Potential obtaining device, magnetic field microscope, inspection device and method of obtaining potential
Foreign code  F130007284 

File No.  KP09052PCTEP 
Posted date  Apr 9, 2013 
Country  EPO 
Application number  11750653 
Gazette No.  2544016 
Date of filing  Mar 1, 2011 
Gazette Date  Jan 9, 2013 
International application number  JP2011054635 
International publication number  WO2011108543 
Date of international filing  Mar 1, 2011 
Date of international publication  Sep 9, 2011 
Priority data 

Title  Potential obtaining device, magnetic field microscope, inspection device and method of obtaining potential 
Abstract 
In a magnetic field obtaining apparatus, a measuring part (21) that is sufficiently longer than the width of an area to be measured is disposed on a measurement plane that satisfies z = ±, and scanning in an X' direction perpendicular to the longitudinal direction of the measuring part (21) is repeated while changing an angle ¸ formed by a predetermined reference direction on the measurement plane and the longitudinal direction of the measuring part (21) to a plurality of angles. Assuming that x' is a coordinate parameter in the X' direction, measured values f(x', ¸) obtained by repetitions of the scanning are Fourier transformed so as to obtain g(k x' , ¸) (where k x' is a wavenumber in the X' direction). Then, g(k x' , ¸) is substituted into a predetermined twodimensional potential obtaining equation so as to obtain Æ (x, y, ±) that indicates a twodimensional potential on the measurement plane. Accordingly, it is possible to perform highresolution twodimensional potential measurement as a result of using the measuring part (21) that is sufficiently larger than the width of an area to be measured. 
Scope of claims 
[claim1] 1. A potential obtaining apparatus (1, 1a to 1c) for, assuming that phi (x, y, z) is a potential function that indicates a threedimensional potential formed at least in the periphery of an object (9, 9a, 9c) due to the presence of said object (where x, y, and z are coordinate parameters of a rectangular coordinate system defined in mutually perpendicular X, Y, and Z directions that are set for said object), obtaining phi (x, y, alpha ) on a measurement plane (91, 92) that is set outside said object and satisfies z = alpha (where alpha is an arbitrary value), said apparatus comprising: a measurement unit in which a plurality of linear areas that extend in a longitudinal direction parallel to said measurement plane that is parallel to an XY plane are set so as to be arranged in an X' direction perpendicular to said longitudinal direction on said measurement plane, and that is for obtaining a measured value derived from said threedimensional potential in each of said plurality of linear areas in a state in which an angle theta formed by a reference direction that is parallel to the Y direction on said measurement plane and said longitudinal direction is changed to a plurality of angles; and a computing part (61, 63) for, assuming that x' is a coordinate parameter in the X' direction (where an origin is on a Z axis), obtaining phi (x, y, alpha ) from Equation 24 using the measured values f(x', theta ) obtained by said measurement unit, (Equation image 24 not included in text) (where k x' is a wavenumber in the X' direction). [claim2] 2. The potential obtaining apparatus according to claim 1, wherein said measurement unit includes: a measuring part (21, 2 1 a to 2 1 c) that extends in said longitudinal direction and is for obtaining a measured value derived from said threedimensional potential; an angle changing part (32, 32a) for changing said angle theta formed by said reference direction and said longitudinal direction of said measuring part; a moving mechanism (33, 33a) for moving said measuring part in the X' direction relative to said object on said measurement plane such that scanning is performed in which said measuring part passes through over a measurement area of said object; and a control part (4, 62, 62a) for controlling said angle changing part and said moving mechanism such that said scanning is repeated while said angle theta is changed to a plurality of angles, wherein said measurement unit obtains measured values f(x', theta ) by repetitions of said scanning. [claim3] 3. The potential obtaining apparatus according to claim 2, wherein said threedimensional potential is a potential derived by differentiating a magnetic potential once or more times with respect to the Z direction, and said measuring part is a thinfilm element that spreads in said longitudinal direction and the Z direction and generates a signal derived from said threedimensional potential. [claim4] 4. The potential obtaining apparatus according to claim 3, wherein a film thickness of said thinfilm element gradually decreases toward said object. [claim5] 5. The potential obtaining apparatus according to any one of claims 2 to 4, further comprising: another moving mechanism (34, 34a) for moving said measuring part in the Z direction relative to said object, wherein said threedimensional potential satisfies the Laplace equation, said control part obtains phi (x, y, 0) on said measurement plane that satisfies z = 0 as a twodimensional first image (71), and after said measuring part is moved by a small distance in the Z direction relative to said object, obtains a twodimensional intermediate image (72) using a technique similar to that used to obtain said first image, said computing part obtains a difference image between said first image and said intermediate image, divides said difference image by said small distance so as to obtain a differential image as a second image, Fourier transforms phi (x, y, 0) serving as said first image and phi z(x, y, 0) serving as said second image so as to obtain phi (k x, k y) and phi z(k x, k y) (where k x and k y are respectively wavenumbers in the X direction and the Y direction), and then obtains phi (x, y, z) from Equation 25 using phi (k x, k y) and phi z(k x, k y). (Equation image 25 not included in text) [claim6] 6. The potential obtaining apparatus according to any one of claims 1 to 4, wherein said threedimensional potential satisfies the Laplace equation, phi (x, y, alpha ) obtained by one measurement is H z **(q)(x, y, 0) that is obtained by differentiating an arbitrary potential