THIN-FILM FORMATION METHOD, THIN-FILM FORMATION DEVICE, OBJECT TO BE TREATED HAVING COATING FILM FORMED THEREON, DIE AND TOOL
|Posted date||Apr 11, 2013|
|International application number||2012JP005957|
|International publication number||WO 2013/042355|
|Date of international filing||Sep 20, 2012|
|Date of international publication||Mar 28, 2013|
|Title||THIN-FILM FORMATION METHOD, THIN-FILM FORMATION DEVICE, OBJECT TO BE TREATED HAVING COATING FILM FORMED THEREON, DIE AND TOOL|
[Problem] To provide a means for forming a thin-film in a desired part of an object to be treated. [Solution] The thin-film formation means according to the present invention is part of a thin-film formation method which supplies electricity to a raw-material gas in a reduced pressure container, converting the raw-material gas to plasma, and irradiates the plasma, thus forming a thin-film on the surface of an object to be treated. Therein, the effect of a magnetic field generated by a magnetic field generating means is used to form the thin-film in a desired part. The effect of the magnetic field focuses the flux of the plasma in a desired part of the surface of the object to be treated, thus enabling the thin-film to be formed in the desired part.
|IPC(International Patent Classification)||
Contact Information for " THIN-FILM FORMATION METHOD, THIN-FILM FORMATION DEVICE, OBJECT TO BE TREATED HAVING COATING FILM FORMED THEREON, DIE AND TOOL "
- Shibaura Institute of Technology Research Planning Section
- URL: https://www.shibaura-it.ac.jp/en/about/topics/cllaboration.html
- Address: 3-7-5, Toyosu, Koto-ku, Tokyo, Japan , 135-8548
- Phone: 81-3-5859-7180
- Fax: 81-3-5859-7181