Top > Search of International Patents > PHYSICAL/CHEMICAL SENSOR, PHYSICAL/CHEMICAL PHENOMENON SENSING DEVICE, AND METHOD FOR MANUFACTURING SAME

PHYSICAL/CHEMICAL SENSOR, PHYSICAL/CHEMICAL PHENOMENON SENSING DEVICE, AND METHOD FOR MANUFACTURING SAME

Foreign code F130007299
File No. S2011-1168-N0
Posted date Apr 17, 2013
Country WIPO
International application number 2012JP075182
International publication number WO 2013/047799
Date of international filing Sep 28, 2012
Date of international publication Apr 4, 2013
Priority data
  • P2011-218582 (Sep 30, 2011) JP
  • P2012-114589 (May 18, 2012) JP
  • P2012-172374 (Aug 2, 2012) JP
Title PHYSICAL/CHEMICAL SENSOR, PHYSICAL/CHEMICAL PHENOMENON SENSING DEVICE, AND METHOD FOR MANUFACTURING SAME
Abstract

The present invention relates to a physical/chemical sensor, a physical/chemical phenomenon sensing device, and a method for manufacturing the same with which a minute change in surface stress may be detected, and size reduction and array configuration may be enabled. In the sensor of the present invention, a hollow portion (3) is formed at a surface of a light receiving surface (1a) of a photo diode (1). The sensor comprises a membrane portion (2) which is oppositely disposed, and the hollow portion is isolated airtightly and watertightly. The membrane portion has light permeability and flexibility, and forms a Fabry-Perot resonator with the surface of the light receiving surface. The sensing device of the present invention comprises a reference sensor, which comprises no hollow portion, in addition to the sensor. The manufacturing method of the present invention comprises forming a sacrificial layer at the light receiving surface of the photo diode, laminating an area other than a surface of the sacrificial surface with a protective film, forming the membrane portion at a membrane portion configuration area other than an etching target area, etching the sacrificial layer, and coating the etching target area.

  • Applicant
  • ※All designated countries except for US in the data before July 2012
  • NATIONAL UNIVERSITY CORPORATION TOYOHASHI UNIVERSITY OF TECHNOLOGY
  • Inventor
  • TAKAHASHI KAZUHIRO,
  • SAWADA KAZUAKI,
  • OYAMA HIROKI
IPC(International Patent Classification)
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