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Corpuscular beam image detector using gas amplification by pixel type electrodes

Foreign code F110005076
File No. A051-48US
Posted date Aug 18, 2011
Country United States of America
Application number 06923702
Gazette No. 20020134945
Gazette No. 06822239
Date of filing Feb 22, 2002
Gazette Date Sep 26, 2002
Gazette Date Nov 23, 2004
International application number PCT/JP01/05165
International publication number WO02/01249
Date of international filing Jun 18, 2001
Date of international publication Jan 3, 2002
Priority data
  • P2000-191994 (Jun 27, 2000) JP
Title Corpuscular beam image detector using gas amplification by pixel type electrodes
Abstract A particle beam image detector employing gas amplification attained by pixel-type electrodes has high sensitivity and improved reliability of electrodes. Electrons e- produced through ionization of the gas move under the force of a drift field toward a pixel in the form of a columnar anode electrode. Avalanche amplification occurs in the vicinity of the columnar anode electrode due to a strong electric field between anode and cathode and the pointed shape of the electrode. The positive ions quickly drift toward strip-shaped cathode electrodes. Electric charges are generated on the columnar anode electrodes and also on the strip-shaped cathodes and these electric charges are observable to determine the anode or cathode strip at which this amplification phenomenon occurs and thus to obtain information as to position of the incident particle beam.
  • Inventor, and Inventor/Applicant
  • Tanimori, Toru; Kyoto [JP]
  • Ochi, Atsuhiko; Kobe [JP]
  • Japan Science and Technology Corporation, [JP]
IPC(International Patent Classification)
Reference ( R and D project ) CREST Single Molecule and Atom Level Reactions AREA
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