PHOTOINDUCED CARRIER LIFETIME MEASUREMENT DEVICE AND PHOTOINDUCED CARRIER LIFETIME MEASUREMENT METHOD
The invention contains: light sources (20, 22) that shine light of different wavelengths, said light being for generating a photoinduced carrier in a semiconductor substrate (S)
a microwave generation section (10) that generates a microwave that irradiates the semiconductor substrate (S)
and a detection section (30) that detects the intensity of the microwave that has passed through the semiconductor substrate. Said invention also contains a computation section (50) that: computes an effective carrier lifetime for each light wavelength on the basis of the microwave intensity detected when at least the aforementioned two types of light are shone
and on the basis of the computed effective carrier lifetime for each wavelength, computes a bulk carrier lifetime for the semiconductor substrate (S) and computes a surface recombination velocity.