Top > Search of International Patents > PHOTOINDUCED CARRIER LIFETIME MEASURING METHOD, LIGHT INCIDENCE EFFICIENCY MEASURING METHOD, PHOTOINDUCED CARRIER LIFETIME MEASURING DEVICE, AND LIGHT INCIDENCE EFFICIENCY MEASURING DEVICE

PHOTOINDUCED CARRIER LIFETIME MEASURING METHOD, LIGHT INCIDENCE EFFICIENCY MEASURING METHOD, PHOTOINDUCED CARRIER LIFETIME MEASURING DEVICE, AND LIGHT INCIDENCE EFFICIENCY MEASURING DEVICE

Foreign code F120006530
File No. S2010-0661-C0
Posted date May 8, 2012
Country WIPO
International application number 2010JP065227
International publication number WO 2011/099191
Date of international filing Sep 6, 2010
Date of international publication Aug 18, 2011
Priority data
  • P2010-030658 (Feb 15, 2010) JP
Title PHOTOINDUCED CARRIER LIFETIME MEASURING METHOD, LIGHT INCIDENCE EFFICIENCY MEASURING METHOD, PHOTOINDUCED CARRIER LIFETIME MEASURING DEVICE, AND LIGHT INCIDENCE EFFICIENCY MEASURING DEVICE
Abstract Disclosed is a photoinduced carrier lifetime measuring method enabling measurement of the effective lifetime of photoinduced carriers in a semiconductor substrate with high accuracy irrespective of the surface state of the sample. A semiconductor substrate is periodically irradiated with a pulse of induction light and with a microwave. The microwave transmitted through the semiconductor substrate or reflected from the semiconductor substrate is detected. On the basis of the irradiation time T1 of the pulse irradiation with the induction light, the nonirradiation time T2, and the integrated value of each microwave intensity measured by the detection, the effective lifetime of the photoinduced carriers produced in the semiconductor substrate when the semiconductor substrate is irradiated with the pulse of the induction light is determined.
  • Applicant
  • ※All designated countries except for US in the data before July 2012
  • National University Corporation Tokyo University of Agriculture and Technology
  • Inventor
  • SAMESHIMA Toshiyuki
IPC(International Patent Classification)
Specified countries AE(UTILITY MODEL),AG,AL(UTILITY MODEL),AM(PROVISIONAL PATENT)(UTILITY MODEL),AO(UTILITY MODEL),AT(UTILITY MODEL),AU,AZ(UTILITY MODEL),BA,BB,BG(UTILITY MODEL),BH(UTILITY MODEL),BR(UTILITY MODEL),BW,BY(UTILITY MODEL),BZ(UTILITY MODEL),CA,CH,CL(UTILITY MODEL),CN(UTILITY MODEL),CO(UTILITY MODEL),CR(UTILITY MODEL),CU(INVENTOR'S CERTIFICATE),CZ(UTILITY MODEL),DE(UTILITY MODEL),DK(UTILITY MODEL),DM,DO(UTILITY MODEL),DZ,EC(UTILITY MODEL),EE(UTILITY MODEL),EG(UTILITY MODEL),ES(UTILITY MODEL),FI(UTILITY MODEL),GB,GD,GE(UTILITY MODEL),GH(UTILITY CERTIFICATE),GM,GT(UTILITY MODEL),HN(UTILITY MODEL),HR(CONSENSUAL PATENT),HU(UTILITY MODEL),ID,IL,IN,IS,JP(UTILITY MODEL),KE(UTILITY MODEL),KG(UTILITY MODEL),KM,KN,KP(INVENTOR'S CERTIFICATE)(UTILITY MODEL),KR(UTILITY MODEL),KZ(PROVISIONAL PATENT)(UTILITY MODEL),LA,LC,LK,LR,LS(UTILITY MODEL),LT,LU,LY,MA,MD(UTILITY MODEL),ME,MG,MK,MN,MW,MX(UTILITY MODEL),MY(UTILITY-INNOVATION),MZ(UTILITY MODEL),NA,NG,NI(UTILITY MODEL),NO,NZ,OM(UTILITY MODEL),PE(UTILITY MODEL),PG,PH(UTILITY MODEL),PL(UTILITY MODEL),PT(UTILITY MODEL),RO,RS(PETTY PATENT),RU(UTILITY MODEL),SC,SD,SE,SG,SK(UTILITY MODEL),SL(UTILITY MODEL),SM,ST,SV(UTILITY MODEL),SY,TH(PETTY PATENT),TJ(UTILITY MODEL),TM(PROVISIONAL PATENT),TN,TR(UTILITY MODEL),TT(UTILITY CERTIFICATE),TZ,UA(UTILITY MODEL),UG(UTILITY CERTIFICATE),US,UZ(UTILITY MODEL),VC(UTILITY CERTIFICATE),VN(PATENT FOR UTILITY SOLUTION),ZA,ZM,ZW,EP(AL,AT,BE,BG,CH,CY,CZ,DE,DK,EE,ES,FI,FR,GB,GR,HR,HU,IE,IS,IT,LT,LU,LV,MC,MK,MT,NL,NO,PL,PT,RO,SE,SI,SK,SM,TR),OA(BF(UTILITY MODEL),BJ(UTILITY MODEL),CF(UTILITY MODEL),CG(UTILITY MODEL),CI(UTILITY MODEL),CM(UTILITY MODEL),GA(UTILITY MODEL),GN(UTILITY MODEL),GQ(UTILITY MODEL),GW(UTILITY MODEL),ML(UTILITY MODEL),MR(UTILITY MODEL),NE(UTILITY MODEL),SN(UTILITY MODEL),TD(UTILITY MODEL),TG(UTILITY MODEL)),AP(BW(UTILITY MODEL),GH(UTILITY MODEL),GM(UTILITY MODEL),KE(UTILITY MODEL),LR(UTILITY MODEL),LS(UTILITY MODEL),MW(UTILITY MODEL),MZ(UTILITY MODEL),NA(UTILITY MODEL),SD(UTILITY MODEL),SL(UTILITY MODEL),SZ(UTILITY MODEL),TZ(UTILITY MODEL),UG(UTILITY MODEL),ZM(UTILITY MODEL),ZW(UTILITY MODEL)),EA(AM,AZ,BY,KG,KZ,MD,RU,TJ,TM)
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