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PHYSICAL QUANTITY SENSOR AND PROCESS FOR PRODUCTION THEREOF

Foreign code F120006724
File No. E092P06WO
Posted date May 28, 2012
Country WIPO
International application number 2011JP064308
International publication number WO 2011/162305
Date of international filing Jun 22, 2011
Date of international publication Dec 29, 2011
Priority data
  • P2010-141923 (Jun 22, 2010) JP
Title PHYSICAL QUANTITY SENSOR AND PROCESS FOR PRODUCTION THEREOF
Abstract Disclosed are: a physical quantity sensor which can detect multiple physical quantities simultaneously; and a process for producing the physical quantity sensor. Specifically disclosed is a physical quantity sensor (100), which has flexibility or bendability over the entire body thereof, and which comprises a substrate (1), an electrode layer (2) formed on the substrate (1), a piezoelectric element (3a) and a piezoelectric element (3b) both arranged in parallel to each other on the electrode layer (2), electrode layers (4a, 4b) respectively formed on the piezoelectric elements (3a, 3b), and protective layers (5a, 5b, 5c, 5d, 5e) respectively protecting the electrode layer (2), the piezoelectric elements (3a, 3b) and the electrode layers (4a, 4b). The substrate (1), the electrode layer (2), the piezoelectric element (3a) (a first piezoelectric element), the electrode layer (4a) (a third electrode layer) and the protective layers (5a, 5b, 5c, 5d, 5e) constitute a first physical quantity detection unit (6), and the substrate (1), the electrode layer (2), the piezoelectric element (3b) (a second piezoelectric element) and the electrode layer (4b) (a fourth electrode layer) constitute a second physical quantity detection unit (7).
  • Applicant
  • ※All designated countries except for US in the data before July 2012
  • Japan Science and Technology Agency
  • HYOGO PREFECTURE
  • Inventor
  • JIANG Yonggang
  • HIGUCHI Kohei
  • HAMADA Hiroyuki
  • MAENAKA Kazusuke
IPC(International Patent Classification)
Reference ( R and D project ) ERATO MAENAKA Human-Sensing Fusion AREA
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