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FORCE SENSOR AND FORCE SENSOR PRODUCTION METHOD

外国特許コード F180009353
整理番号 (S2016-1146-N0)
掲載日 2018年4月18日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2017JP029290
国際公開番号 WO 2018051703
国際出願日 平成29年8月14日(2017.8.14)
国際公開日 平成30年3月22日(2018.3.22)
優先権データ
  • 特願2016-179650 (2016.9.14) JP
発明の名称 (英語) FORCE SENSOR AND FORCE SENSOR PRODUCTION METHOD
発明の概要(英語) An MEMS force sensor (100) is provided with: a resin elastic part (102) that is disposed so as to sandwich, from both sides, a plurality of detection units (101) that each have an element part (111) provided on a portion of the surface layer of a foundation member (110) comprising a semiconductor and are arranged side-by-side on a circle; and a probe part (103) that is connected to one end part of each of the detection units (101) at the center of the circle around which the detection units (101) are arranged and extends to a position protruding from the elastic part (102).
特許請求の範囲(英語) [claim1]
1. (Micro Electro Mechanical Systems) as MEMS force sensor, a portion of the surface layer of the base member is made of a semiconductor light-emitting part when the detection unit is provided on the circumference and disposed in a plurality of aligned, wherein the detection unit in the state where the elastic portion made of resin is disposed, wherein the detection unit is arranged in the central portion of the circumference of said detecting unit respectively connected to one end of the, characterized in that the elastic portion protrudes from the probe tip section extending to a position and a force sensor.
[claim2]
2. Wherein the detection unit is disposed in the outer peripheral portion of the circumference of the other end portion of said detecting unit and the holding portion are respectively connected to, said probe portion on the opposite side, said retainer further comprises a terminal portion connected to, said terminal portion, wherein the detection unit and opposed to the concave portion for housing said elastic portion and, wherein the communicating to the recesses and the through hole according to claim 1 comprises a force sensor.
[claim3]
3. In said detecting unit, wherein the element unit is provided, wherein the arranged on an opposite side of the probe tip is a force sensor according to claim 1 or 2.
[claim4]
4. Attached to said probe, said probe further comprising a cover to cover a portion of one of any one of claims 1-3 force sensor.
[claim5]
5. (Micro Electro Mechanical Systems) as MEMS sensor manufacturing method of a force, the surface of the base member in a part of the semiconductor element portion are arranged on a circumference of the detection part is formed by arranging a plurality of, in the base member, wherein the detection unit adjacent in the thickness direction of the through hole is formed is divided into, wherein the detection unit is disposed in the central portion of the circumference of said detecting unit are respectively connected to one end of the protruding probe part is formed, wherein the detection unit is disposed in the outer peripheral portion of the circumference of the other end portion of said detecting unit with respect to the holding unit are respectively connected to, said probe portion from the opposite side of the electrical terminal portion, and, mechanically connected to each other, and the terminal portion of the channel portion opposite to the concave portion is provided, said recess communicating with the through hole and said recess portion is filled with the resin and, further, wherein the division detection unit is sandwiched between the through hole so as to be arranged in the resin, the resin is cured to the method of manufacturing the elastic part is formed with a force sensor.
[claim6]
6. Prior to filling the recesses in the resin, the resin cover to restrict the flow of said probe portion attached to the method of manufacturing the sensor according to claim 5 force.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • KOBE UNIVERSITY
  • 発明者(英語)
  • ISONO YOSHTADA
国際特許分類(IPC)
指定国 (WO201851703)
National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DJ DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JO JP KE KG KH KN KP KR KW KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG
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