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DIFFERENTIAL MOBILITY ANALYZER, PARTICLE MEASURING SYSTEM, AND PARTICLE SELECTION SYSTEM

外国特許コード F190009903
整理番号 07734-US
掲載日 2019年8月26日
出願国 アメリカ合衆国
出願番号 97941510
公報番号 20120001067
公報番号 8698076
出願日 平成22年12月28日(2010.12.28)
公報発行日 平成24年1月5日(2012.1.5)
公報発行日 平成26年4月15日(2014.4.15)
優先権データ
  • 特願2010-021552 (2010.2.2) JP
発明の名称 (英語) DIFFERENTIAL MOBILITY ANALYZER, PARTICLE MEASURING SYSTEM, AND PARTICLE SELECTION SYSTEM
発明の概要(英語) In order to provide a differential mobility analyzer and the like that allows (i) easy increase of an upper limit of particle size of charged particle which can be classified and (ii) analysis of charged particles whose particle size is variable, a DMA (Differential Mobility Analyzer) includes: a classification tank in which an inlet electrode having an inlet slit, an intermediate electrode having a slit, and an outlet electrode having an outlet slit are arranged in sequence in such a manner that adjacent electrodes are disposed opposing each other at predetermined intervals; a gas supply section supplying the classification tank with sheath gas; and a voltage generator applying a predetermined voltage between the electrodes disposed opposing each other, the classification tank including a first classification section and a second classification section each formed by the electrodes disposed opposing each other, and the gas supply section controlling a flow rate of the sheath gas to be supplied to the classification tank individually per first classification section and second classification section.
  • 発明者/出願人(英語)
  • Orii; Takaaki
  • Kudoh; Satoshi
  • RIKEN
国際特許分類(IPC)

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