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Spin polarized ion beam generation apparatus and scattering spectroscopy apparatus using the spin polarized ion beam and specimen processing apparatus 新技術説明会

外国特許コード F110005397
整理番号 K02208WO
掲載日 2011年9月5日
出願国 アメリカ合衆国
出願番号 51635107
公報番号 20100044564
公報番号 8017920
出願日 平成19年11月29日(2007.11.29)
公報発行日 平成22年2月25日(2010.2.25)
公報発行日 平成23年9月13日(2011.9.13)
国際出願番号 JP2007073121
国際公開番号 WO2008069110
国際出願日 平成19年11月29日(2007.11.29)
国際公開日 平成20年6月12日(2008.6.12)
優先権データ
  • 特願2006-321044 (2006.11.29) JP
  • 特願2007-190277 (2007.7.23) JP
  • 2007WO-JP73121 (2007.11.29) WO
発明の名称 (英語) Spin polarized ion beam generation apparatus and scattering spectroscopy apparatus using the spin polarized ion beam and specimen processing apparatus 新技術説明会
発明の概要(英語) (US8017920)
A spin polarized ion beam generation apparatus (30) can efficiently generate a spin polarized ion by using a pumping light generator (33) to an ion in a high frequency discharge tube (15) to irradiate optical pumping (33,34) by circularly polarized light and linearly polarized light orthogonal to each other to a metastable atom.
For example, a polarized helium ion beam having a spin polarization rate that exceeds 18% and that is as high as 25% can be generated.
The spin polarized ion beam generation apparatus (30) also can be applied to a processing apparatus and an analysis apparatus that can irradiate a polarized ion beam to a specimen.
According to the spin polarized ion scattering spectroscopy apparatus, the spin status in a region at a depth of about 2 to 3 atomic layers from the surface of the specimen can be measured while discriminating the elements from the atomic layer with a reduced measurement time and with a high accuracy impossible in the conventional technique.
特許請求の範囲(英語) [claim1]
1. A spin polarized ion beam generation apparatus comprising: a high frequency discharge tube for ion generation;
a laser oscillator; and
a pumping light generator that divides a laser light from said laser oscillator to two lights of a circularly polarized first pumping light and a linearly polarized second pumping light to emit these lights to said high frequency discharge tube with an irradiation angle difference of 90 degrees therebetween, wherein
an extraction electrode for extracting a polarized ion is provided to said high frequency discharge tube.
[claim2]
2. The spin polarized ion beam generation apparatus as set forth in claim 1, wherein said polarized ion beam is extracted in a direction orthogonal to both of said circularly polarized light and said linearly polarized light.
[claim3]
3. The spin polarized ion beam generation apparatus as set forth in claim 1, wherein said high frequency discharge tube includes a repeller electrode opposed to said extraction electrode.
[claim4]
4. The spin polarized ion beam generation apparatus as set forth in claim 3, wherein said extraction electrode includes a fine pore.
[claim5]
5. The spin polarized ion beam generation apparatus as set forth in claim 1, wherein said pumping light generator includes a circularly polarized light controller that controls said circularly polarized first pumping light in a clockwise or a counterclockwise direction.
[claim6]
6. The spin polarized ion beam generation apparatus as set forth in claim 1, wherein said laser oscillator outputs a laser light with a wavelength adjusted so that a polarization rate of a metastable atom as a base of an ion is maximum, said polarization rate being calculated by a measurement of absorption of a probe laser.
[claim7]
7. The spin polarized ion beam generation apparatus as set forth in claim 1 or 6, wherein said ion is a helium ion, said first and second pumping lights have a wavelength of a D0 line, and said probe light has a wavelength of a D0 line that is circularly polarized light in a counterclockwise or clockwise direction.
[claim8]
8. The spin polarized ion beam generation apparatus as set forth in claim 1 or 3, wherein said high frequency discharge tube has therein a helium pressure of 15 Pa or more and 50 Pa or less.
[claim9]
9. A spin polarized ion scattering spectroscopy apparatus comprising: a spin polarized ion beam generator;
a spin polarized ion beam line that irradiates a spin polarized ion beam generated from said spin polarized ion beam generator to a specimen; and
a measurement section that measures energy of ions scattered by interaction of said specimen with said spin polarized ion beam, wherein
said spin polarized ion beam generator including:
a high frequency discharge tube for ion generation;
a laser oscillator; and
a pumping light generator that divides a laser light from said laser oscillator to two lights of a circularly polarized first pumping light and a linearly polarized second pumping light to emit these lights to said high frequency discharge tube with an irradiation angle difference of 90 degrees therebetween, wherein
an extraction electrode for extracting said polarized ion is provided to said high frequency discharge tube.
[claim10]
10. The spin polarized ion beam generation apparatus as set forth in claim 9, wherein said polarized ion beam is extracted in a direction orthogonal to both of said circularly polarized light and said linearly polarized light.
[claim11]
11. The spin polarized ion scattering spectroscopy apparatus as set forth in claim 9, wherein said high frequency discharge tube includes a repeller electrode opposed to said extraction electrode.
[claim12]
12. The spin polarized ion scattering spectroscopy apparatus as set forth in claim 11, wherein said extraction electrode includes a fine pore.
