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ELLIPSOMETRY DEVICE AND ELLIPSOMETRY METHOD

外国特許コード F180009379
整理番号 (S2016-1083-N0)
掲載日 2018年4月19日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2017JP029829
国際公開番号 WO 2018038064
国際出願日 平成29年8月21日(2017.8.21)
国際公開日 平成30年3月1日(2018.3.1)
優先権データ
  • 特願2016-163989 (2016.8.24) JP
発明の名称 (英語) ELLIPSOMETRY DEVICE AND ELLIPSOMETRY METHOD
発明の概要(英語) The present invention provides an ellipsometry device and method whereby measurement efficiency can be enhanced. In this method, an object is illuminated by spherical-wave illumination light Q linearly polarized at 45° (S1), and object light O as reflected light is acquired in a hologram IOR using a spherical-wave reference light R having a focal point near the focal point of the illumination light Q, and a hologram ILR of the reference light R is furthermore acquired using spherical-wave reference light L having the same focal point as the illumination light Q (S2). The holograms are separated into p- and s-polarized light holograms IκOR, IκLR (κ = p, s) and processes, object light waves are extracted, and an object light spatial frequency spectrum Gκ(u, v) (κ = p, s) is generated (S3) (S4). An ellipsometry angle Ψ(θ), Δ(θ) is obtained for each incidence angle θ from the amplitude reflection coefficient ratio ρ = Gp/Gs = tanΨ∙exp(iΔ). Through use of numerous lights having different incidence angles θ included by the illumination light Q, data of numerous reflection lights can be acquired at once in a hologram and processed.
特許請求の範囲(英語) [claim1]
1. The polarization of the light emitted from the object to be employed to analyze ellipsometry device, comprises a p-polarized light and s-polarized light and the polarization state of the illumination light of a known non-parallel (Q) emitted from an object illuminated by the illumination of the object light to data of (O), the off-axis reference light used (R), p-polarized light and s-polarized light of the hologram on the hologram separable, the hologram of the object light (IOR) obtained as, wherein the reference light off (R) data, the reference line is a spherical wave (L) is used, and the p-polarized light of s polarization hologram in a separable manner to the hologram, the hologram of the reference light (ILR) is acquired as the data obtaining unit, the light object (O) of the data analysis unit and the polarization analysis is performed, and, the data analysis unit includes, wherein the data acquisition unit acquired by the object light hologram (IOR) hologram of the reference light and (ILR) object using the data of the p-polarized light of the light and the light wave (O) s-polarized light of the light wave representing each hologram optical (gκ(x,y), κ=p, s) respectively generated in the surface of the hologram optical reproducing unit, wherein the p-polarized light and s-polarized light hologram optical (gκ(x,y), κ=p, s) of the plane wave to each of the p-polarized light and s-polarized light spreading of the spatial frequency spectrum of the object light to (gκ(u,v), κ=p, s) of the object light to generate a plane wave expansion section and respectively, said illumination light (Q) using known information, in the hologram surface, said illumination light (Q) of the spatial frequency spectrum of illumination light on the p-polarized light (Sp(u,v) ) s-polarized light with respect to the spatial frequency spectrum of the illumination light (Ss(u,v) ) illumination light polarization coefficient which is a ratio of (ξQ=Ss(u,v) /Sp(u,v) ) polarization coefficient generation unit generates, wherein the p-polarized light and s-polarized light on the spatial frequency spectrum of the object light to (gκ(u,v), κ=p, s) and the polarization of the illumination light coefficient (ξQ) are used, the spatial frequency (u, v) for each of the s-polarized light and a reflection amplitude coefficient (rs=Gs(u,v) /Ss(u,v) ) p-polarized light with respect to the amplitude of the reflection coefficient (rp=Gp(u,v) /Sp(u,v) ) and a reflection amplitude ratio and the coefficient ratio (ρ=rp/rs=ξQGp(u,v) /Gs(u,v) ) and calculation section to calculate, comprising, wherein the ellipsometry device.
