GAS FOR PLASMA GENERATION, PLASMA GENERATION METHOD, AND ATMOSPHERIC PRESSURE PLASMA GENERATED THEREBY
外国特許コード | F120007090 |
---|---|
整理番号 | S2011-0740-N0 |
掲載日 | 2012年12月27日 |
出願国 | 世界知的所有権機関(WIPO) |
国際出願番号 | 2012JP064687 |
国際公開番号 | WO 2012/169588 |
国際出願日 | 平成24年6月7日(2012.6.7) |
国際公開日 | 平成24年12月13日(2012.12.13) |
優先権データ |
|
発明の名称 (英語) |
GAS FOR PLASMA GENERATION, PLASMA GENERATION METHOD, AND ATMOSPHERIC PRESSURE PLASMA GENERATED THEREBY
|
発明の概要(英語) |
[Problem] The purpose of the present invention is to provide a gas for plasma generation that can easily generate a plasma from a gas that does not easily form a plasma such as oxygen, carbon monoxide, or nitric oxide, as well as to provide a plasma generation method and an atmospheric pressure plasma generated thereby. A further purpose is to enable application of plasma processing in many industrial fields by using the resulting atmospheric pressure plasma. [Solution] Provided is a gas for plasma generation used for generating an atmospheric pressure plasma. The gas for plasma generation is a mixed gas comprising a base gas (carrier gas) which not only has processing capability due to formation of a plasma, but also carries the gas for plasma generation as a whole to a plasma source, and a processing effectiveness enhancing gas that enhances the processing effectiveness of the atmospheric pressure plasma. Further, a generation support gas for supporting plasma forming is further mixed into the above mixed gas. The invention also provides a plasma generation method that uses the gas for plasma generation to generate a plasma, and an atmospheric pressure plasma that is generated from the gas for plasma generation. |
|
|
|
|
国際特許分類(IPC) |
|
日本語項目の表示
発明の名称 |
プラズマ生成用ガスおよびプラズマ生成方法並びにこれにより生成された大気圧プラズマ
|
---|
『 GAS FOR PLASMA GENERATION, PLASMA GENERATION METHOD, AND ATMOSPHERIC PRESSURE PLASMA GENERATED THEREBY 』に関するお問合せ
- 東京工業大学 研究・産学連携本部
- URL: https://www.ori.titech.ac.jp/
-
E-mail:
- Address: 〒152-8550 東京都目黒区大岡山2-12-1
- TEL: 03-5734-3817
- FAX: 03-5734-2482