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SPECTRAL CHARACTERISTIC MEASUREMENT DEVICE

Foreign code F140007963
File No. S2012-0740-C0
Posted date Sep 26, 2014
Country WIPO
International application number 2013JP075904
International publication number WO 2014054488
Date of international filing Sep 25, 2013
Date of international publication Apr 10, 2014
Priority data
  • P2012-219760 (Oct 1, 2012) JP
Title SPECTRAL CHARACTERISTIC MEASUREMENT DEVICE
Abstract This spectral characteristic measurement device is provided with: an incidence optical system which causes measurement light emitted from a plurality of measurement points within an object to be measured to be incident on a reflection surface of a fixed reflection part and a reflection surface of a movable reflection part; an imaging optical system which guides fixed reflected measurement light reflected by the reflection surface of the fixed reflection part and movable reflected measurement light reflected by the reflection surface of the movable reflection part to the same point and forms interference light between both the reflection measurement lights; a light detection unit which has a plurality of pixels for detecting the intensity of the interference light; a transmission filter which is disposed in a light path between the imaging optical system and the light detection unit, has a plurality of regions with different transmittances, and is configured such that the fixed reflected measurement light and the movable reflected measurement light that form the interference light to be incident on the respective pixels of the light detection unit are transmitted through the same region; and an arithmetic processing unit which finds the interferogram of the measurement light from the detection signals of the respective pixels of the light detection unit when the movable reflection part is moved, and finds the spectrum of the measurement light on the basis of the interferogram.
Scope of claims (In Japanese)[請求項1]
a)固定反射部と、
b)該固定反射部の反射面と平行な反射面を有し、前記固定反射部の反射面に対して垂直方向に移動可能な可動反射部と、
c)被測定物の内部の複数の測定点から発せられた測定光を前記固定反射部の反射面と前記可動反射部の反射面に入射させる入射光学系と、
d)前記固定反射部の反射面で反射された固定反射測定光と前記可動反射部の反射面で反射された可動反射測定光を同一点に導いて両反射測定光の干渉光を形成する結像光学系と、
e)前記干渉光の強度を検出するための複数の画素を有する光検出部と、
f) 前記結像光学系と前記光検出部の間の光路に配置された透過率が異なる複数の領域を有するフィルタであって、前記光検出部の各画素に入射する干渉光を形成する固定反射測定光と可動反射測定光が同じ領域を透過するように構成された透過フィルタと、
g)前記可動反射部を移動させたときの前記光検出部の各画素の検出信号から前記測定光のインターフェログラムを求め、このインターフェログラムに基づき測定光のスペクトルを求める演算処理部と
を備えることを特徴とする分光特定測定装置。
[請求項2]
さらに、
前記光検出部の各画素に入射する干渉光を形成する固定反射測定光と可動反射測定光が透過した前記減光フィルタの領域の透過率に基づき、該画素の検出信号から求められるインターフェログラムの強度を補償する補償手段を備えることを特徴とする請求項1に記載の分光特性測定装置。
  • Applicant
  • ※All designated countries except for US in the data before July 2012
  • KAGAWA UNIVERSITY
  • Inventor
  • ISHIMARU ICHIRO
IPC(International Patent Classification)
Specified countries National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IS JP KE KG KN KP KR KZ LA LC LK LR LS LT LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN TD TG
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