[claim2]
2. Said data obtaining section, a spherical wave from the laser light emitted by the coherent light and said illumination light (Q), a spherical wave of reference beam off and (R), and the reference light (L) the in-line spherical waves, propagating the generated optical system, light intensity into an electrical signal and output a light receiving element, wherein the object light (O) and the reference light off (R) of the interference fringes of the hologram of the object light to said off-axis hologram (IOR), spherical wave-line and the reference light (L) and the reference light off (R) of the interference fringes of reference light of said hologram off-axis hologram (ILR) to, and the light receiving element obtained using the storage unit to store, of the object light to said hologram (IOR) and the reference beam on the hologram (ILR) each of, p-polarized light and s-polarized light to the hologram as the hologram in the hologram are separable in the storing unit to the acquired and stored, from the laser optical path leading to the light receiving element, wherein the optical path of light propagating in the polarization state and a polarization setting is set, and, the data analysis unit, wherein the hologram of the object light (IOR) becomes separated from the p-polarized light for each of the s-polarized light and object light of the polarization hologram (IκOR, κ=p, s) are generated and, wherein the hologram of the reference light (ILR) polarized light are separated for each composed of a p-polarized light and s-polarized reference beam hologram (IκLR, κ=p, s) ) to respectively generate a polarization separating section, wherein the p-polarized light and s-polarized light hologram object (IκOR, κ=p, s) and the p-polarized light and s-polarized reference beam hologram (IκLR, κ=p, s) and, wherein the reference light off (R) of the s-polarized light and p of the removal of the object light to the polarization of the complex amplitude in-line hologram (JκOL, κ=p, s) and an in-line generating unit, and, wherein the reproduction unit reproduces the light, the polarization separating section and the in-line section and said p-polarized light generated by the s-polarized light of the object light to an in-line hologram (JκOL, complex amplitude κ=p, s) of the in-line reference light from a spherical wave (L) the components of the spherical wave light by utilizing the characteristic of the removed, a hologram optical waves (gκ(x,y), κ=p, s) is generated, characterized in that the apparatus according to claim 1 ellipsometry.
[claim3]
3. The polarization setting unit includes, wherein each of the reference light off the off-axis (R) p-polarized light and the reference light off (Rp) and, s-polarized light of off-axis reference light (Rs) for splitting a reference light dividing section is provided, said data obtaining section, the reference light splitting section and divided by the p-polarized light and s-polarized light of off-axis reference light (Rκ, κ=p, s) to overlap each other is used, the object hologram (IOR) hologram of the reference light and (ILR) and, each of the s-polarized light and p polarized light hologram which can be separated and acquired as a hologram at the hologram, characterized in that the apparatus according to claim 2 ellipsometry.
[claim4]
4. Wherein the division section of the reference light, using Wellaston off p-polarized light and the reference light (R) is divided into s-polarized light and characterized in that the apparatus according to claim 3 ellipsometry.
[claim5]
5. Wherein the light-receiving element, and the CCD, wherein the polarization setting, wherein the polarization state of the light-receiving element is set for each pixel of said CCD comprises an array of polarizers and ellipsometry device according to claim 2.
[claim6]
6. The polarization of the light emitted from an object used in the analysis method ellipsometry, p-polarized light and s-polarized light and a known polarization state comprises a non-parallel light (Q) of the illumination light emitted from an object illuminated by the illumination of the object light and the reference light (O) data using the off-axis (R), p-polarized light and s-polarized light of the hologram on the hologram separable, the hologram of the object light (IOR) obtained as, wherein the reference light off (R) an in-line data of the reference light is a spherical wave (L) is used, and the p-polarized light of s polarization hologram separable hologram, the hologram of the reference light (ILR) obtained as, wherein the hologram of the object light (IOR) hologram of the reference light and (ILR) object using the data of the p-polarized light of the light waves (O) s-polarized light of the light waves representing the respective optical hologram (gκ(x,y), κ=p, s) which are respectively generated in the surface of the hologram, the p-polarized light and s-polarized light hologram optical (gκ(x,y), κ=p, s) of the plane wave to each of the p-polarized light and s-polarized light spreading of the spatial frequency spectrum of the object light to (gκ(u,v), κ=p, s) are generated and, said illumination light (Q) using known information, in the hologram surface, wherein the illumination light of the illumination light of the polarized light (Q) in a spatial frequency spectrum p (Sp(u,v) ) s-polarized light with respect to the spatial frequency spectrum of the illumination light (Ss(u,v) ) illumination light polarization coefficient which is a ratio of (ξQ=Ss(u,v) /Sp(u,v) ) is generated, wherein the p-polarized light and s-polarized light on the spatial frequency spectrum of the object light to (gκ(u,v), κ=p, s) and the polarization of the illumination light coefficient (ξQ) using, the spatial frequency (u, v) for each of the s-polarized light and a reflection amplitude coefficient (rs=Gs(u,v) /Ss(u,v) ) p-polarized light with respect to the amplitude of the reflection coefficient (rp=Gp(u,v) /Sp(u,v) ) and a reflection amplitude ratio and the coefficient ratio (ρ=rp/rs=ξQGp(u,v) /Gs(u,v) ) ellipsometry method characterized in that it is possible to calculate.
