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SPHERICAL ABERRATION CORRECTION DEVICE FOR CHARGED PARTICLE BEAM ELECTROMAGNETIC LENS UPDATE コモンズ

外国特許コード F170008932
整理番号 (NU-598)
掲載日 2017年1月19日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2016JP053691
国際公開番号 WO 2016174891
国際出願日 平成28年2月8日(2016.2.8)
国際公開日 平成28年11月3日(2016.11.3)
優先権データ
  • 特願2015-090241 (2015.4.27) JP
発明の名称 (英語) SPHERICAL ABERRATION CORRECTION DEVICE FOR CHARGED PARTICLE BEAM ELECTROMAGNETIC LENS UPDATE コモンズ
発明の概要(英語) The present invention addresses the problem that an electromagnetic lens for a charged particle beam exerts a positive spherical aberration, and that correcting this spherical aberration requires a complex combination of electromagnetic lenses. In the present invention, one among a circular aperture and an annular aperture is formed in an entry plate disposed on a charged particle beam entry side, the other among the circular aperture and the annular aperture is formed in a plate disposed on the exit side, and a voltage is applied between the entry plate and an exit plate. Then, an electric field formed in the annular aperture exerts divergence whereby the positive spherical aberration is canceled. The present invention allows the spherical aberration to be corrected with an extremely simple and readily achievable structure.
従来技術、競合技術の概要(英語) BACKGROUND ART
For example, in a scanning electron microscope, an electron beam focused by the objective lens, focusing an electron beam is irradiated on the sample. Is a transmission electron microscope, an electron beam transmitted through the sample by the objective lens forms an image of the sample is observed. Charged particles such as ions of the sample is irradiated with beam devices, charged particle beam to be focused by the electromagnetic lens, the focused charged particle beam is irradiated on the sample. The lens to focus the charged particle beam is to provide a positive spherical aberration. In order to improve the resolution, it is necessary to correct spherical aberration.
The spherical aberration is referred to herein, an electromagnetic focusing the charged particle beam or the like is introduced by the lens. Converge the charged particle beam is an electromagnetic lens, the objective lens, a condenser lens, the projection lens, the lens and the combination thereof are exemplified. Of the correction device is described herein, for example, in the case where the spherical aberration of the objective lens becomes a problem to correct the spherical aberration of the objective lens can be used, spherical aberration caused by a combination of the objective lens and condenser lens becomes a problem in the case of correcting the spherical aberration caused by the combination can be used, the objective lens and the spherical aberration caused by a combination of the projection lens becomes a problem in the case of correcting the spherical aberration caused by the combination can be used. Correction apparatus disclosed herein is used in combination with an electromagnetic lens are not particularly limited, the spherical aberration when the focusing of the charged particle beam to provide any combination of the electromagnetic lens or electromagnetic lens. And Non-Patent Document 1 to Patent Document 1-4, the spherical aberration correction device is disclosed.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY
  • 発明者(英語)
  • KAWASAKI TADAHIRO
  • TANJI TAKAYOSHI
  • IKUTA TAKASHI
国際特許分類(IPC)
指定国 National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KN KP KR KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG
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