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PHASE CONTRAST TRANSMISSION ELECTRON MICROSCOPE DEVICE

外国特許コード F170009265
整理番号 (S2016-0480-N0)
掲載日 2017年10月24日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2017JP012654
国際公開番号 WO 2017170558
国際出願日 平成29年3月28日(2017.3.28)
国際公開日 平成29年10月5日(2017.10.5)
優先権データ
  • 特願2016-069638 (2016.3.30) JP
発明の名称 (英語) PHASE CONTRAST TRANSMISSION ELECTRON MICROSCOPE DEVICE
発明の概要(英語) [Problem] To provide a phase contrast transmission electron microscope equipped with a long-life phase modulating means which does not absorb the electron beam and is not affected by the irradiation of the electron beam, and in which it is possible to vary the phase modulation amount of the electron beam.
[Solution] An electron microscope 10 is equipped with: an electron gun; a first laser irradiation process which is provided between the electron beam source and an objective lens and irradiates the electron beam emitted from the electron beam source with a laser; a second laser irradiation process which is provided upon the focal plane behind the objective lens and converges a laser upon the focal point of the electron beam passing through a sample while irradiating the beam with the laser; and a screen or two-dimensional electron beam sensor which detects a sample image as the intensity distribution of the electron beam by means of an image forming optical system.
従来技術、競合技術の概要(英語) BACKGROUND ART
Emitted from the electron gun and the electron beam transmitted through the sample to be inspected using a transmission electron microscope is observed, for example, the following Patent Document 1 or 2 including a variety of literature and are known, such as observing the structure of the nanometer-thin samples used in a wide range. That is, according to a transmission electron microscope, the electron beam is irradiated to the sample, the electron beam transmitted through the sample, two-dimensional detector 2 on a screen by magnifying and projecting, the internal structure of a sample observing method and the watermark, the sample absorption of the electron beam inside the object reflecting a projection image is obtained.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • NATIONAL INSTITUTES OF NATURAL SCIENCES
  • 発明者(英語)
  • NAGATANI Yukinori
国際特許分類(IPC)
指定国 National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DJ DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KH KN KP KR KW KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG

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