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ELLIPSOMETRY SYSTEM

Foreign code F130007584
File No. S2011-0870-C0
Posted date Jul 24, 2013
Country WIPO
International application number 2012JP067488
International publication number WO 2013/008784
Date of international filing Jul 9, 2012
Date of international publication Jan 17, 2013
Priority data
  • P2011-154241 (Jul 12, 2011) JP
Title ELLIPSOMETRY SYSTEM
Abstract

[Problem] To provide an optical coherence tomograph capable of achieving size reduction and cost reduction attendant thereon, and a detection unit used therein. [Solution] An optical coherence tomograph (100) is provided with a detection unit (200) which comprises an optical polarization element (250) and detects polarization components at each wavelength while an interference polarized beam generated by causing an object reflected light beam and a reference reflected light beam to interfere with each other is separated at each wavelength. The optical polarization element (250) is configured such that the separated interference polarized beams at respective wavelengths are incident in parallel thereon in order of wavelength, and configured to have a birefringence characteristic having a first refractive index and a second refractive index that are provided with a predetermined condition, and while transmitting the incident interference polarized beam at each wavelength therethrough, to separate the interference polarized beam into polarization components and emit the separated polarization components at each wavelength in the same direction along different optical axes.

  • Applicant
  • ※All designated countries except for US in the data before July 2012
  • UTSUNOMIYA UNIVERSITY,
  • YATAGAI, TOYOHIKO,
  • ABRAHAM J. CENSE
  • Inventor
  • YATAGAI, TOYOHIKO,
  • ABRAHAM J. CENSE
IPC(International Patent Classification)

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