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Substrate with micrometallic masses aligned on the surface

Foreign code F110005510
File No. N021-10WO
Posted date Sep 7, 2011
Country United States of America
Application number 22639807
Gazette No. 20090087582
Gazette No. 8389055
Date of filing Apr 4, 2007
Gazette Date Apr 2, 2009
Gazette Date Mar 5, 2013
International application number JP2007057565
International publication number WO2007122998
Date of international filing Apr 4, 2007
Date of international publication Nov 1, 2007
Priority data
  • P2006-115562 (Apr 19, 2006) JP
  • 2007WO-JP57565 (Apr 4, 2007) WO
Title Substrate with micrometallic masses aligned on the surface
Abstract (US8389055)
A process for preparing a metal nanostructure having metal masses with zero valence aligned on a substrate surface wherein the size and shape of the metal masses are controlled is described.
The process can include preparing a micro phase separation membrane of an amphiphilic block copolymer on a substrate and then exposing the membrane to a solution containing metal ions; drying the membrane to form a micro phase separation membrane with the metal ions localized in hydrophilic segments of the membrane; and irradiating vacuum ultraviolet light on the membrane to reduce the metal ions and to remove organic materials.
Scope of claims [claim1]
1. A method for preparing a substrate with micrometallic masses aligned on its surface, wherein the substrate contains numerous zero valence fine metal masses aligned on the surface at intervals of 10 nm to 50 nm wherein the fine metal masses are pillar-shaped or dot-shaped or a combination thereof and have diameters of 3 nm to 15 nm wherein the pillar-shaped masses are oriented in a direction substantially perpendicular to the surface, wherein the method comprises the steps of (a) preparing a micro phase separation membrane of an amphiphilic block copolymer on a substrate, wherein the membrane has a thickness of about 50 nm to 1 mu m, and then exposing the membrane to a solution containing metal ions, (b) drying the membrane to form a micro phase separation membrane with the metal ions localized in its hydrophilic segment, and (c) irradiating vacuum ultraviolet light on the micro phase separation membrane under vacuum to reduce the metal ions and, as a result of the irradiation, organic materials including those in the micro phase separation membrane are completely removed by the ozone generated with the vacuum ultraviolet light irradiation leaving the fine metal masses on the surface.
[claim2]
2. The method of claim 1 wherein the metal is a copper group metal or a platinum group transition metal.
[claim3]
3. The method of claim 1 or 2 wherein the amphiphilic block copolymer is represented by the general formula (1) below:
CH3(OCH2CH2)mOCOC(CH3)2(CH2C(CH3)COOR))n -- X General formula (1)
wherein m and n, which may be identical or different from each other, are each independently an integer from 5 to 500, R is a substituent represented by the general formula (2) or (3) shown below, X represents a hydrogen atom or halogen atom;
-- CH2(CH2)aCH2O -- B -- N.dbd.N -- B -- R1 General formula (2)
wherein a is an integer from 0 to 20, R1 is a hydrogen atom or an alkyl group containing 1 to 22 carbon atoms and B represents a p-phenylene group;
-- CH2(CH2)bCH2O -- B -- CH.dbd.CH -- B -- R2 General formula (3)
wherein b is an integer from 0 to 20, R2 is a hydrogen atom or an alkyl group containing 1 to 22 carbon atoms and B represents a p-phenylene group.
  • Inventor, and Inventor/Applicant
  • WATANABE SHIGERU
  • LI JINGZE
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY
IPC(International Patent Classification)
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