Top > Search of International Patents > SCANNING PROBE MICROSCOPE

SCANNING PROBE MICROSCOPE

Foreign code F110006046
File No. 2008-050WO,S2009-0271
Posted date Dec 27, 2011
Country WIPO
International application number 2010JP000164
International publication number WO 2010/087114
Date of international filing Jan 14, 2010
Date of international publication Aug 5, 2010
Priority data
  • P2009-021675 (Feb 2, 2009) JP
Title SCANNING PROBE MICROSCOPE
Abstract An atomic force microscope (AFM) (1) is a kind of SPM and detects a resonance frequency shift as the amount of interaction between a probe and a specimen. The AFM (1) performs distance modulation control, while performing feedback control of the distance between the probe and the specimen in order to maintain a constant amount of interaction. The distance modulation control varies the distance between the probe and the specimen at a distance modulation frequency higher than a response speed to the feedback control. The AFM (1) obtains the amount of interaction which is detected during the variation of the distance between the probe and the specimen by the distance modulation control, while performing relative scanning of the probe and the specimen and detects a distribution of the amount of interaction in a three-dimensional space having an area within the scanning range and a thickness within the range of variation of the distance between the probe and the specimen. Thus, the scanning probe microscope (SPM) can appropriately measure the distribution of the interaction between the probe and the specimen in a three-dimensional space, while performing stable control of the probe position.
  • Applicant
  • ※All designated countries except for US in the data before July 2012
  • National University Corporation Kanazawa University
  • Inventor
  • FUKUMA, Takeshi
  • UEDA, Yasuhito
IPC(International Patent Classification)

PAGE TOP

close
close
close
close
close
close