIKITA, Mitsuhiro
  • TERADA, Satoshi
IPC(International Patent Classification)
Reference ( R and D project ) PRESTO Structure Function and Measurement Analysis AREA
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