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METHOD FOR TEMPERATURE COMPENSATION IN SENSOR, COMPUTATION PROGRAM FOR METHOD FOR TEMPERATURE COMPENSATION, COMPUTATION PROCESSING DEVICE, AND SENSOR

Foreign code F120007085
File No. E092P23WO
Posted date Dec 19, 2012
Country WIPO
International application number 2012JP064054
International publication number WO 2012/165536
Date of international filing May 31, 2012
Date of international publication Dec 6, 2012
Priority data
  • P2011-122184 (May 31, 2011) JP
Title METHOD FOR TEMPERATURE COMPENSATION IN SENSOR, COMPUTATION PROGRAM FOR METHOD FOR TEMPERATURE COMPENSATION, COMPUTATION PROCESSING DEVICE, AND SENSOR
Abstract

[Problem] To provide a method for temperature compensation in a sensor, a computation program for the method for temperature compensation, a computation processing device for computationally processing the computation program, and a sensor, in which deformation in a diaphragm caused by a pressure change (thermal expansion of a gas sealed in a cavity) due to the temperature of the gas in the cavity is cancelled out, and deformation of the diaphragm is minimized within the target temperature range, thereby allowing an optimum temperature compensation to be performed. [Solution] This method for temperature compensation in a capacitance-type sensor comprises executing calculation steps which include including a calculation step (S17) of acquiring the amount of change ?C' in capacitance, whereby there is obtained a parameter ?C' through which it is possible to determine the degree of compensation for the deformation in the diaphragm section caused by a pressure change (thermal expansion of the gas sealed in a hermetically sealed space) due to the temperature of the gas in the hermetically sealed space.

  • Applicant
  • ※All designated countries except for US in the data before July 2012
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY,
  • HAO XIUCHUN,
  • JIANG YONGGANG,
  • FUJITA TAKAYUKI,
  • HIGUCHI KOHEI,
  • MAENAKA KAZUSUKE,
  • TAKAO HIDEKUNI
  • Inventor
  • HAO XIUCHUN,
  • JIANG YONGGANG,
  • FUJITA TAKAYUKI,
  • HIGUCHI KOHEI,
  • MAENAKA KAZUSUKE,
  • TAKAO HIDEKUNI
IPC(International Patent Classification)
Reference ( R and D project ) ERATO MAENAKA Human-Sensing Fusion AREA
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