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MEASURING DEVICE UPDATE

外国特許コード F170008952
整理番号 (S2015-1644-N0)
掲載日 2017年2月16日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2016JP066636
国際公開番号 WO 2017002535
国際出願日 平成28年6月3日(2016.6.3)
国際公開日 平成29年1月5日(2017.1.5)
優先権データ
  • 特願2015-130249 (2015.6.29) JP
発明の名称 (英語) MEASURING DEVICE UPDATE
発明の概要(英語) The present invention is provided with a point light source (12) for emitting discrete-spectrum light (LA) including two or more spectra distributed at mutually different frequencies, a scattering part (14) for scattering the discrete-spectrum light in mutually different directions for each spectrum, a first light condensing part (15) for condensing spectra at mutually different positions (p1, . . ., pn) of a sample (S), a superimposing part (19) for spatially superimposing each spectrum transmitted or reflected from mutually different positions of the sample, a spatial filtering optical system (18) for condensing discrete-spectrum light (LB) including information of the sample on a position (P3) conjugate with the condensation position on the sample of the spectrum scattered by the scattering part and performing spatial filtering, and a detection part (20) for acquiring a modal decomposition spectrum including the information of the sample from the discrete-spectrum light including the information of the sample.
従来技術、競合技術の概要(英語) BACKGROUND ART
Conventional, high resolution optical microscope capable of imaging, a microscope provided with a confocal optical system (hereinafter, and a confocal microscope) has been known (for example, see Patent Document 1).
A conventional optical microscope of the specimen is uniformly irradiated with a predetermined range on the other hand, in the confocal optical system includes a point light source emitted from the irradiation light by the objective lens is focused on one point of the sample.As the irradiation light, excellent monochromatic and directionality of the laser light is used.In addition, in the confocal optical system, the objective lens at a position conjugate with the focal position of the pin holes can be arranged in, in-focus at the sample position of the transmitted light or reflected light (or, fluorescence, Raman scattering light or the like) passing through the pinhole only detected.In the confocal optical system in this way, the irradiation light is focused on one point of the first sample light, the focal position of the sample of the transmitted light or reflected light passing through the pinholes on the other hand, the light from other than the focal position of the pin hole to be cut off.Therefore, an ordinary optical microscope, the focal point of the two adjacent transverse direction without being affected by stray light from the, contrast can be improved.Further, only the focal position of the irradiation light so that the information is detected, a two-dimensional spatial resolution 3.
Clear as described above can be formed a three-dimensional image 3 is a confocal microscope, for example using a fluorescent protein such as biotechnology fields such as a vital function analysis, used in wide fields.Further, from the viewpoint of having high resolution and quantitation, a confocal microscope also in the future for increasing the importance of the considered.
As described above has excellent characteristics on the other hand, the focus position of a confocal microscope only point information cannot be obtained.Therefore, in the sample plane 2 is three-dimensional information into an image, the irradiation light emitted from the point light source within the sample relative to the focal position of the scanning is necessary.In this way the focal position of the irradiation light is scanned relative to the sample and the scanning device, a galvanometer mirror has been known.However, the scanning device may be used, a wide range of high-speed scanning is time-consuming.
The above-mentioned circumstances as a technique to cope with, for example in Patent Document 2, focus a scanning unit provided in front of the inspection target (sample) that passes through the confocal microscope is disclosed.The scanning unit, the swing angle of the light from the light source, through the objective lens, the focal position in the inspection target includes a scanning mirror of the polygonal mirror.In addition, provided in front of the sample with each of the first and second scanning unit in synchronization with the rotation of the polyhedral mirror is capable of operating.With such a configuration, an inspection object by scanning the light transmitted from the inspection target, the second scanning unit is incident on the light receiving element accurately.Therefore, the above-described transmission type confocal microscope, a scanning mirror of the polygonal mirror at a high speed machine is used, and measurement in the inspection using the transmitted light can be performed at high speed.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • TOKUSHIMA UNIVERSITY
  • UTSUNOMIYA UNIVERSITY
  • 発明者(英語)
  • YASUI Takeshi
  • IWATA Tetsuo
  • MIZUTANI Yasuhiro
  • MINAMIKAWA Takeo
  • HSIEH Yi-Da
  • HASE Eiji
  • YAMAMOTO Hirotsugu
国際特許分類(IPC)
指定国 National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KN KP KR KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG
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