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PLASMA GENERATION DEVICE, PLASMA CONTROL METHOD, AND SUBSTRATE MANUFACTURING METHOD achieved

Foreign code F120006712
File No. V312P005KR2
Posted date May 28, 2012
Country Republic of Korea
Application number 20117019923
Gazette No. 20110106948
Gazette No. 101199995
Date of filing Dec 12, 2003
Gazette Date Sep 29, 2011
Gazette Date Nov 12, 2012
Priority data
  • P2002-363988 (Dec 16, 2002) JP
  • P2002-363989 (Dec 16, 2002) JP
  • P2003-014718 (Jan 23, 2003) JP
Title PLASMA GENERATION DEVICE, PLASMA CONTROL METHOD, AND SUBSTRATE MANUFACTURING METHOD achieved
  • Applicant
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY,
  • EBE AKINORI,
  • MIYAKE SHOJI
  • Inventor
  • MIYAKE SHOJI,
  • EBE AKINORI,
  • SHOJI TATSUO,
  • SETSUHARA YUICHI
IPC(International Patent Classification)
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