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Scanning probe microscope apparatus

外国特許コード F110005511
整理番号 N021-11WO
掲載日 2011年9月7日
出願国 アメリカ合衆国
出願番号 37568307
公報番号 20090261249
公報番号 7904966
出願日 平成19年7月19日(2007.7.19)
公報発行日 平成21年10月22日(2009.10.22)
公報発行日 平成23年3月8日(2011.3.8)
国際出願番号 JP2007064237
国際公開番号 WO2008015916
国際出願日 平成19年7月19日(2007.7.19)
国際公開日 平成20年2月7日(2008.2.7)
優先権データ
  • 特願2006-207297 (2006.7.31) JP
  • 2007WO-JP64237 (2007.7.19) WO
発明の名称 (英語) Scanning probe microscope apparatus
発明の概要(英語) (US7904966)
There is provided a scanning probe microscope apparatus which has a high sensitivity for the interaction between the cantilever and the sample and comprises a cantilever that can oscillate stably in dynamic mode even when a mechanical Q value is low.
A driving signal having a frequency close to the resonant frequency of the cantilever (4) is supplied from the signal generator (9) to the oscillation exciting means (10) to separately (forcibly) oscillate the cantilever (4).
And the frequency of the driving signal or the resonant frequency of the cantilever is controlled (by adjusting the distance between the cantilever (4) and the sample (1)), such that the phase difference between the oscillation of the cantilever (4) detected by the oscillation detecting means (5) and the driving signal becomes zero, i.e. the frequency of the driving signal and the resonant frequency of the cantilever (4) match.
特許請求の範囲(英語) [claim1]
1. A scanning probe microscope apparatus for imaging a sample using an interaction between the sample and a mechanical oscillator, the scanning probe microscope apparatus comprising: a first controller;
an XYZ scanner for the sample and an XY scanning and imaging system, each being connected to the first controller;
a signal generator;
an oscillation exciting means connected to the signal generator;
a mechanical oscillator forcibly oscillated by an output signal from the oscillation exciting means;
an oscillation detecting means for detecting an oscillation of the mechanical oscillator,
a phase difference detecting means connected to the oscillation detecting means;
a second controller for receiving a phase difference signal from the phase difference detecting means and transmitting a frequency control signal to the first controller and the signal generator;
a device for mixing the phase difference signal and the frequency control signal at an arbitrary ratio and transmitting the mixed signal to the first controller; and
a device for adjusting the frequency control signal to an arbitrary intensity and transmitting the adjusted signal to the signal generator;
wherein the signal generator is configured to generate a driving signal having a frequency close to the resonant frequency of the mechanical oscillator and to transmit the driving signal to the oscillation exciting means to oscillate the mechanical oscillator forcibly, and phase difference detected by the phase difference detecting means is kept constant.
[claim2]
2. A scanning probe microscope apparatus for imaging a sample using an interaction between the sample and a mechanical oscillator, the scanning probe microscope apparatus comprising: a first controller (8);
an XYZ scanner (3) for the sample (1) and an XY scanning and imaging system (11), each being connected to the first controller (8);
a signal generator (9);
an oscillation exciting means (10) connected to the signal generator (9);
a mechanical oscillator (4) forcibly oscillated by an output signal from the oscillation exciting means(10);
an oscillation detecting means (5) for detecting an oscillation of the mechanical oscillator (4),
a phase difference detecting means (6) connected to the oscillation detecting means (5);
a second controller (7) for receiving a phase difference signal from the phase difference detecting means (6) and transmitting a frequency control signal to the first controller (8) and the signal generator (9);
first connecting means (31A) for receiving the phase difference signal from the phase difference detecting means (6);
second connecting means (31B) for receiving the frequency control signal from the second controller (7);
first switching means (31) for switching between the first connecting means (31A) and the second connecting means (31B);
second switching means (32) for switching the frequency control signal from the second controller (7) on and off; and
a coarse positioning mechanism for changing the distance between the mechanical oscillator (4) and the sample (1);
wherein the first controller (8) is connected to the output side of the first switching means (31) and the signal generator (9) is connected to the output side of the second switching means (32), such that the first switching means (31) switches between the output signal from the phase difference detecting means (6) and the output signal from the second controller (7) , the second switch (32) switches the output signal from the second controller (7) on and off, frequency-tracking separately excited system is used during a process where the distance between the mechanical oscillator (4) and the sample (1) is changed by the coarse positioning mechanism to the predetermined distance and then switched to phase feedback system.
[claim3]
3. The scanning probe microscope apparatus according to claim 1 or 2, wherein a resonant frequency of the mechanical oscillator is measured and an interaction force between the sample and the mechanical oscillator is imaged based on the resonant frequency.
[claim4]
4. The scanning probe microscope apparatus according to claim 1 or 2, wherein a resonant frequency of the mechanical oscillator is measured and a surface shape of the sample is imaged based on the resonant frequency.
[claim5]
5. The scanning probe microscope apparatus according to claim 1 or 2, wherein a resonant frequency of the mechanical oscillator is measured and a relationship between the resonant frequency and a distance between the mechanical oscillator and the sample is obtained based on the resonant frequency.
[claim6]
6. The scanning probe microscope apparatus according to claim 1 or 2, wherein the mechanical oscillator is a cantilever.
  • 発明者/出願人(英語)
  • KOBAYASHI DAI
  • NISHIDA SHUHEI
  • KAWAKATSU HIDEKI
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY
国際特許分類(IPC)
参考情報 (研究プロジェクト等) CREST Nano Factory and Process Monitoring for Advanced Information Processing and Communication AREA
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