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NON-EVAPORATIVE GETTER-COATED COMPONENT, CONTAINER, MANUFACTURING METHOD, AND APPARATUS NEW

外国特許コード F180009452
整理番号 (S2016-1122-N0)
掲載日 2018年7月25日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2017JP042682
国際公開番号 WO 2018097325
国際出願日 平成29年11月28日(2017.11.28)
国際公開日 平成30年5月31日(2018.5.31)
優先権データ
  • 特願2016-230510 (2016.11.28) JP
発明の名称 (英語) NON-EVAPORATIVE GETTER-COATED COMPONENT, CONTAINER, MANUFACTURING METHOD, AND APPARATUS NEW
発明の概要(英語) Provided are a component and a container, which are coated with a non-evaporative getter, the component and the container being characterized by including: a non-evaporative getter material layer containing a total of 20 mole% or less of occluded carbon atoms, nitrogen atoms, and oxygen atoms; and/or a noble metal layer containing a total of 20 mole% or less of occluded carbon atoms, nitrogen atoms, and oxygen atoms. Also provided is a method for manufacturing a non-evaporative getter-coated component and container, the method being characterized by comprising a step for forming a non-evaporative getter material layer and/or a noble metal layer by coating the component and container with a non-evaporative getter material and/or a noble metal by a vapor deposition process under low-pressure conditions. Also provided is an apparatus for manufacturing an NEG-coated component and container, the apparatus being characterized by having an NEG material filament and/or a noble metal filament, as well as a current terminal.
特許請求の範囲(英語) [claim1]
1. A carbon atom, nitrogen atom, oxygen atom and 20 molar % or less of the total amount of non-evaporable getter material layer, and/or, a carbon atom, nitrogen atom, oxygen atom and 20 molar % of the total amount is less than or equal to the noble metal layer comprises, a non-evaporation type getter coating components.
[claim2]
2. The inner surface of the vacuum container, a carbon atom, nitrogen atom, oxygen atom and 20 molar % or less of the total amount of occlusion of the non-evaporable getter material layer, and/or, a carbon atom, nitrogen atom, oxygen atom and 20 molar % or less of the total amount of occlusion of the noble metal coating layer and characterized in that, the non-evaporable getter coating container.
[claim3]
3. A low pressure to the substrate in the non-evaporable getter material and/or a noble metal by coating by vapor deposition, the non-evaporable getter material layer and/or a noble metal layer and to form, a method of manufacturing a non-evaporable getter coating components.
[claim4]
4. The inner surface of the vacuum vessel by a low pressure non-evaporable getter material and/or a noble metal by coating by vapor deposition, the non-evaporable getter material layer and/or a noble metal layer and to form, a method of manufacturing a non-evaporable getter coating vessel.
[claim5]
5. A substrate, the non-evaporable getter material filaments and/or noble metal filaments, characterized in that the current and an output terminal, the non-evaporable getter coating with the manufacturing apparatus.
[claim6]
6. The vacuum vessel, the non-evaporable getter material filaments and/or noble metal filaments, characterized in that the current and an output terminal, the non-evaporable getter coating container manufacturing apparatus.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • INTER-UNIVERSITY RESEARCH INSTITUTE CORPORATION HIGH ENERGY ACCELERATOR RESEARCH ORGANIZATION
  • 発明者(英語)
  • MASE KAZUHIKO
  • KIKUCHI TAKASHI
国際特許分類(IPC)
指定国 (WO201897325)
National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DJ DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JO JP KE KG KH KN KP KR KW KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG
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