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OBJECTIVE LENS SYSTEM AND ELECTRON MICROSCOPE

Foreign code F120006960
File No. S2010-0805
Posted date Oct 26, 2012
Country WIPO
International application number 2011JP060855
International publication number WO 2011/158579
Date of international filing May 11, 2011
Date of international publication Dec 22, 2011
Priority data
  • P2010-134729 (Jun 14, 2010) JP
Title OBJECTIVE LENS SYSTEM AND ELECTRON MICROSCOPE
Abstract

Provided is an objective lens system and electron microscope capable of specimen observation using an electron beam accelerated to an ultra-high voltage state, even without using a direct current ultra-high voltage source, a direct current accelerator tube or multiple electromagnetic lenses for ultra-high voltage. a microwave accelerator (3) containing microwave cavities is provided on the injection side of a pair of objective lenses consisting of electromagnetic lenses (pre-objective electromagnetic lens (2a), post-objective electromagnetic lens (2b)), and a microwave decelerator (4) containing microwave cavities is provided on the output side of a pair of objective lenses. In addition, microwaves having mutually different phases are supplied to the cavities of the microwave accelerator (3) and the microwave decelerator (4) through a waveguide (6) from a high frequency power source (5).

  • Applicant
  • ※All designated countries except for US in the data before July 2012
  • INTER-UNIVERSITY RESEARCH INSTITUTE CORPORATION NATIONAL INSTITUTES OF NATURAL SCIENCES,
  • NAGAYAMA IP HOLDINGS, LLC,
  • NAGAYAMA KUNIAKI,
  • NAGATANI YUKINORI,
  • ARAI YOSHIHIRO
  • Inventor
  • NAGAYAMA KUNIAKI,
  • NAGATANI YUKINORI,
  • ARAI YOSHIHIRO
IPC(International Patent Classification)

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