[claim7]
7. A laser beam from the coherent light emitted by said illuminating light and a spherical wave (Q), a spherical wave of reference light and an off (R), and the reference light and the in-line to be a spherical wave (L), propagating the generated, wherein the object light (O) and the reference light off (R) of the interference fringes of the hologram of the object light to said off-axis hologram (IOR), -line and the reference light is a spherical wave (L) and the reference light off (R) of the interference fringes of the hologram of the reference light said off-axis hologram (ILR) to, and acquires and stores, of the object light to said hologram (IOR) hologram of the reference light and (ILR) from each, p polarized light becomes to be separated for each of the s-polarized light and the polarized light hologram of the object light (IκOR, κ=p, s) and p-polarized light and s-polarized light of the hologram of the reference light (IκLR, κ=p, s) are generated and, wherein the p-polarized light and s-polarized light hologram object (IκOR, κ=p, s) and the p-polarized light and s-polarized reference beam hologram (IκLR, κ=p, s) and, wherein the reference light off (R) p-polarized light component of the s-polarized light is removed from the complex amplitude in-line hologram of the object light (JκOL, κ=p, s) is generated and, wherein the p-polarized light and s-polarized light of the complex amplitude in-line hologram object (JκOL, κ=p, s) of the in-line reference light from a spherical wave (L) the components of the spherical wave light by utilizing the characteristic of the removed, and the light wave hologram (gκ(x,y), κ=p, s) is generated, characterized in that the method according to claim 6 ellipsometry.
[claim8]
8. Wherein the hologram of the object light (IOR) and the reference beam on the hologram (ILR) may be obtained, said spherical wave of off-axis reference light (R) to, each other in the off-axis and for p-polarized light of off-axis reference light (Rp) and s-polarized light of off-axis reference light (Rs) splitting, the divided the p-polarized light and s-polarized light of off-axis reference light (Rκ, κ=p, s) to overlap each other is carried out using the, object hologram (IOR) and the reference beam on the hologram (ILR) of each of said p-polarized light in the hologram and the s-polarized light in the hologram to the separation, wherein the p-polarized light and s-polarized light of off-axis reference light (Rκ, κ=p, s) are in the off-axis based on the fact that the filtering is performed by, characterized in that the method according to claim 7 ellipsometry.
[claim9]
9. Wherein the hologram of the object light (IOR) and the reference beam on the hologram (ILR) may be obtained, and the light receiving element in the CCD is performed using the, receiving element p polarized light polarizer and the s-polarized light polarizer and the CCD for each of the pixels are alternately arranged in a water, wherein the object light hologram (IOR) hologram of the reference light and (ILR) p of each of said s-polarized light of the polarized light hologram is a hologram into a separation, for each pixel of said CCD p-polarized light and s-polarized light data conducted separately from the data, characterized in that the method according to claim 7 ellipsometry.
[claim10]
10. A plurality of coherent light of different wavelengths used in a stacked manner of the object light to said hologram (IOR) and the reference beam on the hologram (ILR) are obtained, wherein the different wavelengths for each said reflection amplitude and the coefficient ratio (ρ=rp/rs) is calculated, and one of said any one of claims 6-9 ellipsometry method.
[claim11]
11. Wherein the p-polarized light and s-polarized light on the spatial frequency spectrum of the object light to (gκ(u,v), κ=p, s) and, wherein the p-polarized light and s-polarized light of the illumination light on the spatial frequency spectrum (Sκ(u,v), κ=p, s) and, on the coordinate rotation conversion by each of the surface of the object in the plane parallel to be converted to a representation of the amplitude of said reflection coefficient ratio (ρ=rp/rs) is calculated, characterized in that one of said any one of claims 6-10 ellipsometry method.
[claim12]
12. (Q) of the illumination light as a hologram using light to be a spherical wave object (IOR) acquired, polarized light reflection characteristics are known reflection mirror using the spherical wave light beams and illuminating light (Q) the hologram towards the surface by reflecting, said illumination light (Q) said in-line to be a spherical wave and the reference light (L) is used as the, wherein the hologram of the reference light (ILR) RelationshipID, characterized in that one of any one of claims 7-12 ellipsometry method.
