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PROCESS FOR PRODUCING GRAPHENE MATERIAL, GRAPHENE MATERIAL, AND GRAPHENE WIRING STRUCTURE

Foreign code F130007424
File No. S2013-0222-N0
Posted date Jun 20, 2013
Country WIPO
International application number 2012JP065131
International publication number WO 2012/173145
Date of international filing Jun 13, 2012
Date of international publication Dec 20, 2012
Priority data
  • P2011-131743 (Jun 14, 2011) JP
  • P2011-149418 (Jul 5, 2011) JP
  • P2011-163193 (Jul 26, 2011) JP
Title PROCESS FOR PRODUCING GRAPHENE MATERIAL, GRAPHENE MATERIAL, AND GRAPHENE WIRING STRUCTURE
Abstract

A substrate main body (12) is prepared first, and a crystalline nickel layer (14) is formed over the whole of a surface of the substrate main body (12). Successively, the crystalline layer (14) is patterned zigzag by lithography to form a catalyst metal layer (16). Furthermore, titanium is deposited as a mask material (17) on the sidewalls of the catalyst metal layer (16). Subsequently, carbon atoms are supplied to the catalyst metal layer (16) by feeding a gas mixture of acetylene and argon. As a result, the nickel surface undergoes a rearrangement into the (111) plane, and the supplied carbon atoms form a hexagonal lattice to grow graphene. Since the graphene is formed on the catalyst metal layer (16), the graphene comes to have the same shape as the catalyst metal layer (16), i.e., a zigzag shape. Next, square electrodes (18, 20) are attached to both ends of the zigzag graphene. Thereafter, the catalyst metal layer (16) is dissolved away by means of an acidic solution, and the graphene is taken out as a graphene material (10).

  • Applicant
  • ※All designated countries except for US in the data before July 2012
  • MEIJO UNIVERSITY,
  • NARITSUKA, SHIGEYA,
  • MARUYAMA, TAKAHIRO
  • Inventor
  • NARITSUKA, SHIGEYA,
  • MARUYAMA, TAKAHIRO
IPC(International Patent Classification)

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