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Optical microscope UPDATE

外国特許コード F120006117
整理番号 S2008-0660
掲載日 2012年1月6日
出願国 アメリカ合衆国
出願番号 99565909
公報番号 20110079712
公報番号 8217346
出願日 平成21年6月3日(2009.6.3)
公報発行日 平成23年4月7日(2011.4.7)
公報発行日 平成24年7月10日(2012.7.10)
国際出願番号 JP2009060190
国際公開番号 WO2009148094
国際出願日 平成21年6月3日(2009.6.3)
国際公開日 平成21年12月10日(2009.12.10)
優先権データ
  • 特願2008-146335 (2008.6.3) JP
  • 2009WO-JP60190 (2009.6.3) WO
発明の名称 (英語) Optical microscope UPDATE
発明の概要(英語) (US8217346)
An optical microscope for optically measuring a sample (30) includes: a fluorescent thin membrane (13) which at least partly contains fluorescent substance and on which the sample (30) is placed; an electron source (11) for generating an electron beam; an electron lens (12) for focusing the electron beam generated by the electron source (11) in such a manner as to excite a minute light source having a wavelength shorter than a visible light wavelength from the fluorescent thin membrane (13) so as to irradiate the fluorescent thin membrane (13) with the electron beam, and further, scanning the focused electron beam; and an optical detector (22) for detecting a measurement light beam which is generated in the minute light source and acts on the sample (30).
特許請求の範囲(英語) [claim1]
1. An optical microscope that optically measures an object to be measured, the optical microscope comprising: a fluorescent member that comprises a fluorescent substance in at least a portion thereof and on which the object to be measured is placed;
an electron beam generating component that generates an electron beam;
an electron beam controlling component that focuses the electron beam generated by the electron beam generating component, such that the fluorescent member is irradiated by the electron beam and a minute light source having a wavelength shorter than a visible light wavelength is excited from the fluorescent member, and that makes the focused electron beam scan; and
an optical detecting component that detects a measurement light beam that is generated at the minute light source and acts on the object to be measured.
[claim2]
2. The optical microscope of claim 1 further comprising a vacuum container having a vacuum unit that houses the electron beam generating component and the electron beam controlling component therein, wherein: the fluorescent member is disposed at a portion of a through hole formed on a partition wall of the vacuum container, so as to serve as a part of the partition wall; and
the minute light source is excited by the electron beam, which passes through the through hole.
[claim3]
3. The optical microscope of claim 1, comprising a plurality of the through holes.
[claim4]
4. An optical microscope for optically measuring an object to be measured, the optical microscope comprising: a fluorescent member that comprises a fluorescent substance in at least a portion thereof and on which the object to be measured is placed;
an electron beam generating component that generates an electron beam;
an electron beam controlling component that controls the electron beam generated by the electron beam generating component, such that the fluorescent member is irradiated by the electron beam and a minute light source having a size smaller than a visible light wavelength is excited in the fluorescent member; and
an optical detecting component that detects a measurement light beam that is generated at the minute light source and acts on the object to be measured.
  • 発明者/出願人(英語)
  • KAWATA YOSHIMASA
  • MIYAKAWA ATSUO
  • SHIZUOKA UNIVERSITY
国際特許分類(IPC)
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