LEAKAGE INSPECTION DEVICE AND LEAKAGE INSPECTION METHOD
外国特許コード | F120006626 |
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整理番号 | S2010-0958 |
掲載日 | 2012年5月17日 |
出願国 | 世界知的所有権機関(WIPO) |
国際出願番号 | 2011JP065222 |
国際公開番号 | WO 2012/005199 |
国際出願日 | 平成23年7月1日(2011.7.1) |
国際公開日 | 平成24年1月12日(2012.1.12) |
優先権データ |
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発明の名称 (英語) | LEAKAGE INSPECTION DEVICE AND LEAKAGE INSPECTION METHOD |
発明の概要(英語) | Provided are a leakage inspection device and a leakage inspection method for inspecting the flow rate of leakage from a tested body disposed in a tested-body chamber (21). The leakage inspection device comprises a liquid supplying and pressurizing means (11) for supplying a probe liquid to the inside of the tested-body chamber (21) and pressurizing the probe liquid to a high pressure of 0.1 MPa or more, a vacuum exhausting means (22-b, 23-b), and a quadrupole mass spectrometer (34). The tested-body chamber (21) is evacuated, a probe liquid is supplied to the inside of the tested body and is pressurized to a pressure of 0.1 MPa or more, and the concentration of a probe medium leaking from the tested body and evaporating in a vacuum is measured by the quadrupole mass spectrometer (34), thereby measuring the flow rate of leakage from the tested body. It is possible to determine the flow rate of leakage using a liquid as a probe medium and simultaneously it is possible to perform a withstanding pressure test especially at high pressures ranging from 1 MPa up to 1 GPa under an atmospheric pressure of 0.1 MPa or more. |
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国際特許分類(IPC) |
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指定国 | AE(UTILITY MODEL),AG,AL(UTILITY MODEL),AM(PROVISIONAL PATENT)(UTILITY MODEL),AO(UTILITY MODEL),AT(UTILITY MODEL),AU,AZ(UTILITY MODEL),BA(CONSENSUAL PATENT),BB,BG(UTILITY MODEL),BH(UTILITY MODEL),BR(UTILITY MODEL),BW,BY(UTILITY MODEL),BZ(UTILITY MODEL),CA,CH,CL(UTILITY MODEL),CN(UTILITY MODEL),CO(UTILITY MODEL),CR(UTILITY MODEL),CU(INVENTOR'S CERTIFICATE),CZ(UTILITY MODEL),DE(UTILITY MODEL),DK(UTILITY MODEL),DM,DO(UTILITY MODEL),DZ,EC(UTILITY MODEL),EE(UTILITY MODEL),EG(UTILITY MODEL),ES(UTILITY MODEL),FI(UTILITY MODEL),GB,GD,GE(UTILITY MODEL),GH(UTILITY CERTIFICATE),GM,GT(UTILITY MODEL),HN(UTILITY MODEL),HR(CONSENSUAL PATENT),HU(UTILITY MODEL),ID,IL,IN,IS,JP(UTILITY MODEL),KE(UTILITY MODEL),KG(UTILITY MODEL),KM,KN,KP(INVENTOR'S CERTIFICATE)(UTILITY MODEL),KR(UTILITY MODEL),KZ(PROVISIONAL PATENT)(UTILITY MODEL),LA,LC,LK,LR,LS(UTILITY MODEL),LT,LU,LY,MA,MD(UTILITY MODEL),ME,MG,MK,MN,MW,MX(UTILITY MODEL),MY(UTILITY-INNOVATION),MZ(UTILITY MODEL),NA,NG,NI(UTILITY MODEL),NO,NZ,OM(UTILITY MODEL),PE(UTILITY MODEL),PG,PH(UTILITY MODEL),PL(UTILITY MODEL),PT(UTILITY MODEL),RO,RS(PETTY PATENT),RU(UTILITY MODEL),SC,SD,SE,SG,SK(UTILITY MODEL),SL(UTILITY MODEL),SM,ST,SV(UTILITY MODEL),SY,TH(PETTY PATENT),TJ(UTILITY MODEL),TM(PROVISIONAL PATENT),TN,TR(UTILITY MODEL),TT(UTILITY CERTIFICATE),TZ,UA(UTILITY MODEL),UG(UTILITY CERTIFICATE),US,UZ(UTILITY MODEL),VC(UTILITY CERTIFICATE),VN(PATENT FOR UTILITY SOLUTION),ZA,ZM,ZW,EP(AL,AT,BE,BG,CH,CY,CZ,DE,DK,EE,ES,FI,FR,GB,GR,HR,HU,IE,IS,IT,LT,LU,LV,MC,MK,MT,NL,NO,PL,PT,RO,RS,SE,SI,SK,SM,TR),OA(BF(UTILITY MODEL),BJ(UTILITY MODEL),CF(UTILITY MODEL),CG(UTILITY MODEL),CI(UTILITY MODEL),CM(UTILITY MODEL),GA(UTILITY MODEL),GN(UTILITY MODEL),GQ(UTILITY MODEL),GW(UTILITY MODEL),ML(UTILITY MODEL),MR(UTILITY MODEL),NE(UTILITY MODEL),SN(UTILITY MODEL),TD(UTILITY MODEL),TG(UTILITY MODEL)),AP(BW(UTILITY MODEL),GH(UTILITY MODEL),GM(UTILITY MODEL),KE(UTILITY MODEL),LR(UTILITY MODEL),LS(UTILITY MODEL),MW(UTILITY MODEL),MZ(UTILITY MODEL),NA(UTILITY MODEL),SD(UTILITY MODEL),SL(UTILITY MODEL),SZ(UTILITY MODEL),TZ(UTILITY MODEL),UG(UTILITY MODEL),ZM(UTILITY MODEL),ZW(UTILITY MODEL)),EA(AM,AZ,BY,KG,KZ,MD,RU,TJ,TM) |
日本語項目の表示
発明の名称 | 漏れ検査装置及び漏れ検査方法 |
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発明の概要 | 被試験体室21内に配置された被試験体の漏れ流量を検査する漏れ検査装置及び漏れ検査方法であって、被試験体室21の内部に探査液体を供し0.1MPa以上の高圧に加圧する液体供給加圧手段11と、真空排気手段22-b,23-bと、四重極質量分析計34と、を具備し、被試験体室21を真空とし、被試験体の内部に探査液体を供給して0.1MPa以上に加圧し、被試験体から漏れ出し真空中で気化した探査媒体の濃度を四重極質量分析計34により測定することにより、被試験体からの漏れ流量を測定する。探査媒体として液体を用いて漏れ流量が定量でき、かつ0.1MPaの大気圧以上で特に1MPa以上から1GPaに及ぶ高圧力の耐圧検査も同時に可能となる。 |
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