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PHASE-DIFFERENCE SCANNING TRANSMISSION ELECTRON MICROSCOPE

外国特許コード F170009264
整理番号 (S2016-0479-N0)
掲載日 2017年10月24日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2017JP012647
国際公開番号 WO 2017170554
国際出願日 平成29年3月28日(2017.3.28)
国際公開日 平成29年10月5日(2017.10.5)
優先権データ
  • 特願2016-068958 (2016.3.30) JP
発明の名称 (英語) PHASE-DIFFERENCE SCANNING TRANSMISSION ELECTRON MICROSCOPE
発明の概要(英語) [Problem] To provide a phase-difference scanning transmission electron microscope that has excellent operatability and that is capable of imaging the phase change of a sample with desired contrast while minimizing the electron beam exposure of the sample.
[Solution] This phase-difference scanning transmission electron microscope is provided with: an electron gun 31; an irradiation optical system 32; a scan coil 33; a convergence optical system 34; an objective lens 35; and a bright field detector 36 that detects the intensity of an electron beam. A Fresnel zone plate 40 is arranged on the upstream side of a STEM focal plane such that the focus thereof is set on the STEM focal plane. Thus, electron beams including a reference wave and a main probe wave from the plate irradiate a sample object 50 placed between the convergence optical system 34 and the objective lens 35.
従来技術、競合技術の概要(英語) BACKGROUND ART
Transmission electron microscope, observations of the structure of the nanometer-thin samples or the like has been widely used in, this is, the electron beam is irradiated to the sample, the electron beam transmitted through the sample, by magnifying and projecting onto a detector, an internal structure of the watermark technique to view the sample, the sample absorption of the electron beam inside the object reflecting a projection image is obtained and, for example, the following Patent Document 1 is already known.
In such a transmission electron microscope, in particular, with less absorption of the electron beam hardly undyed biological soft tissue contrast and so forth or a resin case, the sample passing through a phase of an electron beam is converted into contrast is observed, the so-called, the phase difference between the phase difference method or an electron microscope used in a scanning transmission electron microscopy. It should be noted that, in general, an electron beam emitted from the electron gun while scanning the sample is observed to be inspected, a so-called, a scanning transmission electron microscope apparatus is, for example, by the following Patent Document 2 is already known.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • NATIONAL INSTITUTES OF NATURAL SCIENCES
  • 発明者(英語)
  • NAGATANI Yukinori
国際特許分類(IPC)
指定国 National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DJ DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KH KN KP KR KW KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG

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