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OBSERVATION SYSTEM 新技術説明会

外国特許コード F170009010
整理番号 (S2015-1988-N50)
掲載日 2017年3月29日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2016JP074265
国際公開番号 WO 2017030194
国際出願日 平成28年8月19日(2016.8.19)
国際公開日 平成29年2月23日(2017.2.23)
優先権データ
  • 特願2015-161758 (2015.8.19) JP
発明の名称 (英語) OBSERVATION SYSTEM 新技術説明会
発明の概要(英語) The purpose of the present invention is to provide an inexpensive system whereby a correct high-resolution image can be stably obtained even when a disturbance occurs. The present invention is provided with a light source 2 having a coherence length in a predetermined range, first and second light paths 3, 4 leading first and second lights from the light source 2 to an observation object S, an interference fringe generating part 6 for generating a first interference fringe resulting from the first and second lights, a measurement part 12 for measuring the light intensity distribution of a second interference fringe resulting from first and second reflected lights reflected by the observation object S in the first and second lights, and a computation part 13 for calculating an amount of phase shift in the first interference fringe on the basis of an amount of displacement of the light intensity distribution of the second interference fringe.
従来技術、競合技術の概要(英語) BACKGROUND ART
Conventional, using an optical microscope to achieve high spatial resolution as the microscopic method, modulation illumination microscopy (SIM: Structured Illumination Microscopy) has been known. In the modulated illumination microscopy, and counted for the observation object, such as in the case where the observation of the appearance inspection, the light having a light intensity distribution of the striped pattern (modulation illumination) and irradiated to an observed target, the moiré effect caused by this, a higher spatial frequency than the diffraction limit of optical microscope and information of the shift to the low frequency side. Then, an image having a first distribution information acquired by the optical microscope, with respect to the distribution of the image signal processing is performed to reproduce the high frequency information. In this manner, modulation illumination microscopy using high-resolution images can be obtained.
Modulation illumination microscopy observation using the system, for example in Non-Patent Document 1, and a laser light source, the laser light emitted from the laser light source is guided to the observation object part of the optical path, the remainder of the laser light is guided to the optical path of the observation object to another, the optical path length of the optical path and retraction of the stage, the disclosure of which is the observation system is provided. This observation system, a part of laser light to interfere with the balance on the observation object to produce an interference pattern, light scattered by the object to be observed by imaging, based on the distribution of the imaged shape distribution of the observation object is calculated.
Incidentally, in this observation system, having a phase different from each other in order to generate interference fringes, the optical paths of the stage is operated to increase or decrease the optical path length difference. However, this observation system, a long coherence length as a light source for using a laser light source, an interference fringe, its phase-shifted 1 is created for each interference fringe, it is difficult to distinguish the external appearance (the uncertainty of each wavelength). On the other hand, the object to be observed in order to correctly calculate the shape distribution, the amount of phase shift of the interference fringes must be detected with high accuracy. Therefore, this observation system, by use of the piezo actuators to drive the stage, the stage is finely the displacement amount of the drive and precision, and accurately control the phase of the interference fringe and the amount of phase shift is detected with high accuracy.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • NATIONAL UNIVERSITY CORPORATION SHIZUOKA UNIVERSITY
  • 発明者(英語)
  • USUKI Shin
  • TAKADA Tomohiro
国際特許分類(IPC)
指定国 National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KN KP KR KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG
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