PHYSICAL/CHEMICAL SENSOR, PHYSICAL/CHEMICAL PHENOMENON SENSING DEVICE, AND METHOD FOR MANUFACTURING SAME
|Posted date||Apr 17, 2013|
|International application number||2012JP075182|
|International publication number||WO 2013/047799|
|Date of international filing||Sep 28, 2012|
|Date of international publication||Apr 4, 2013|
|Title||PHYSICAL/CHEMICAL SENSOR, PHYSICAL/CHEMICAL PHENOMENON SENSING DEVICE, AND METHOD FOR MANUFACTURING SAME|
The present invention relates to a physical/chemical sensor, a physical/chemical phenomenon sensing device, and a method for manufacturing the same with which a minute change in surface stress may be detected, and size reduction and array configuration may be enabled. In the sensor of the present invention, a hollow portion (3) is formed at a surface of a light receiving surface (1a) of a photo diode (1). The sensor comprises a membrane portion (2) which is oppositely disposed, and the hollow portion is isolated airtightly and watertightly. The membrane portion has light permeability and flexibility, and forms a Fabry-Perot resonator with the surface of the light receiving surface. The sensing device of the present invention comprises a reference sensor, which comprises no hollow portion, in addition to the sensor. The manufacturing method of the present invention comprises forming a sacrificial layer at the light receiving surface of the photo diode, laminating an area other than a surface of the sacrificial surface with a protective film, forming the membrane portion at a membrane portion configuration area other than an etching target area, etching the sacrificial layer, and coating the etching target area.
|IPC(International Patent Classification)|
Contact Information for " PHYSICAL/CHEMICAL SENSOR, PHYSICAL/CHEMICAL PHENOMENON SENSING DEVICE, AND METHOD FOR MANUFACTURING SAME "
- Toyohashi Campus Innovation Co. Section of Technology Transfer
- URL: https://www.tut.ac.jp/cooperation/
- Address: 1-1, hibarigaoka,tenpakucho,Toyohashi-city,Aichi,Japan , 441-8580
- Fax: 81-532-44-6980