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Infrared focusing device

Foreign code F110005248
File No. B15-01US
Posted date Aug 29, 2011
Country United States of America
Application number 51907803
Gazette No. 20050254121
Gazette No. 7391564
Date of filing Apr 22, 2003
Gazette Date Nov 17, 2005
Gazette Date Jun 24, 2008
International application number JP2003005104
International publication number WO2004003519
Date of international filing Apr 22, 2003
Date of international publication Jan 8, 2004
Priority data
  • P2002-188508 (Jun 27, 2002) JP
  • 2003WO-JP05104 (Apr 22, 2003) WO
Title Infrared focusing device
Abstract (US7391564)
An infrared light condensing apparatus that focuses an infrared light of several tens microns in wavelength at a microfine area of submicron or less and also a near-field from a microfine area of submicron or less, and permits a scanning image to be obtained.
It includes a solid immersion lens including a medium of high index of refraction for coupling an incident light or an outgoing light to an antenna, a measured specimen disposed on a base plane of the solid immersion lens, an antenna disposed away from the base plane at a distance ¼ of an effective wavelength of the light for causing the light to geometrically resonate therewith, a rod-like conductive probe having a sharply point end projecting from the antenna, and a position control means such as a triaxial XYZ mechanical stage for controlling the position of the probe with the intermediary of a cantilever.
Scope of claims [claim1]
1. An infrared light condensing apparatus, comprising: a solid immersion lens for accepting an incident light or emitting an outgoing light, said solid immersion lens having a base plane on which a specimen is disposed in direct contact with the solid immersion lens;
an antenna comprising an electrically conductive material, the antenna having a probe disposed away from said base plane of said solid immersion lens at a distance not more than 1/4 of an effective wavelength of the light;a holder means for retaining said antenna;
and
a position control means for controlling a position of a tip of said probe by means of said holder means,wherein operating said position control means allows:the incident light to concentrate as a near-field at a desired position of the specimen on the base plane of said solid immersion lens ora near-field from a desired position of the specimen to be converted into a propagating wave corresponding thereto and then the propagating wave to be emitted as said outgoing light from said solid immersion lens.
[claim2]
2. An infrared light condensing apparatus as set forth in claim 1, wherein said solid immersion lens comprises a medium that is low in absorption coefficient and large in dielectric constant for wavelengths of said incident or outgoing light.
[claim3]
3. An infrared light condensing apparatus as set forth in claim 1 or 2, wherein said antenna comprises an electric conductor having a length that is one half of the effective wavelength of said incident or outgoing light to condense the incident light upon causing it to geometrically resonate orto pick up a near-field from said specimen in a region of the pointed tip of said probe upon causing it to geometrically resonate and then to emit it as a wave propagating in the medium of said solid immersion lens.
[claim4]
4. An infrared light condensing apparatus as set forth in claim 1 or 2, wherein the tip of said probe is a sharply pointed end of a rod-like electric conductor having a radius of curvature less than a diffraction limit of said incident or outgoing light and is configured to project from said electric conductor towards said specimen to cause the geometrically resonating incident light condensed on said antenna to concentrate as a near-field at said probe tip orto take out a near-field from a surface of said specimen.
[claim5]
5. An infrared light condensing apparatus as set forth in claim 1 or 2, wherein said holder means comprises an arm and said position control means comprises a triaxial XYZ mechanical stage.
[claim6]
6. An infrared light condensing apparatus as set forth in claim 1 or 2, wherein said holder means comprises a cantilever having a rear face reflecting an incident laser light and said position control means is adapted to respond to a change in angle of reflection of the laser light at the cantilever rear face for controlling the distance between said probe tip and the surface of said specimen.
[claim7]
7. An infrared light condensing apparatus as set forth in claim 1, wherein said holder means is a cantilever.
[claim8]
8. An infrared light condensing apparatus as set forth in claim 7, wherein said cantilever is scanned by said position control means.
[claim9]
9. An infrared light condensing apparatus as set forth in claim 7, wherein said position control means controls the distance between said probe tip and the surface of said specimen, responding to a change in angle of reflection of the laser light at the rear face of said cantilever.
  • Inventor, and Inventor/Applicant
  • KOMIYAMA SUSUMU
  • IKUSHIMA KENJI
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY
IPC(International Patent Classification)
Reference ( R and D project ) SORST Selected in Fiscal 2001
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