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Optical microscope

Foreign code F120006117
File No. S2008-0660
Posted date Jan 6, 2012
Country United States of America
Application number 99565909
Gazette No. 20110079712
Gazette No. 8217346
Date of filing Jun 3, 2009
Gazette Date Apr 7, 2011
Gazette Date Jul 10, 2012
International application number JP2009060190
International publication number WO2009148094
Date of international filing Jun 3, 2009
Date of international publication Dec 10, 2009
Priority data
  • P2008-146335 (Jun 3, 2008) JP
  • 2009WO-JP60190 (Jun 3, 2009) WO
Title Optical microscope
Abstract (US8217346)
An optical microscope for optically measuring a sample (30) includes: a fluorescent thin membrane (13) which at least partly contains fluorescent substance and on which the sample (30) is placed; an electron source (11) for generating an electron beam; an electron lens (12) for focusing the electron beam generated by the electron source (11) in such a manner as to excite a minute light source having a wavelength shorter than a visible light wavelength from the fluorescent thin membrane (13) so as to irradiate the fluorescent thin membrane (13) with the electron beam, and further, scanning the focused electron beam; and an optical detector (22) for detecting a measurement light beam which is generated in the minute light source and acts on the sample (30).
Scope of claims [claim1]
1. An optical microscope that optically measures an object to be measured, the optical microscope comprising: a fluorescent member that comprises a fluorescent substance in at least a portion thereof and on which the object to be measured is placed;
an electron beam generating component that generates an electron beam;
an electron beam controlling component that focuses the electron beam generated by the electron beam generating component, such that the fluorescent member is irradiated by the electron beam and a minute light source having a wavelength shorter than a visible light wavelength is excited from the fluorescent member, and that makes the focused electron beam scan; and
an optical detecting component that detects a measurement light beam that is generated at the minute light source and acts on the object to be measured.
[claim2]
2. The optical microscope of claim 1 further comprising a vacuum container having a vacuum unit that houses the electron beam generating component and the electron beam controlling component therein, wherein: the fluorescent member is disposed at a portion of a through hole formed on a partition wall of the vacuum container, so as to serve as a part of the partition wall; and
the minute light source is excited by the electron beam, which passes through the through hole.
[claim3]
3. The optical microscope of claim 1, comprising a plurality of the through holes.
[claim4]
4. An optical microscope for optically measuring an object to be measured, the optical microscope comprising: a fluorescent member that comprises a fluorescent substance in at least a portion thereof and on which the object to be measured is placed;
an electron beam generating component that generates an electron beam;
an electron beam controlling component that controls the electron beam generated by the electron beam generating component, such that the fluorescent member is irradiated by the electron beam and a minute light source having a size smaller than a visible light wavelength is excited in the fluorescent member; and
an optical detecting component that detects a measurement light beam that is generated at the minute light source and acts on the object to be measured.
  • Inventor, and Inventor/Applicant
  • KAWATA YOSHIMASA
  • MIYAKAWA ATSUO
  • SHIZUOKA UNIVERSITY
IPC(International Patent Classification)
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