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POTENTIAL OBTAINING DEVICE, MAGNETIC FIELD MICROSCOPE, INSPECTION DEVICE AND METHOD OF OBTAINING POTENTIAL

Foreign code F120006346
File No. KP09-052PCT
Posted date Mar 26, 2012
Country WIPO
International application number 2011JP054635
International publication number WO 2011/108543
Date of international filing Mar 1, 2011
Date of international publication Sep 9, 2011
Priority data
  • P2010-044218 (Mar 1, 2010) JP
Title POTENTIAL OBTAINING DEVICE, MAGNETIC FIELD MICROSCOPE, INSPECTION DEVICE AND METHOD OF OBTAINING POTENTIAL
Abstract Disclosed is a magnetic field obtaining device, wherein a measuring unit (21), which is sufficiently long compared to the width of the region to be measured, is disposed on the measuring surface which satisfies z = .alpha., and wherein in the X' direction orthogonal to the longitudinal direction of the measuring unit (21) scanning is repeated while changing multiple times the angle .theta. which is defined between a given reference direction on the measuring surface and the longitudinal direction of the measuring unit (21). Subsequently, a measured value f (x', .theta.) which is obtained by repeating the scanning, is Fourier transformed, where the coordinate parameter in the X' direction is defined as x', and g(kx', .theta.) is obtained (where kx' is the number of waves in the X' direction). Then, by substituting g (kx', .theta.) into a given two-dimensional potential obtaining formula, [GREEK PHI SYMBOL] (x, y, .alpha.) representing a two-dimensional potential on the measuring surface is obtained. Thus, a two-dimensional potential can be measured with higher resolution using the measuring unit (21) which is sufficiently large compared to the width of the region to be measured.
  • Applicant
  • ※All designated countries except for US in the data before July 2012
  • National University Corporation Kobe University
  • Inventor
  • KIMURA, Kenjiro
IPC(International Patent Classification)
Specified countries AE(UTILITY MODEL),AG,AL(UTILITY MODEL),AM(PROVISIONAL PATENT)(UTILITY MODEL),AO(UTILITY MODEL),AT(UTILITY MODEL),AU,AZ(UTILITY MODEL),BA,BB,BG(UTILITY MODEL),BH(UTILITY MODEL),BR(UTILITY MODEL),BW,BY(UTILITY MODEL),BZ(UTILITY MODEL),CA,CH,CL(UTILITY MODEL),CN(UTILITY MODEL),CO(UTILITY MODEL),CR(UTILITY MODEL),CU(INVENTOR'S CERTIFICATE),CZ(UTILITY MODEL),DE(UTILITY MODEL),DK(UTILITY MODEL),DM,DO(UTILITY MODEL),DZ,EC(UTILITY MODEL),EE(UTILITY MODEL),EG(UTILITY MODEL),ES(UTILITY MODEL),FI(UTILITY MODEL),GB,GD,GE(UTILITY MODEL),GH(UTILITY CERTIFICATE),GM,GT(UTILITY MODEL),HN(UTILITY MODEL),HR(CONSENSUAL PATENT),HU(UTILITY MODEL),ID,IL,IN,IS,JP(UTILITY MODEL),KE(UTILITY MODEL),KG(UTILITY MODEL),KM,KN,KP(INVENTOR'S CERTIFICATE)(UTILITY MODEL),KR(UTILITY MODEL),KZ(PROVISIONAL PATENT)(UTILITY MODEL),LA,LC,LK,LR,LS(UTILITY MODEL),LT,LU,LY,MA,MD(UTILITY MODEL),ME,MG,MK,MN,MW,MX(UTILITY MODEL),MY(UTILITY-INNOVATION),MZ(UTILITY MODEL),NA,NG,NI(UTILITY MODEL),NO,NZ,OM(UTILITY MODEL),PE(UTILITY MODEL),PG,PH(UTILITY MODEL),PL(UTILITY MODEL),PT(UTILITY MODEL),RO,RS(PETTY PATENT),RU(UTILITY MODEL),SC,SD,SE,SG,SK(UTILITY MODEL),SL(UTILITY MODEL),SM,ST,SV(UTILITY MODEL),SY,TH(PETTY PATENT),TJ(UTILITY MODEL),TM(PROVISIONAL PATENT),TN,TR(UTILITY MODEL),TT(UTILITY CERTIFICATE),TZ,UA(UTILITY MODEL),UG(UTILITY CERTIFICATE),US,UZ(UTILITY MODEL),VC(UTILITY CERTIFICATE),VN(PATENT FOR UTILITY SOLUTION),ZA,ZM,ZW,EP(AL,AT,BE,BG,CH,CY,CZ,DE,DK,EE,ES,FI,FR,GB,GR,HR,HU,IE,IS,IT,LT,LU,LV,MC,MK,MT,NL,NO,PL,PT,RO,RS,SE,SI,SK,SM,TR),OA(BF(UTILITY MODEL),BJ(UTILITY MODEL),CF(UTILITY MODEL),CG(UTILITY MODEL),CI(UTILITY MODEL),CM(UTILITY MODEL),GA(UTILITY MODEL),GN(UTILITY MODEL),GQ(UTILITY MODEL),GW(UTILITY MODEL),ML(UTILITY MODEL),MR(UTILITY MODEL),NE(UTILITY MODEL),SN(UTILITY MODEL),TD(UTILITY MODEL),TG(UTILITY MODEL)),AP(BW(UTILITY MODEL),GH(UTILITY MODEL),GM(UTILITY MODEL),KE(UTILITY MODEL),LR(UTILITY MODEL),LS(UTILITY MODEL),MW(UTILITY MODEL),MZ(UTILITY MODEL),NA(UTILITY MODEL),SD(UTILITY MODEL),SL(UTILITY MODEL),SZ(UTILITY MODEL),TZ(UTILITY MODEL),UG(UTILITY MODEL),ZM(UTILITY MODEL),ZW(UTILITY MODEL)),EA(AM,AZ,BY,KG,KZ,MD,RU,TJ,TM)
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