H(x, y, z) on said measurement plane that satisfies z = 0 q times with respect to z, and phi (x, y, alpha ) obtained by another measurement is H z **(p)(x, y, 0) that is obtained by differentiating said arbitrary potential H(x, y, z) p times with respect to z (where p and q are integers greater than or equal to 0, q being odd and p being even), said computing part Fourier transforms H z **(q)(x, y, 0) and H z **(p)(x, y, 0) so as to obtain h z **(q)(k x, k y) and h z( **p)(k x, k y) (where k x and k y are respectively wavenumbers in the X direction and the Y direction) and further obtains H z **(q)(x, y, z) from Equation 26 or H z **(p)(x, y, z) from Equation 27, using h z **(q)(k x, k y) and h z **(p)(k x, k y). (Equation image 26 not included in text) (Equation image 27 not included in text) [claim7] 7. The potential obtaining apparatus according to any one of claims 1 to 6, wherein said threedimensional potential is a potential derived from a magnetic potential, an electric potential, temperature, or gravity. [claim8] 8. A magnetic field microscope (1) comprising: the potential obtaining apparatus according to claim 5 for obtaining a function derived by differentiating a magnetic potential once or more times with respect to the Z direction, as phi (x, y, z), wherein said computing part substitutes a value that indicates either a position of a surface of said object or a position close to said surface into z of phi (x, y, z). [claim9] 9. An inspection apparatus (1a) using nuclear magnetic resonance, comprising: the potential obtaining apparatus according to claim 5 for obtaining a function derived by differentiating a magnetic potential once or more times with respect to the Z direction, as phi (x, y, z); and means (11, 12) for sequentially inducing nuclear magnetic resonance inside said object on a plurality of planes located at a plurality of positions in the Z direction, wherein said control part obtains phi (x, y, z) when nuclear magnetic resonance is induced on each plane included in said plurality of planes, and said computing part substitutes a value that indicates a position of said each plane into z of phi (x, y, z) obtained for said each plane. [claim10] 10. A potential obtaining method for, assuming that phi (x, y, z) is a potential function that indicates a threedimensional potential formed at least in the periphery of an object (9, 9a, 9c) due to the presence of said object (where x, y, and z are coordinate parameters of a rectangular coordinate system defined in mutually perpendicular X, Y, and Z directions that are set for said object), obtaining phi (x, y, alpha ) on a measurement plane (91, 92) that is set outside said object and satisfies z = alpha (where alpha is an arbitrary value), said method comprising the steps of: a) (S11 to S13) setting a plurality of linear areas that extend in a longitudinal direction parallel to said measurement plane that is parallel to an XY plane such that said plurality of linear areas are arranged in an X' direction perpendicular to said longitudinal direction on said measurement plane, and obtaining a measured value derived from said threedimensional potential in each of said plurality of linear areas in a state in which an angle theta formed by a reference direction that is parallel to the Y direction on said measurement plane and said longitudinal direction is changed to a plurality of angles; and b) (S 14) assuming that x' is a coordinate parameter in the X' direction (where an origin is on a Z axis), obtaining phi (x, y, alpha ) from Equation 28 using the measured values f(x', theta ) obtained in said step a), (Equation image 28 not included in text) (where k x' is a wavenumber in the X' direction). [claim11] 11. The potential obtaining method according to claim 10, wherein said step a) includes the steps of: a1) (S11) moving a measuring part (21, 21a to 21 c) in the X' direction relative to said object on said measurement plane such that scanning is performed in which said measuring part passes through over a measurement area of said object, said measuring part extending in said longitudinal direction and being for obtaining a measured value derived from said threedimensional potential; and a2) (S12 to S13) obtaining measured values f(x', theta ) by repetitions of said step a1) while changing said angle theta formed by said reference direction and said longitudinal direction of said measuring part to a plurality of angles. [claim12] 12. The potential obtaining method according to claim 11, wherein said threedimensional potential is a potential derived by differentiating a magnetic potential once or more times with respect to the Z direction, and said measuring part is a thinfilm element that spreads in said longitudinal direction and the Z direction and generates a signal derived from said threedimensional potential. [claim13] 13. The potential obtaining method according to claim 11 or 12, wherein said threedimensional potential satisfies the Laplace equation and said measurement plane satisfies z = 0, and phi (x, y, 0) is obtained as a twodimensional first image (71) in said steps a) and b), said potential obtaining method comprising the steps of: c) (S22) after said measuring part is moved by a small distance in the Z direction relative to said object, obtaining a twodimensional intermediate image (72) using a method similar to that used to obtain said first image; d) (S23) obtaining a difference image between said first image and said intermediate image and dividing said difference image by said small distance so as to obtain a differential image as a second image, e) (S24) Fourier transforming phi (x, y, 0) serving as said first image and phi z(x, y, 0) serving as said second image so as to obtain phi (k x, k y) and phi z(k h, k y) (where k x and k y are respectively wavenumbers in the X direction and the Y direction); and f) (S25) obtaining phi (x, y, z) from Equation 29 using phi (k x, k y) and phi z(k x, k y). (Equation image 29 not included in text) [claim14] 14. The potential obtaining method according to any one of claims 10 to 13, wherein said threedimensional potential is a potential derived from a magnetic potential, an electric potential, temperature, or gravity. 




IPC(International Patent Classification) 

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