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Precise and high-load-resistance moving method and device

Foreign code F110004066
File No. N021-05EP2
Posted date Jul 8, 2011
Country EPO
Application number 07003909
Gazette No. 1793432
Gazette No. 1793432
Date of filing May 20, 2005
Gazette Date Jun 6, 2007
Gazette Date Jan 26, 2011
Priority data
  • P2004-150134 (May 20, 2004) JP
Title Precise and high-load-resistance moving method and device
  • Applicant
  • Japan Science and Technology Agency
  • Inventor
  • Kawakatsu, Hideki
IPC(International Patent Classification)
Reference ( R and D project ) CREST Nano Factory and Process Monitoring for Advanced Information Processing and Communication AREA
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