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Magnetic tunnel junction device and memory device including the same

Foreign code F110005388
File No. K02012WO
Posted date Sep 5, 2011
Country United States of America
Application number 59194705
Gazette No. 20070195592
Gazette No. 7884403
Date of filing Mar 10, 2005
Gazette Date Aug 23, 2007
Gazette Date Feb 8, 2011
International application number JP2005004720
International publication number WO2005088745
Date of international filing Mar 10, 2005
Date of international publication Sep 22, 2005
Priority data
  • P2004-071186 (Mar 12, 2004) JP
  • P2004-313350 (Oct 28, 2004) JP
  • 2005WO-JP04720 (Mar 10, 2005) WO
Title Magnetic tunnel junction device and memory device including the same
Abstract (US7884403)
The output voltage of an MRAM is increased by means of an Fe(001)/MgO(001)/Fe(001) MTJ device, which is formed by microfabrication of a sample prepared by the following steps.
A single-crystalline MgO (001) substrate 11 is prepared.
An epitaxial Fe(001) lower electrode (a first electrode) 17 with the thickness of 50 nm is grown on a MgO(001) seed layer 15 at room temperature, followed by annealing under ultrahigh vacuum (2×10-8 Pa) and at 350° C.
A MgO(001) barrier layer 21 with the thickness of 2 nm is epitaxially formed on the Fe(001) lower electrode (the first electrode) at room temperature, using a MgO electron-beam evaporation.
A Fe(001) upper electrode (a second electrode) with the thickness of 10 nm is then formed on the MgO(001) barrier layer 21 at room temperature.
This is successively followed by the deposition of a Co layer 21 with the thickness of 10 nm on the Fe(001) upper electrode (the second electrode) 23.
The Co layer 21 is provided so as to increase the coercive force of the upper electrode 23 in order to realize an antiparallel magnetization alignment.
Scope of claims [claim1]
1. A magnetoresistive device having a tunnel barrier junction structure, the magnetoresistive device comprising: a tunnel barrier layer;
a first ferromagnetic material layer of a BCC structure formed on a first side of said tunnel barrier layer; and
a second ferromagnetic material layer of the BCC structure formed on a second side of said tunnel barrier layer, wherein
said tunnel barrier layer is formed by a single-crystalline MgOx (001) (0<x<1) or a poly-crystalline MgOx (0<x<1) in which (001) crystal plane is preferentially oriented, and
wherein a tunnel barrier height between a bottom of a conduction band of said tunnel barrier layer and a Fermi energy of at least one of said first and second ferromagnetic layers is a discontinuous value in a range of 0.2 to 0.5 eV.
[claim2]
2. The magnetoresistive device according to claim 1, wherein said ferromagnetic material comprises a single-crystalline (001) of Fe or Fe-based alloy, or a poly-crystalline of Fe or Fe-based alloy in which (001) crystal plane is preferentially oriented.
[claim3]
3. The magnetoresistive device according to claim 1, wherein a magnetoresistance ratio of said magnetoresistive device is more than 70%.
[claim4]
4. The magnetoresistive device according to claim 1, wherein said first ferromagnetic material layer comprises CoFeB alloy.
[claim5]
5. A magnetoresistive device, comprising: a first ferromagnetic material layer of a BCC structure;
a second ferromagnetic material layer of the BCC structure; and
a magnesium oxide layer located between said first ferromagnetic material layer and said second ferromagnetic material layer, wherein
said magnesium oxide is a single-crystalline (001) or a poly-crystalline crystalline in which (001) crystal plane is preferentially oriented,
wherein said magnesium oxide has oxygen vacancy defects, and
wherein said magnesium oxide has a tunnel barrier height in a range of 0.2 to 0.5 eV.
[claim6]
6. A magnetoresistive device having a magnetic tunnel junction structure comprising: a tunnel barrier layer;
a first ferromagnetic material layer of a BCC structure formed on a first side of said tunnel barrier layer; and
a second ferromagnetic material layer of the BCC structure formed on a second side of said tunnel barrier layer, wherein
said tunnel barrier layer comprises a poly-crystalline MgO in which (001) crystal plane is preferentially oriented, said MgO having oxygen vacancy defects,
wherein said tunnel barrier layer has a tunnel barrier height of 0.2 to 0.5 eV, and
wherein a magnetoresistance ratio of said device is more than 70%.
[claim7]
7. A magnetoresistive device having a magnetic tunnel junction structure, the magnetoresistive device comprising: a tunnel barrier layer;
a first ferromagnetic material layer of a BCC structure formed on a first side of said tunnel barrier layer; and
a second ferromagnetic material layer of the BCC structure formed on a second side of said tunnel barrier layer, wherein
said tunnel barrier layer comprises a poly-crystalline magnesium oxide having oxygen vacancy defects in which (001) crystal plane is preferentially oriented,
said tunnel barrier layer has a tunnel barrier height of 0.2 to 0.5 eV, and
a magnetoresistance ratio of said device is more than 70%.
[claim8]
8. A memory device comprising: a transistor; and
a magnetoresistive device comprising a tunnel barrier layer;
a first ferromagnetic material layer of a BCC structure formed on a first side of said tunnel barrier layer; and
a second ferromagnetic material layer of the BCC structure formed on a second side of said tunnel barrier layer, wherein
said tunnel barrier layer is formed by a single-crystalline MgOx (001) (0<x<1) or a poly-crystalline MgOx (0<x<1) in which (001) crystal plane is preferentially oriented, wherein
a tunnel barrier height of said tunnel barrier layer is in a range of 0.2 to 0.5 eV and said magnetoresistive device is used as a load for said transistor.
  • Inventor, and Inventor/Applicant
  • YUASA SHINJI
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY
  • NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
IPC(International Patent Classification)
Reference ( R and D project ) PRESTO Nanostructure and Material Property AREA
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