GAS FOR PLASMA GENERATION, PLASMA GENERATION METHOD, AND ATMOSPHERIC PRESSURE PLASMA GENERATED THEREBY

• 特願2011-128588 (2011.6.8) JP

[Problem] The purpose of the present invention is to provide a gas for plasma generation that can easily generate a plasma from a gas that does not easily form a plasma such as oxygen, carbon monoxide, or nitric oxide, as well as to provide a plasma generation method and an atmospheric pressure plasma generated thereby. A further purpose is to enable application of plasma processing in many industrial fields by using the resulting atmospheric pressure plasma. [Solution] Provided is a gas for plasma generation used for generating an atmospheric pressure plasma. The gas for plasma generation is a mixed gas comprising a base gas (carrier gas) which not only has processing capability due to formation of a plasma, but also carries the gas for plasma generation as a whole to a plasma source, and a processing effectiveness enhancing gas that enhances the processing effectiveness of the atmospheric pressure plasma. Further, a generation support gas for supporting plasma forming is further mixed into the above mixed gas. The invention also provides a plasma generation method that uses the gas for plasma generation to generate a plasma, and an atmospheric pressure plasma that is generated from the gas for plasma generation.

• TOKYO INSTITUTE OF TECHNOLOGY,
• OKINO AKITOSHI,
• MIYAHARA HIDEKAZU,
• SASAKI RYOTA

• OKINO AKITOSHI,
• MIYAHARA HIDEKAZU,
• SASAKI RYOTA

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