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LEAKAGE INSPECTION DEVICE AND LEAKAGE INSPECTION METHOD

Foreign code F120006626
File No. S2010-0958
Posted date May 17, 2012
Country WIPO
International application number 2011JP065222
International publication number WO 2012/005199
Date of international filing Jul 1, 2011
Date of international publication Jan 12, 2012
Priority data
  • P2010-153217 (Jul 5, 2010) JP
Title LEAKAGE INSPECTION DEVICE AND LEAKAGE INSPECTION METHOD
Abstract Provided are a leakage inspection device and a leakage inspection method for inspecting the flow rate of leakage from a tested body disposed in a tested-body chamber (21). The leakage inspection device comprises a liquid supplying and pressurizing means (11) for supplying a probe liquid to the inside of the tested-body chamber (21) and pressurizing the probe liquid to a high pressure of 0.1 MPa or more, a vacuum exhausting means (22-b, 23-b), and a quadrupole mass spectrometer (34). The tested-body chamber (21) is evacuated, a probe liquid is supplied to the inside of the tested body and is pressurized to a pressure of 0.1 MPa or more, and the concentration of a probe medium leaking from the tested body and evaporating in a vacuum is measured by the quadrupole mass spectrometer (34), thereby measuring the flow rate of leakage from the tested body. It is possible to determine the flow rate of leakage using a liquid as a probe medium and simultaneously it is possible to perform a withstanding pressure test especially at high pressures ranging from 1 MPa up to 1 GPa under an atmospheric pressure of 0.1 MPa or more.
  • Applicant
  • ※All designated countries except for US in the data before July 2012
  • Yamaguchi University
  • Marunaka Co., Ltd.
  • Inventor
  • YAMAMOTO, Setsuo
  • KURISU, Hiroki
  • TAKADA, Naoki
  • NAKAGAWA, Mitsugu
  • TSUGE, Katsushi
  • ISHIKAWA Yukihiro
IPC(International Patent Classification)
Specified countries AE(UTILITY MODEL),AG,AL(UTILITY MODEL),AM(PROVISIONAL PATENT)(UTILITY MODEL),AO(UTILITY MODEL),AT(UTILITY MODEL),AU,AZ(UTILITY MODEL),BA(CONSENSUAL PATENT),BB,BG(UTILITY MODEL),BH(UTILITY MODEL),BR(UTILITY MODEL),BW,BY(UTILITY MODEL),BZ(UTILITY MODEL),CA,CH,CL(UTILITY MODEL),CN(UTILITY MODEL),CO(UTILITY MODEL),CR(UTILITY MODEL),CU(INVENTOR'S CERTIFICATE),CZ(UTILITY MODEL),DE(UTILITY MODEL),DK(UTILITY MODEL),DM,DO(UTILITY MODEL),DZ,EC(UTILITY MODEL),EE(UTILITY MODEL),EG(UTILITY MODEL),ES(UTILITY MODEL),FI(UTILITY MODEL),GB,GD,GE(UTILITY MODEL),GH(UTILITY CERTIFICATE),GM,GT(UTILITY MODEL),HN(UTILITY MODEL),HR(CONSENSUAL PATENT),HU(UTILITY MODEL),ID,IL,IN,IS,JP(UTILITY MODEL),KE(UTILITY MODEL),KG(UTILITY MODEL),KM,KN,KP(INVENTOR'S CERTIFICATE)(UTILITY MODEL),KR(UTILITY MODEL),KZ(PROVISIONAL PATENT)(UTILITY MODEL),LA,LC,LK,LR,LS(UTILITY MODEL),LT,LU,LY,MA,MD(UTILITY MODEL),ME,MG,MK,MN,MW,MX(UTILITY MODEL),MY(UTILITY-INNOVATION),MZ(UTILITY MODEL),NA,NG,NI(UTILITY MODEL),NO,NZ,OM(UTILITY MODEL),PE(UTILITY MODEL),PG,PH(UTILITY MODEL),PL(UTILITY MODEL),PT(UTILITY MODEL),RO,RS(PETTY PATENT),RU(UTILITY MODEL),SC,SD,SE,SG,SK(UTILITY MODEL),SL(UTILITY MODEL),SM,ST,SV(UTILITY MODEL),SY,TH(PETTY PATENT),TJ(UTILITY MODEL),TM(PROVISIONAL PATENT),TN,TR(UTILITY MODEL),TT(UTILITY CERTIFICATE),TZ,UA(UTILITY MODEL),UG(UTILITY CERTIFICATE),US,UZ(UTILITY MODEL),VC(UTILITY CERTIFICATE),VN(PATENT FOR UTILITY SOLUTION),ZA,ZM,ZW,EP(AL,AT,BE,BG,CH,CY,CZ,DE,DK,EE,ES,FI,FR,GB,GR,HR,HU,IE,IS,IT,LT,LU,LV,MC,MK,MT,NL,NO,PL,PT,RO,RS,SE,SI,SK,SM,TR),OA(BF(UTILITY MODEL),BJ(UTILITY MODEL),CF(UTILITY MODEL),CG(UTILITY MODEL),CI(UTILITY MODEL),CM(UTILITY MODEL),GA(UTILITY MODEL),GN(UTILITY MODEL),GQ(UTILITY MODEL),GW(UTILITY MODEL),ML(UTILITY MODEL),MR(UTILITY MODEL),NE(UTILITY MODEL),SN(UTILITY MODEL),TD(UTILITY MODEL),TG(UTILITY MODEL)),AP(BW(UTILITY MODEL),GH(UTILITY MODEL),GM(UTILITY MODEL),KE(UTILITY MODEL),LR(UTILITY MODEL),LS(UTILITY MODEL),MW(UTILITY MODEL),MZ(UTILITY MODEL),NA(UTILITY MODEL),SD(UTILITY MODEL),SL(UTILITY MODEL),SZ(UTILITY MODEL),TZ(UTILITY MODEL),UG(UTILITY MODEL),ZM(UTILITY MODEL),ZW(UTILITY MODEL)),EA(AM,AZ,BY,KG,KZ,MD,RU,TJ,TM)

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