Top > Search of International Patents > METHOD FOR ETCHING METAL OR METAL OXIDE BY OZONE WATER, METHOD FOR SMOOTHING SURFACE OF METAL OR METAL OXIDE BY OZONE WATER, AND PATTERNING METHOD USING OZONE WATER

METHOD FOR ETCHING METAL OR METAL OXIDE BY OZONE WATER, METHOD FOR SMOOTHING SURFACE OF METAL OR METAL OXIDE BY OZONE WATER, AND PATTERNING METHOD USING OZONE WATER

Foreign code F130007702
File No. K02821WO
Posted date Nov 20, 2013
Country WIPO
International application number 2013JP062261
International publication number WO 2013/161959
Date of international filing Apr 25, 2013
Date of international publication Oct 31, 2013
Priority data
  • P2012-103285 (Apr 27, 2012) JP
Title METHOD FOR ETCHING METAL OR METAL OXIDE BY OZONE WATER, METHOD FOR SMOOTHING SURFACE OF METAL OR METAL OXIDE BY OZONE WATER, AND PATTERNING METHOD USING OZONE WATER
Abstract

Provided are a method for etching a metal or metal oxide without using a reagent, etc., the affects the environment, a method for smoothing a surface of a metal or metal oxide on an atomic level, and a method for patterning on an atomic level. Etching of a metal or metal oxide, or smoothing of a surface of a metal or metal oxide is possible using ozone water in which only ozone is dissolved. Patterning can also be performed by providing a metal that does not dissolve in the ozone water as a resist on a metal or metal oxide that can be etched by ozone water in which only ozone is dissolved, and etching using the ozone water.

  • Applicant
  • ※All designated countries except for US in the data before July 2012
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY
  • Inventor
  • YAMAMOTO TAKATOKI,
  • HATSUKI RYUJI
IPC(International Patent Classification)
Reference ( R and D project ) PRESTO Structures and control of interfaces AREA
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