OBJECTIVE LENS SYSTEM AND ELECTRON MICROSCOPE
|Posted date||Oct 26, 2012|
|International application number||2011JP060855|
|International publication number||WO 2011/158579|
|Date of international filing||May 11, 2011|
|Date of international publication||Dec 22, 2011|
|Title||OBJECTIVE LENS SYSTEM AND ELECTRON MICROSCOPE|
Provided is an objective lens system and electron microscope capable of specimen observation using an electron beam accelerated to an ultra-high voltage state, even without using a direct current ultra-high voltage source, a direct current accelerator tube or multiple electromagnetic lenses for ultra-high voltage. a microwave accelerator (3) containing microwave cavities is provided on the injection side of a pair of objective lenses consisting of electromagnetic lenses (pre-objective electromagnetic lens (2a), post-objective electromagnetic lens (2b)), and a microwave decelerator (4) containing microwave cavities is provided on the output side of a pair of objective lenses. In addition, microwaves having mutually different phases are supplied to the cavities of the microwave accelerator (3) and the microwave decelerator (4) through a waveguide (6) from a high frequency power source (5).
|IPC(International Patent Classification)||
Contact Information for " OBJECTIVE LENS SYSTEM AND ELECTRON MICROSCOPE "
- National Institutes of Natural Sciences Okazaki Integrated Administration Center Industry-Academia-Government Collaboration Section, International Research Cooperation Division, General Administration Department,
- URL: https://www.nins.jp/
- Address: 38 Nishigo Naka, Myodaiji-cho, Okazaki City, Aichi, Japan , 444-8585
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