Micro plasma jet generator

外国特許コード	F110005550
整理番号	N081-12WO
掲載日	2011年9月7日
出願国	アメリカ合衆国
出願番号	59096904
公報番号	20080063576
公報番号	8663572
出願日	平成16年7月22日(2004.7.22)
公報発行日	平成20年3月13日(2008.3.13)
公報発行日	平成26年3月4日(2014.3.4)
国際出願番号	JP2004010388
国際公開番号	WO2005091687
国際出願日	平成16年7月22日(2004.7.22)
国際公開日	平成17年9月29日(2005.9.29)
優先権データ	特願2004-076940 (2004.3.17) JP 2004WO-JP10388 (2004.7.22) WO
発明の名称 （英語）	Micro plasma jet generator
発明の概要（英語）	(US8663572) The present invention provides a microplasma jet generator capable of stably generating a microplasma jet in a microspace at atmospheric pressure with low electric power. The microplasma jet generator is driven with a VHF power supply to generate an inductively coupled microplasma jet and includes a substrate, a micro-antenna disposed on the substrate, and a discharge tube located close to the micro-antenna. The micro-antenna has a flat meandering shape with plural turns.
特許請求の範囲（英語）	[claim1] 1. A microplasma jet generator, driven with a VHF electric current, for generating an inductively coupled microplasma jet, the microplasma jet generator comprising: a substrate, a micro-antenna disposed on the substrate, the micro-antenna having a flat meandering shape extending continuously from a first end to a second end thereof, and being configured to include: at least two U-shaped portions, each of which is provided with a first curved portion which turns substantially 180 deg. and opens in a first direction, and two substantially straight and parallel sides extending respectively from opposite ends of the first curved portion, wherein each adjacent pair of the least two U-shaped portions is joined together by a second curved portion which turns substantially 180 deg. and opens in a second direction which is opposite to the first direction of the first curved portion of each of the U-shaped portions, and a discharge tube located close to the micro-antenna. [claim2] 2. The microplasma jet generator according to claim 1, wherein the micro-antenna is located close to a microplasma jet-generating end portion of the substrate, and the discharge tube is formed as a linear-shaped trough cut into a surface of the substrate opposite to a surface of the substrate where the micro-antenna is disposed. [claim3] 3. The microplasma jet generator according to claim 1, wherein the micro-antenna includes a plating layer which is made of copper, gold, or platinum or which includes sublayers made of these conductive metals. [claim4] 4. The microplasma jet generator according to claim 3, wherein the thickness of the plating layer is at least two times greater than the depth (delta ) below the surface of the conductive metal at which the VHF electric current flows, the depth being represented by the following equation: delta =(2/(omega mu sigma ))1/2 wherein sigma represents the conductivity of the metal, mu represents the magnetic permeability thereof, and omega represents the angular frequency of the high-frequency current. [claim5] 5. The microplasma jet generator according to claim 1, wherein the substrate is made of one selected from the group consisting of alumina, sapphire, aluminum nitride, silicon nitride, boron nitride, and silicon carbide. [claim6] 6. The microplasma jet generator according to claim 5, wherein the substrate is made of alumina, the substrate has first and second flat surfaces parallel to each other, the micro-antenna is disposed on the first flat surface, and the discharge tube is formed as a trough in the second flat surface, and a plate is bonded to the second flat surface of the substrate, thereby sealing the discharge tube. [claim7] 7. The microplasma jet generator according to claim 1, wherein the VHF electric current is provided by a high voltage-generating unit. [claim8] 8. A method for generating a microplasma jet, comprising introducing plasma gas into the microplasma jet generator according to claim 1 at a flow rate of 0.05 to 5slm and applying a VHF wave to the micro-antenna. [claim9] 9. A chemical microanalysis method comprising using the microplasma jet generator according to claim 1. [claim10] 10. The chemical microanalysis method according to claim 9, further comprising using micro-capillary electrophoresis. [claim11] 11. A method for processing or surface treatment, comprising using the microplasma jet generator according to claim 1. [claim12] 12. The method according to claim 11, wherein the processing or the surface treatment is the cutting of a predetermined portion of a workpiece, etching, film deposition, cleaning, or hydrophilization. [claim13] 13. The method according to claim 11, further comprising using a unit, located close to a microplasma jet source included in the microplasma jet generator, for introducing reactive gas. [claim14] 14. The method according to claim 13, wherein the reactive gas is one selected from the group consisting of oxygen, nitrogen, air, carbon fluoride, and sulfur hexafluoride. [claim15] 15. The microplasma jet generator according to claim 1, wherein a length of the micro-antenna being 2 to 10 mm, and a thickness of the micro-antenna being 0.5 to 2 mm. [claim16] 16. The microplasma jet generator according to claim 1, wherein the micro-antenna includes four of the U-shaped portions. [claim17] 17. A microplasma jet generator, driven with a VHF power supply, for generating an inductively coupled microplasma jet, the microplasma jet generator comprising: a substrate with an upper surface which is substantially flat, a micro-antenna disposed on a surface of the substrate, the micro-antenna having a flat meandering shape extending continuously from a first end to a second end thereof, and being configured to include: at least two U-shaped portions, each of which is provided with a first curved portion which turns substantially 180 deg. and opens in a first direction, and two substantially straight and parallel sides extending respectively from opposite ends of the first curved portion, wherein each adjacent pair of the least two U-shaped portions is joined together by a second curved portion which turns substantially 180 deg. and opens in a second direction which is opposite to the first direction of the first curved portion of each of the U-shaped portions, and a discharge tube located close to the micro-antenna. [claim18] 18. The microplasma jet generator according to claim 17, wherein the micro-antenna includes at least three of the U-shaped portions.
発明者/出願人（英語）	ICHIKI TAKANORI JAPAN SCIENCE AND TECHNOLOGY AGENCY
国際特許分類(IPC)	B01J  19/08      電気または波動エネルギーあるいは粒子線放射を直接適用したプロセス；そのための装置 B08B   7/00      このサブクラスの単一のグループあるいは他の単一のサブクラスに分類されない方法による清掃 C23C  16/513     プラズマジェットを用いるもの G01N  27/447     電気泳動を用いるもの G01N  37/00      このサブクラスの他のいずれのグループにも包含されない細部 H01L  21/304     機械的処理，例．研摩，ポリシング，切断 H01L  21/3065    プラズマエッチング；反応性イオンエッチング H05H   1/24      プラズマの発生 H05H   1/46      電磁界を用いるもの，例．高周波またはマイクロ波エネルギー H05K   3/08      導電性物質が放電によって取り除かれるもの，例．火花放電の侵食
参考情報 （研究プロジェクト等）	CREST Nano Virtual Lab (Virtual Laboratory in Nanotechnology Areas) Creation of Innovative Technology by Integration of Nanotechnology with Information. Biological, and Environmental Technologies AREA