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MAGNETIC BODY OBSERVATION METHOD, AND MAGNETIC BODY OBSERVATION DEVICE NEW 新技術説明会

外国特許コード F190009977
整理番号 (Q20072JP)
掲載日 2019年10月28日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2019JP012018
国際公開番号 WO 2019182097
国際出願日 平成31年3月22日(2019.3.22)
国際公開日 令和元年9月26日(2019.9.26)
優先権データ
  • 特願2018-054701 (2018.3.22) JP
発明の名称 (英語) MAGNETIC BODY OBSERVATION METHOD, AND MAGNETIC BODY OBSERVATION DEVICE NEW 新技術説明会
発明の概要(英語) A magnetic body observation method according to the present invention includes an irradiating step of irradiating one region of a specimen (S) with an excitation beam (E1) to cause a magnetic element contained in the specimen (S) to radiate characteristic X-rays (X1), a detecting step of detecting the respective intensities of right-hand circularly polarized light and left-hand circularly polarized light included in the characteristic X-rays (X1), and a calculating step of calculating a difference between the intensity of the right-hand circularly polarized light and the intensity of the left-hand circularly polarized light. By referring to this difference, restrictions on the sample (S) are relaxed, and the magnetization orientation or the magnetization magnitude can be measured precisely.
従来技術、競合技術の概要(英語) BACKGROUND ART
Of a surface of a geometric structure is a micro, an optical microscope (SEM: Scanning Electron Microscope) or a scanning electron microscope can be observed easily. In the surface of the material 2 may be a two-dimensional distribution of the elemental composition of the microparticles, in a scanning electron microscope in accordance with the characteristics of the electron generated by X ray can be detected, it is possible to visually recognize. For example, as described in Patent Document 1, has a function of such a scanning electron microscope is widely used. On the other hand, the permanent magnet, the electromagnetic steel plate, such as a magnetic recording medium, based on the magnetic material in the development of a material, the magnetic domain (magnetization direction of the uniform region) 2 of a one-dimensional structure (domain structure) can be recognized it is desirable.
For observing the magnetic domain structure of a scanning type electron microscope is given to the function as a technique of, for example, Non-Patent Document 1 and the spin of the SEM. By electron beam irradiation of the primary electrons 2 emitted from the ferromagnetic layer spin polarization is, with the magnetization of the magnetic material associated with. Patent Document 1 in the spin of the SEM, by utilizing this, the secondary electron 2 by measuring the spin polarization, the scanning type electron microscope with secondary electron image 2 of the normal three-dimensional structure 2 of the magnetization (magnetic domain structure 2 two-dimensionally) display the form of an image.
In addition, in Patent Document 2, the magnetic domain structure can be recognized as a magnetic force microscope has been described. Patent Document 2 in the magnetic force microscope, an atomic force microscope cantilever used in a magnetic film by the application, the leakage magnetic field from the sample mapping is enabled, thereby the image is recognized as the magnetic domain structure. In addition, in Patent Document 3, the spin injection with respect to the joining member of the voltage is applied, the heat image (infrared image) of the sample by acquiring an image in which the magnetic domain structure can be recognized by observing apparatus is described.
In addition, as methods for observing the magnetic domain structure, a magneto-optic Kerr effect microscope observation method has been known. In this method, visible light or ultraviolet light is irradiated onto the surface of a magnetic specimen, measuring a change of the polarization of the reflected light technique. In this method, the object to be measured by a magneto-optical Kerr effect according to the magnitude of magnetization and the magnetization direction of the polarization of the reflected light is changed can be used to observe the magnetic domain structure.
In addition, as another method for observing the magnetic domain structure, magnetic circular dichroism (XMCD) X-ray microscope observation method is also known. In this method, X-ray of circularly polarized light irradiated to the sample of the magnetic body is absorbed by the sample when the ratio of the X lines of the right and left circularly polarized light in the direction of rotation (MCD) being different depending on the nature and use, the rotation direction of the left and right circularly polarized light from the difference between the rate of absorption, and the direction of magnetization of a sample to measure a magnitude of the magnetization. XMCD magnetic domain can be observed using a microscope, in the measurement sample used for the absorption edge of the specific elements, to selectively measure the element of interest (element selective measurements) can be.
XMCD microscope described above, the soft X-ray is irradiated according to the X-ray microscope and X-ray microscope and MCD MCD can be classified as hard. MCD as soft X-ray microscope, transmission type, type electron yield, the ion yield-conversion and the like are exemplified. MCD as hard X-ray microscope, transmission, fluorescence yield type and the like are exemplified.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • NATIONAL INSTITUTES FOR QUANTUM AND RADIOLOGICAL SCIENCE AND TECHNOLOGY
  • 発明者(英語)
  • INAMI, Toshiya
  • WATANUKI, Tetsu
  • UENO, Tetsuro
  • YASUDA, Ryo
国際特許分類(IPC)
指定国 National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DJ DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JO JP KE KG KH KN KP KR KW KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG

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