[claim13]
13. Wherein the hologram of the object light (IOR) may be obtained, wherein said illumination light in a surface of an object (Q) for microscopically observing illumination spot size by the size of the performed setting, wherein the p-polarized light and s-polarized light on the spatial frequency spectrum of the object light to (gκ(u,v), κ=p, s) is a processing of generating, the p-polarized light and s-polarized light hologram optical (gκ(x,y), κ=p, s) for each of the, space is subdivided and the sampling interval, subdivided into new sampling points produced by interpolating the data, so as to substantially increase the number of sampling points, sampling points wherein p-polarized light and s increased the polarized light hologram light waves, each of the plurality of micro-hologram (gκi(x,y), κ=p, s) is divided into, wherein the micro-hologram generated by division (gκi(x,y), κ=p, s) to p-polarized light and s-polarized light with respect to each of the s-polarized light and p are overlapped with each other the polarization of the synthetic micro-hologram (Σκ(x,y), κ=p, s) is generated, the p-polarized light and s-polarized light synthetic micro-hologram (Σκ(x,y), κ=p, s) of the plane wave to each of the p-polarized light and s-polarized deployment wherein the spatial frequency spectrum in which the object light of (gκ(u,v), κ=p, s) respectively generated, and it comprises, satisfy the relationship of the variance of the plane wave (u, v, w) and the spatial frequency of the increase in the number of sampling through the p-polarized light and s generated in response to the spatial frequency spectrum in which the object light of the polarization (gκ(u,v), κ=p, s) are used, of the object light to said optical axis (O) in a position where a surface of the object light on the object in the s-polarized light and p (O) of the reproduction light of the polarized light (hκ(x,y), κ=p, s) is generated and, wherein the p-polarized light and s-polarized light and reproducing light (hκ(x,y), κ=p, s) on the coordinate rotation conversion by a plane parallel to the surface of the object are represented in the s-polarized light and p comprises converting the rotation of polarized light and reproducing light wave (bκ(x',y'), κ=p, s) is generated, the illumination light polarization coefficient (ξQ) p and s-polarized light and the reproduction light rotation of polarized light (bκ(x',y'), κ=p, s) using, wherein (x ', y') of the illumination spot and a reflection amplitude of each point and the coefficient ratio (ρ=ξQbp(x',y') /bs(x',y')), or, a surface of said object in a microscope for observing the image (|bκ|2, κ=p, s) is calculated, characterized in that the method according to claim 6 ellipsometry.
[claim14]
14. Wherein the surface of the object and the hologram surface (α) to obtain an angle formed by a, wherein said illumination light (Q) Brewster angle of the object (θB) incident angle in a state of containing the object to illuminate the object and a hologram (IOR) is acquired, the surface of the object and the hologram and the surface of the above-mentioned angle (α) is used, wherein the p-polarized light and s-polarized light of the object light to a spatial frequency spectrum (gκ(u,v), κ=p, s) and, wherein the p-polarized light and s-polarized light of the illumination light on the spatial frequency spectrum (Sκ(u,v), κ=p, s) and, on the coordinate rotation conversion in the plane parallel to the surface of the object respectively converts a representation (ρ) and a reflection amplitude is calculated and the coefficient ratio, wherein the ratio of the amplitude of the reflection coefficient (ρ) for the analysis of polarized light at an angle (Ψ, Δ) ellipsometry and said illumination light (Q) (θ) included in the obtained for the plurality of incident angle, the angle of incidence (θ) as a variable to reflect said illumination light (Q) the refractive index of the object model curve parameters (n) said ellipsometry angle by fitting (Ψ, Δ), to obtain values of a refractive index (n), characterized in that the method according to claim 6 ellipsometry.
[claim15]
15. Wherein the hologram of the object light (IOR) may be obtained, said illuminating light and a spherical wave (Q), the surface of the object including a plurality of measuring points in a wider surface, said illumination light (Q) of the focusing point is disposed in the rear or the front of the illumination is carried out with a, the ratio of the amplitude of the reflection coefficient is calculated by (ρ), wherein the plurality of measurement points is performed for each point of, characterized in that the method according to claim 6 ellipsometry.
[claim16]
16. Wherein the hologram of the object light (IOR) may be obtained, said illumination light (Q) and a spherical wave, the surface of the object at the position of the focal point of said illumination light (Q) performs arranged, characterized in that the method according to claim 6 ellipsometry.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • UNIVERSITY OF HYOGO
  • 発明者(英語)
  • SATO KUNIHIRO
国際特許分類(IPC)
指定国 (WO201838064)
National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DJ DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JO JP KE KG KH KN KP KR KW KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG

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