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FORCE SENSOR AND FORCE SENSOR PRODUCTION METHOD UPDATE

外国特許コード F180009353
整理番号 (S2016-1146-N0)
掲載日 2018年4月18日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2017JP029290
国際公開番号 WO 2018051703
国際出願日 平成29年8月14日(2017.8.14)
国際公開日 平成30年3月22日(2018.3.22)
優先権データ
  • 特願2016-179650 (2016.9.14) JP
発明の名称 (英語) FORCE SENSOR AND FORCE SENSOR PRODUCTION METHOD UPDATE
発明の概要(英語) An MEMS force sensor (100) is provided with: a resin elastic part (102) that is disposed so as to sandwich, from both sides, a plurality of detection units (101) that each have an element part (111) provided on a portion of the surface layer of a foundation member (110) comprising a semiconductor and are arranged side-by-side on a circle; and a probe part (103) that is connected to one end part of each of the detection units (101) at the center of the circle around which the detection units (101) are arranged and extends to a position protruding from the elastic part (102).
従来技術、競合技術の概要(英語) BACKGROUND ART
Conventional, relatively large mechanical components such as the surface of the robot hand to be mounted in the presence of the touch sensor. With such a tactile sensor, the surface of the robot hand needs to be widely distributed, MEMS (Micro Electro Mechanical Systems) miniaturization is achieved.
Patent Document 1 for example of the tactile sensor is, the two elements 1 3 can be detected in the axial direction of the force sensor, one side of the rectangle of about 0.5mm is formed on a substrate. In addition, with such a tactile sensor, the detection range is relatively narrow, and, detects a relatively strong force.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • KOBE UNIVERSITY
  • 発明者(英語)
  • ISONO, Yoshitada
国際特許分類(IPC)
指定国 National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DJ DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JO JP KE KG KH KN KP KR KW KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG
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