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HEATING MEMBER AND HEATING DEVICE

Foreign code F170009295
File No. S2017-0657-N0
Posted date Nov 21, 2017
Country WIPO
International application number 2016JP081587
International publication number WO 2017073563
Date of international filing Oct 25, 2016
Date of international publication May 4, 2017
Priority data
  • P2015-213206 (Oct 29, 2015) JP
Title HEATING MEMBER AND HEATING DEVICE
Abstract This heating member is provided with a heat-generating body, a conductor layer, and window parts. The heat-generating body is formed from a mixture of a dielectric material and conductor particles which is a microwave absorber. The conductor layer covers at least a portion of the surface of the microwave absorber. The window parts are provided to at least a portion of the conductor layer, and guide microwaves with which the microwave absorber is to be irradiated. The ratio of the volume of the conductor particles to the volume of the heat-generating body is at least 0.04, but not more than 0.15.
Scope of claims [claim1]
1. The conductor particle which is the microwave absorber and the exothermic body which is formed with the blend of the dielectric and,
The conductor layer which covers at least the portion of the surface of the aforementioned exothermic body and,
The window which guides the microwave which the aforementioned conductor layer is provided at least in part, is irradiated to the aforementioned exothermic body and,
Having,
Ratio of cubic measure of the aforementioned conductor particle for the cubic measure of the aforementioned exothermic body, the heating component which features that it is the 0.15 or less of 0.04 or more.
[claim2]
2. Among the surfaces of the aforementioned exothermic body, in the claim 1 which furthermore has the temperature conduction material which is arranged on the surface where the suffering heating object is arranged the heating component of statement.
[claim3]
3. As for the aforementioned conductor layer, in the claim 1 which features that the aforementioned exothermic body is covered directly or 2 the heating component of statement.
[claim4]
4. As for the aforementioned conductor layer, in the claim 1 which features that it is arranged inside the external wall which is provided outside the aforementioned exothermic body or 2 the heating component of statement.
[claim5]
5. As for the aforementioned external wall in the claim 4 which features that it is formed with the oxidation resistance material the heating component of statement.
[claim6]
6. As for thickness of the aforementioned conductor layer, from the claim 1 which features that it is thickness above skin depth of the material of particular conductor layer either of 5 in 1 sections the heating component of statement.
[claim7]
7. As for the aforementioned conductor layer, from the claim 1 which features that it is the high fusion point metal which includes the amorphous carbon or the carbon material or the tungsten or the molybdenum which include the carbon graphite either of 6 in 1 sections the heating component of statement.
[claim8]
8. As for the aforementioned conductor layer, from the claim 1 which features the opening of size of 1/10 or less of microwave wave length and that it possesses the air gap either of 7 in 1 sections the heating component of statement.
[claim9]
9. As for the aforementioned window from the claim 1 which features that it is the dielectric either of 8 in 1 sections the heating component of statement.
[claim10]
10. The accommodation body where the conductor particle which is the microwave absorber is accommodated and,
The window which guides the microwave which is provided in the aforementioned accommodation body, irradiates to the conductor particle of the aforementioned accommodation internal and,
Having,
The aforementioned conductor particle is enclosed to the aforementioned accommodation internal, as for cubic measure of the aforementioned conductor particle of the aforementioned accommodation internal, the ratio for the cubic measure of the aforementioned accommodation body, the heating component which features that it is the 0.15 or less of 0.04 or more.
[claim11]
11. Among the aforementioned accommodation bodies, in the claim 10 which features that furthermore it has the temperature conduction material which is arranged on the surface where the suffering heating object is arranged the heating component of statement.
[claim12]
12. In the claim 10 which features that the conductor layer which is arranged on the inner wall of the aforementioned accommodation body furthermore is had or 11 the heating component of statement.
[claim13]
13. As for the aforementioned accommodation body, from the claim 10 which features that conductor layer is had inside the wall either of 12 in 1 sections the heating component of statement.
[claim14]
14. As for the aforementioned accommodation body, in the claim 12 which features that the layer which is formed with the oxidation resistance material which covers the aforementioned conductor layer furthermore is had or 13 the heating component of statement.
[claim15]
15. As for thickness of the aforementioned conductor layer, from the claim 12 which features that it is thickness above skin depth of the material of particular conductor layer either of 14 in 1 sections the heating component of statement.
