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Homodyne laser interferometer probe and displacement measurement system using the same

外国特許コード F110005509
整理番号 N021-09WO
掲載日 2011年9月7日
出願国 アメリカ合衆国
出願番号 81743806
公報番号 20090079990
公報番号 7847953
出願日 平成18年3月2日(2006.3.2)
公報発行日 平成21年3月26日(2009.3.26)
公報発行日 平成22年12月7日(2010.12.7)
国際出願番号 JP2006303935
国際公開番号 WO2006093210
国際出願日 平成18年3月2日(2006.3.2)
国際公開日 平成18年9月8日(2006.9.8)
優先権データ
  • 特願2005-056753 (2005.3.2) JP
  • 2006WO-JP303935 (2006.3.2) WO
発明の名称 (英語) Homodyne laser interferometer probe and displacement measurement system using the same
発明の概要(英語) (US7847953)
A low-cost homodyne laser interferometer probe of simple structure is provided which allows predetermined performance to be easily obtained by a simple adjustment, and a displacement measurement system using the same is also disclosed.
The homodyne laser interferometer probe includes an optical fiber (1) for guiding light, a collimator lens (2) that receives the light from the optical fiber (1), a ¼ wavelength plate (3) that receives light from the collimator lens (2) and that converts the light from linearly polarized light into circularly polarized light, a beam splitter (4) for dividing light from the ¼ wavelength plate (3) into reference light and measurement light, a first focal lens (5) that receives the reference light from the beam splitter (4), a reflection mirror (6) for reflecting the reference light from the first focal lens (5), and a second focal lens (7) that receives the measurement light from the beam splitter (4).
Here, the reference light from the reflection mirror (6) is returned to measurement means along the same route.
The measurement light from the second focal lens (7) is applied to a measurement object (8), and the measurement light (signal light) from the measurement object (8) is returned to the measurement means along the same route.
特許請求の範囲(英語) [claim1]
1. A homodyne laser interferometer probe, comprising: (a) an optical fiber for guiding light;
(b) a collimator lens that receives the light from the optical fiber;
(c) a 1/4 wavelength plate that receives the light from the collimator lens and converts the light from linearly polarized light to circularly polarized light;
(d) a beam splitter for dividing the light from the 1/4 wavelength plate into reference light and measurement light;
(e) a first focal lens that receives the reference light from the beam splitter;
(f) a reflection mirror for reflecting the reference light from the first focal lens;
(g) an adjustment mechanism that is placed between the first focal lens and the beam splitter and that adjusts a distance between the first focal lens and the beam splitter while keeping constant a distance between the first focal lens that receives the reference light from the beam splitter and the reflection mirror that receives the reference light from the first focal lens and reflects the reference light;
(h) a second focal lens that receives the measurement light from the beam splitter; and
(i) a probe body that integrally incorporates therein the collimator lens, the 1/4 wavelength plate, the beam splitter, the first focal lens, the reflection mirror, the second focal lens, and the adjustment mechanism, wherein
the reference light from the reflection mirror is returned to measurement means along the same route, and wherein the measurement light from the second focal lens is applied to a measurement object and the measurement light from the measurement object is returned to the measurement means along the same route.
[claim2]
2. A homodyne laser interferometer probe, comprising: (a) an optical fiber for guiding light;
(b) a collimator lens that receives the light from the optical fiber;
(c) a beam splitter that receives the light from the collimator lens and that divides the light into reference light and measurement light;
(d) a first focal lens that receives the reference light from the beam splitter;
(e) a reflection mirror for reflecting the reference light from the first focal lens;
(f) an adjustment mechanism that is placed between the first focal lens and the beam splitter and that adjusts a distance between the first focal lens and the beam splitter while keeping constant a distance between the first focal lens that receives the reference light from the beam splitter and the reflection mirror that receives the reference light from the first focal lens and reflects the reference light;
(g) a second focal lens that receives the measurement light from the beam splitter;
(h) a probe body that integrally incorporates therein the collimator lens, the beam splitter, the first focal lens, the reflection mirror, the second focal lens, and the adjustment mechanism; and
(i) a photodetector that applies the measurement light from the second focal lens to a measurement object, that returns the measurement light reflected by the measurement object to the beam splitter, and that measures the measurement light from the beam splitter via a third focal lens, as well as measures the reference light from the reflection mirror along the same route.
[claim3]
3. The homodyne laser interferometer probe according to claim 2, wherein the photodetector is a photodiode.
[claim4]
4. The homodyne laser interferometer probe according to claim 2, wherein the photodetector is a photodiode connected to the focus part of the third focal lens, via an optical fiber.
[claim5]
5. The homodyne laser interferometer probe according to claim 1 or 2, wherein the adjustment mechanism is a shear piezo element.
[claim6]
6. The homodyne laser interferometer probe according to claim 1 or 2, wherein the adjustment mechanism consists of a shear piezo element and wedges.
[claim7]
7. A displacement measurement system that, using the homodyne laser interferometer probe according to claim 1, introduces the reference light and the measurement light that have been returned to the optical fiber, into an element for detecting the intensity of light that mutually interferes through the intermediary of a beam splitter, and that performs homodyne interferometer measurement using the optical path difference between the measurement light and the reference light.
[claim8]
8. A displacement measurement system using the homodyne laser interferometer probe according to claim 2, which performs a homodyne laser interferometer measurement by the optical path difference between the reference light and the measurement light, based on the reference light and the measurement light obtained by the photodetector.
  • 発明者/出願人(英語)
  • KAWAKATSU HIDEKI
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY
国際特許分類(IPC)
参考情報 (研究プロジェクト等) CREST Nano Factory and Process Monitoring for Advanced Information Processing and Communication AREA
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