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Method and device for visualizing distribution of local electric field

Foreign code F110005408
File No. K02905WO
Posted date Sep 5, 2011
Country United States of America
Application number 92199109
Gazette No. 20110068266
Gazette No. 8330102
Date of filing Mar 13, 2009
Gazette Date Mar 24, 2011
Gazette Date Dec 11, 2012
International application number JP2009054901
International publication number WO2009113670
Date of international filing Mar 13, 2009
Date of international publication Sep 17, 2009
Priority data
  • P2008-064682 (Mar 13, 2008) JP
  • P2008-081187 (Mar 26, 2008) JP
  • 2009WO-JP54901 (Mar 13, 2009) WO
Title Method and device for visualizing distribution of local electric field
Abstract (US8330102)
A method which visualizes the distribution of a local electric field formed near a sample 2 is disclosed.
A primary electron beam 1 which passes through the local electric field formed near the sample 2 is deflected by the local electric field, secondary electrons which are generated and emitted from a detection element provided downstream of an orbit of the deflected primary electron beam 1 are detected by a secondary electron detector 6, and an image formed based on the detected signal and a scanning electron beam image obtained by scanning the sample 2 are synthesized thus visualizing the distribution of the local electric field in multiple tones.
Due to such an operation, it is possible to provide a method for visualizing the distribution of a local electric field in which the distribution of a local electric field can be obtained in multiple tone and in real time by performing image scanning one time using a usual electron beam scanning optical system.
Scope of claims [claim1]
1. A method for visualizing the distribution of a local electric field formed near a sample in an electron beam scanning optical system, wherein a primary electron beam which passes through the local electric field formed near the sample is deflected by the local electric field, secondary electrons which are generated and emitted from a detection element provided downstream of an orbit of the deflected primary electron beam are detected by a secondary electron detector, and an image formed based on the detected signal and a scanning electron beam image obtained by scanning the sample are synthesized thus visualizing the distribution of the local electric field in multiple tone.
[claim2]
2. The method for visualizing the distribution of a local electric field according to claim 1, wherein the sample has a projecting portion, and the local electric field is formed near the projecting portion.
[claim3]
3. The method for visualizing the distribution of a local electric field according to claim 1, wherein a potential is applied to the sample.
[claim4]
4. The method for visualizing the distribution of a local electric field according to any one of claim 1, wherein a detection element having the grid structure which is constituted of a plurality of linear portions arranged in a spaced-apart manner at a fixed interval is used as the detection element.
[claim5]
5. The method for visualizing the distribution of a local electric field according to claim 4, wherein a detection element in which two sets of grid structures each of which is constituted of a plurality of linear portions are arranged orthogonal to each other is used as the detection element.
[claim6]
6. The method for visualizing the distribution of a local electric field according to claim 4, wherein a detection element in which a grid is formed on a substrate, the grid is constituted of a metal element, and a constitutional element of the grid and a constitutional element of the substrate differ from each other in secondary electron generation efficiency with respect to a bombardment of a primary electron beam is used as the detection element.
[claim7]
7. The method for visualizing the distribution of a local electric field according to claim 6, wherein the detection element in which the grid is constituted of Al, Cu or Au is used.
[claim8]
8. The method for visualizing the distribution of a local electric field according to claim 4, wherein a bias voltage is applied to the grid.
[claim9]
9. The method for visualizing the distribution of a local electric field according to claim 8, wherein a contrast of an image which indicates the distribution of the local electric field is adjusted by adjusting intensity of the bias voltage applied to the grid.
[claim10]
10. The method for visualizing the distribution of a local electric field according to claim 4, wherein grid lines which constitute the detection element are individually connected to an A/D converter means, and a scattering angle of the primary electron beam based on the local electric field is detected based on a signal from the A/D converter means.
[claim11]
11. A method for evaluating a local electric field distribution characteristic, wherein a distribution characteristic of a local electric field of the sample is evaluated using the method for visualizing the distribution of a local electric field described in claim 1.
[claim12]
12. The method for evaluating a local electric field distribution characteristic according to claim 11, wherein the dependency of a mechanical distortion or an operation of the sample on the local electric field is evaluated.
[claim13]
13. A local electric field distribution visualizing device for visualizing the distribution of a local electric field formed near a sample in an electron beam scanning optical system in multiple tone, the local electric field distribution visualizing device comprising at least: (a) a scanning radiation part which irradiates a primary electron beam to the sample; (b) a detection part which detects the primary electron beam; (c) a detection element part which detects the primary electron beam deflected by a local electric field formed on the sample; (d) a secondary electron detection part which detects secondary electrons generated and emitted from the detection part which detects the primary electron beam; (e) an image conversion part which converts a signal from the secondary electron detection part; (f) an image conversion part which converts a signal from the primary electron beam detection part; and (g) an image synthesizing and displaying part which synthesizes and displays images from the image conversion parts (e), (f).
[claim14]
14. The local electric field distribution visualizing device according to claim 13, wherein the sample has a projecting portion, and the local electric field is formed near the projecting portion.
[claim15]
15. The local electric field distribution visualizing device according to claim 13, wherein a potential applying part which applies a potential to the sample is provided.
[claim16]
16. The local electric field distribution visualizing device according to claim 13, wherein the detection element part (c) includes a detection element having the grid structure which is constituted of a plurality of linear portions arranged in a spaced apart manner at a fixed interval.
[claim17]
17. The local electric field distribution visualizing device according to claim 16, wherein the detection element part (c) includes a detection element in which two sets of grid structures each of which is constituted of a plurality of linear portions are arranged orthogonal to each other.
[claim18]
18. The local electric field distribution visualizing device according to claim 16, wherein the device includes a grid bias voltage applying part which applies a bias voltage to the grid.
  • Inventor, and Inventor/Applicant
  • FUJITA JUN-ICHI
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY
IPC(International Patent Classification)
Reference ( R and D project ) PRESTO Search for nanomanufacturing technology and its development AREA
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