[claim16]
16. As for the aforementioned conductor layer, from the claim 12 which features that it is the high fusion point metal which includes the amorphous carbon or the carbon material or the tungsten or the molybdenum which include the carbon graphite either of 15 in 1 sections the heating component of statement.
[claim17]
17. As for the aforementioned conductor layer, from the claim 12 which features the opening of size of 1/10 or less of microwave wave length and that it possesses the air gap either of 16 in 1 sections the heating component of statement.
[claim18]
18. As for the aforementioned window from the claim 10 which features that it is the dielectric either of 17 in 1 sections the heating component of statement.
[claim19]
19. As for internal pressure of the aforementioned accommodation body, from the claim 10 which features that it is 1/6 or less of atmospheric pressure either of 18 in 1 sections the heating component of statement.
[claim20]
20. Inside the aforementioned accommodation body, from the claim 10 which features that it is inert gas atmosphere or non-oxygenated atmosphere either of 19 in 1 sections the heating component of statement.
[claim21]
21. The accommodation body where the conductor particle which is the microwave absorber is accommodated and,
The window which guides the microwave which is provided in the aforementioned accommodation body, irradiates to the conductor particle of the aforementioned accommodation internal and,
Having,
The aforementioned conductor particle, the dielectric being mixed, fills up by aforementioned accommodation body,
As for cubic measure of the aforementioned conductor particle of the aforementioned accommodation internal, the ratio for the cubic measure of the aforementioned accommodation body, the heating component which features that it is the 0.15 or less of 0.04 or more.
[claim22]
22. Among the aforementioned accommodation bodies, in the claim 21 which features that furthermore it has the temperature conduction material which is arranged on the surface where the suffering heating object is arranged the heating component of statement.
[claim23]
23. In the claim 21 which features that the conductor layer which is arranged on the inner wall of the aforementioned accommodation body furthermore is had or 22 the heating component of statement.
[claim24]
24. As for the aforementioned accommodation body, in the claim 21 which features that conductor layer is had inside the wall or 22 the heating component of statement.
[claim25]
25. As for the aforementioned accommodation body, in the claim 23 which features that the layer which is formed with the oxidation resistance material which covers the aforementioned conductor layer furthermore is had or 24 the heating component of statement.
[claim26]
26. As for thickness of the aforementioned conductor layer, from the claim 23 which features that it is thickness above skin depth of the material of particular conductor layer either of 25 in 1 sections the heating component of statement.
[claim27]
27. As for the aforementioned conductor layer, from the claim 23 which features that it is the high fusion point metal which includes the amorphous carbon or the carbon material or the tungsten or the molybdenum which include the carbon graphite either of 26 in 1 sections the heating component of statement.
[claim28]
28. As for the aforementioned conductor layer, from the claim 23 which features the opening of size of 1/10 or less of microwave wave length and that it possesses the air gap either of 27 in 1 sections the heating component of statement.
[claim29]
29. As for the aforementioned window from the claim 21 which features that it is the dielectric either of 28 in 1 sections the heating component of statement.
[claim30]
30. As for internal pressure of the aforementioned accommodation body, from the claim 21 which features that it is 1/6 or less of atmospheric pressure either of 29 in 1 sections the heating component of statement.
[claim31]
31. Inside the aforementioned accommodation body, from the claim 21 which features that it is inert gas atmosphere or non-oxygenated atmosphere either of 30 in 1 sections the heating component of statement.
[claim32]
32. Either of claim 1-31 in 1 sections heating component of statement and,
The aforementioned heating component and the processing container which accommodates the suffering heating object and,
The microwave introduction section which supplies microwave inside the aforementioned processing container and,
The gas supply section which supplies the specified gas inside the aforementioned processing container and,
The exhaust section which removes oxygen from inside the aforementioned processing container and,
The heating system which features that it has.
  • Applicant
  • ※All designated countries except for US in the data before July 2012
  • TOKYO ELECTRON LIMITED
  • TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY
  • Inventor
  • USHIJIMA MITSURU
  • IWABUCHI KATSUHIKO
  • MATSUZAKI KAZUYOSHI
  • SUZUKI AYUTA
  • KASAI SHIGERU
  • SAMESHIMA TOSHIYUKI
IPC(International Patent Classification)
Specified countries (WO201773563)
National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DJ DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KN KP KR KW KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG
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