[claim13]
13. The spin polarized ion scattering spectroscopy apparatus as set forth in claim 9, wherein said pumping light generator includes a circularly polarized light controller that controls a circularly polarized light of said first pumping light in a clockwise or a counterclockwise direction.
[claim14]
14. The spin polarized ion scattering spectroscopy apparatus as set forth in claim 9, wherein said laser oscillator outputs a laser light with a wavelength adjusted so that a polarization rate of a metastable atom as a base of an ion is maximum, said polarization rate being calculated by a measurement of absorption of a probe laser.
[claim15]
15. The spin polarized ion scattering spectroscopy apparatus as set forth in claim 9, further comprising: a specimen stage that can control an incident angle to a spin polarized ion entering said specimen.
[claim16]
16. The spin polarized ion scattering spectroscopy apparatus as set forth in claim 9, wherein said spin polarized ion beam line includes a lens having a fine pore functioning as an evacuation hole and said lens is made of a non magnetic material.
[claim17]
17. The spin polarized ion scattering spectroscopy apparatus as set forth in claim 9 or 14, wherein said ion is a helium ion and said first and second pumping lights have a wavelength of a D0 line.
[claim18]
18. A spin polarized ion scattering spectroscopy using the spin polarized ion scattering spectroscopy apparatus according to any of claims 9 to 16 comprising: a step of causing spin polarized ion to enter a specimen;
a step of measuring scattered ions from said specimen; and
a step of measuring scattered ion intensities with regard to respective spins of incident ion species to analyze a magnetic structure of a surface of said specimen based on a dependency of said specimen on a spin of a probability at which an ion enters said specimen is neutralized.
[claim19]
19. The spin polarized ion scattering spectroscopy as set forth in claim 18 further comprising: a step of detecting the scattered ion intensity by an electrostatic analyzer to analyze a magnetic structure of a surface said a specimen based on a difference in the scattered ion intensity depending on a direction of a spin of said ion.
[claim20]
20. The spin polarized ion scattering spectroscopy as set forth in claim 18, further comprising: a step of measuring a dependency of said scattered ion intensity on an incident angle of said spin polarized ion to said specimen; and a step of analyzing a spin while discriminating, based on the measurement of said scattered ion intensity, an atomic layer from an element in a direction of the depth from a surface of said specimen.
[claim21]
21. The spin polarized ion scattering spectroscopy as set forth in claim 18 further comprising: a step of analyzing a magnetic structure of a surface of said specimen based on a detected amount by an electrostatic analyzer before and after changing a direction of a spin of said spin polarized ion.
[claim22]
22. A specimen processing apparatus using spin polarized ion beam comprising: a spin polarized ion beam generator;
a spin polarized ion beam line that irradiates a spin polarized ion beam generated from said spin polarized ion beam generator to a specimen; and
an ultrahigh vacuum chamber that is irradiated a shaped spin polarized ion beam from said spin polarized ion beam line to said specimen thereof, wherein
said spin polarized ion beam generator including:
a high frequency discharge tube for ion generation;
a laser oscillator; and
a pumping light generator that divides a laser light from said laser oscillator to two lights of a circularly polarized first pumping light and a linearly polarized second pumping light to emit these lights to said high frequency discharge tube with an irradiation angle difference of 90 degrees therebetween, wherein
an extraction electrode for extracting said polarized ion is provided to said high frequency discharge tube.
[claim23]
23. The specimen processing apparatus using spin polarized ion beam as set forth in claim 22, wherein said polarized ion beam is extracted in a direction orthogonal to both of said circularly polarized light and said linearly polarized light.
[claim24]
24. The specimen processing apparatus using spin polarized ion beam as set forth in claim 22, wherein said high frequency discharge tube includes a repeller electrode opposed to said extraction electrode.
[claim25]
25. The specimen processing apparatus using spin polarized ion beam as set forth in claim 22, wherein said extraction electrode includes a fine pore.
[claim26]
26. The specimen processing apparatus using spin polarized ion beam as set forth in claim 22, wherein said pumping light generator includes a circularly polarized light controller that controls a circularly polarized light of said first pumping light in a clockwise or a counterclockwise direction.
[claim27]
27. The specimen processing apparatus using spin polarized ion beam as set forth in claim 22, wherein said laser oscillator outputs laser light with a wavelength adjusted so that a polarization rate of a metastable atom as a base of an ion is maximum, said polarization rate being calculated by a measurement of absorption of a probe laser.
[claim28]
28. The specimen processing apparatus using spin polarized ion beam as set forth in claim 22, further compring: a specimen stage that can control an incident angle to said spin polarized ion entering said specimen.
[claim29]
29. The specimen processing apparatus using spin polarized ion beam as set forth in claim 22, wherein said spin polarized ion beam line includes a lens having a fine pore functioning as an evacuation hole and said lens is made of non magnetic material.
[claim30]
30. The specimen processing apparatus using spin polarized ion beam as set forth in claim 22 or 26, wherein said ion is a helium ion and said first and second pumping lights have a wavelength of a D0 line.
  • 発明者/出願人(英語)
  • SUZUKI TAKU
  • YAMAUCHI YASUSHI
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY
国際特許分類(IPC)
米国特許分類/主・副
  • G01R033/28B
  • H01J027/16
  • H01J027/24
  • H01J037/08
参考情報 (研究プロジェクト等) PRESTO Structure Function and Measurement Analysis AREA
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