PROCESS FOR PRODUCING GRAPHENE MATERIAL, GRAPHENE MATERIAL, AND GRAPHENE WIRING STRUCTURE
|Posted date||Jun 20, 2013|
|International application number||2012JP065131|
|International publication number||WO 2012/173145|
|Date of international filing||Jun 13, 2012|
|Date of international publication||Dec 20, 2012|
|Title||PROCESS FOR PRODUCING GRAPHENE MATERIAL, GRAPHENE MATERIAL, AND GRAPHENE WIRING STRUCTURE|
A substrate main body (12) is prepared first, and a crystalline nickel layer (14) is formed over the whole of a surface of the substrate main body (12). Successively, the crystalline layer (14) is patterned zigzag by lithography to form a catalyst metal layer (16). Furthermore, titanium is deposited as a mask material (17) on the sidewalls of the catalyst metal layer (16). Subsequently, carbon atoms are supplied to the catalyst metal layer (16) by feeding a gas mixture of acetylene and argon. As a result, the nickel surface undergoes a rearrangement into the (111) plane, and the supplied carbon atoms form a hexagonal lattice to grow graphene. Since the graphene is formed on the catalyst metal layer (16), the graphene comes to have the same shape as the catalyst metal layer (16), i.e., a zigzag shape. Next, square electrodes (18, 20) are attached to both ends of the zigzag graphene. Thereafter, the catalyst metal layer (16) is dissolved away by means of an acidic solution, and the graphene is taken out as a graphene material (10).
|IPC(International Patent Classification)||
Contact Information for " PROCESS FOR PRODUCING GRAPHENE MATERIAL, GRAPHENE MATERIAL, AND GRAPHENE WIRING STRUCTURE "
- Meijo University Academic Research Support Center
- URL: https://www.meijo-u.ac.jp/research/
- Address: 1-501, Shiogamaguchi, Tempaku-ku, Nagoya, Japan , 468-8502
- Phone: +81-52-838-2036
- Fax: +81-52-833-7200