Top > Search of International Patents > NON-EVAPORATIVE GETTER-COATED COMPONENT, CONTAINER, MANUFACTURING METHOD, AND APPARATUS

NON-EVAPORATIVE GETTER-COATED COMPONENT, CONTAINER, MANUFACTURING METHOD, AND APPARATUS

Foreign code F180009452
File No. S2016-1122-C0
Posted date Jul 25, 2018
Country WIPO
International application number 2017JP042682
International publication number WO 2018097325
Date of international filing Nov 28, 2017
Date of international publication May 31, 2018
Priority data
  • P2016-230510 (Nov 28, 2016) JP
Title NON-EVAPORATIVE GETTER-COATED COMPONENT, CONTAINER, MANUFACTURING METHOD, AND APPARATUS
Abstract Provided are a component and a container, which are coated with a non-evaporative getter, the component and the container being characterized by including: a non-evaporative getter material layer containing a total of 20 mole% or less of occluded carbon atoms, nitrogen atoms, and oxygen atoms; and/or a noble metal layer containing a total of 20 mole% or less of occluded carbon atoms, nitrogen atoms, and oxygen atoms. Also provided is a method for manufacturing a non-evaporative getter-coated component and container, the method being characterized by comprising a step for forming a non-evaporative getter material layer and/or a noble metal layer by coating the component and container with a non-evaporative getter material and/or a noble metal by a vapor deposition process under low-pressure conditions. Also provided is an apparatus for manufacturing an NEG-coated component and container, the apparatus being characterized by having an NEG material filament and/or a noble metal filament, as well as a current terminal.
Scope of claims [claim1]
1. A carbon atom, nitrogen atom, oxygen atom and 20 molar % or less of the total amount of non-evaporable getter material layer, and/or, a carbon atom, nitrogen atom, oxygen atom and 20 molar % of the total amount is less than or equal to the noble metal layer comprises, a non-evaporation type getter coating components.
[claim2]
2. The inner surface of the vacuum container, a carbon atom, nitrogen atom, oxygen atom and 20 molar % or less of the total amount of occlusion of the non-evaporable getter material layer, and/or, a carbon atom, nitrogen atom, oxygen atom and 20 molar % or less of the total amount of occlusion of the noble metal coating layer and characterized in that, the non-evaporable getter coating container.
[claim3]
3. A low pressure to the substrate in the non-evaporable getter material and/or a noble metal by coating by vapor deposition, the non-evaporable getter material layer and/or a noble metal layer and to form, a method of manufacturing a non-evaporable getter coating components.
[claim4]
4. The inner surface of the vacuum vessel by a low pressure non-evaporable getter material and/or a noble metal by coating by vapor deposition, the non-evaporable getter material layer and/or a noble metal layer and to form, a method of manufacturing a non-evaporable getter coating vessel.
[claim5]
5. A substrate, the non-evaporable getter material filaments and/or noble metal filaments, characterized in that the current and an output terminal, the non-evaporable getter coating with the manufacturing apparatus.
[claim6]
6. The vacuum vessel, the non-evaporable getter material filaments and/or noble metal filaments, characterized in that the current and an output terminal, the non-evaporable getter coating container manufacturing apparatus.
  • Applicant
  • ※All designated countries except for US in the data before July 2012
  • INTER-UNIVERSITY RESEARCH INSTITUTE CORPORATION HIGH ENERGY ACCELERATOR RESEARCH ORGANIZATION
  • Inventor
  • MASE KAZUHIKO
  • KIKUCHI TAKASHI
IPC(International Patent Classification)
Please contact us by E-mail if you have any interests on this patent.

PAGE TOP

close
close
close
close
close
close