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4101 2014JP057833 WO 2014156986 WIPO SILICON SINGLE CRYSTAL PRODUCTION APPARATUS, AND SILICON SINGLE CRYSTAL PRODUCTION METHOD Mar 26, 2015 Aug 25, 2015 Kyushu University
4102 2012JP060044 WO 2012/144420 WIPO SILICON SOLAR CELL AND MANUFACTURING METHOD FOR SAME Jul 4, 2013 Jul 4, 2013 Tokyo Institute of Technology
4103 2012JP068677 WO 2013/027525 WIPO SILVER NANOPARTICLE COMPOSITE, SILVER NANOPARTICLE COMPOSITE SUSPENSION USING THIS, COMPOSITION FOR γ-RAY-SENSITIVE SENSOR FORMATION AND γ-RAY SENSITIVE SENSOR, AND METHOD FOR MANUFACTURING SILVER NANOPARTICLE COMPOSITE Jul 12, 2013 Jul 12, 2013 TOHOKU UNIVERSITY
4104 2012JP057254 WO 2012/133070 WIPO SILVER-CONTAINING LITHIUM HEPTABORATE PHOTOSTIMULABLE PHOSPHOR, METHOD FOR PRODUCING SAME, AND LAMINATE USING SAID PHOTOSTIMULABLE PHOSPHOR achieved Nov 9, 2012 Nov 9, 2012 Rikkyo University
4105 2014JP055758 WO 2014136870 WIPO SIMPLE DETECTION METHOD FOR RNA MODIFICATION, AND METHOD FOR DETECTING TYPE-II DIABETES USING SAID DETECTION METHOD Mar 25, 2015 Aug 24, 2015 Kumamoto University
4106 2016JP068991 WO 2017002754 WIPO SIMPLE TEST FOR PERIODONTAL DISEASE USING FLUORESCENT DYE Feb 16, 2017 Jan 30, 2019 The University of Tokushima
4107 2017JP047305 WO 2018124292 WIPO SKELETAL MUSCLE CELLS AND METHOD FOR INDUCING SAME Nov 2, 2018 Feb 1, 2019 Kyoto Prefectural University of Medicine
4108 2012JP055330 WO 2012/132757 WIPO SKELETON NANOPARTICLES AND METHOD FOR PRODUCING SAME Oct 17, 2012 Oct 17, 2012 Nagoya Institute of Technology
4109 2012JP071845 WO 2013031833 WIPO SKIN INTRODUCTION SYSTEM AND LIGHTENING AGENT COMBINING CELL INTRODUCTION PEPTIDE AND SKIN INTRODUCTION ACCELERATOR Jul 16, 2013 Apr 25, 2019 Okayama University
4110 01995011 1357376 EPO SKIN PERMEABLE GAS COLLECTOR achieved Jul 12, 2011 Jul 12, 2011 Japan Science and Technology Agency
4111 2017JP019852 WO 2017209028 WIPO SKIN-WHITENING COSMETIC, AND METHOD FOR PRODUCING ALBUMIN-BASED COMPOUND CONTAINED THEREIN Dec 20, 2017 Dec 20, 2017 Kumamoto University
4112 2016JP057073 WO 2016158230 WIPO SKYRMION GENERATION DEVICE, SKYRMION GENERATION METHOD, AND MAGNETIC MEMORY DEVICE Mar 13, 2017 Feb 1, 2019 Japan Science and Technology Agency
4113 2018JP021420 WO 2018221750 WIPO SLEEP DETERMINING DEVICE, SLEEP DETERMINING METHOD, AND SLEEP DETERMINING PROGRAM meetings Jun 25, 2018 Jan 30, 2019 Keio University
4114 2016JP058031 WO 2016148111 WIPO SLEEP STAGE ESTIMATION DEVICE, BIOLOGICAL DATA ESTIMATION DEVICE, SLEEP STAGE ESTIMATION METHOD, BIOLOGICAL DATA ESTIMATION METHOD, SLEEP STAGE ESTIMATION PROGRAM, AND BIOLOGICAL DATA ESTIMATION PROGRAM Nov 11, 2016 Feb 1, 2019 The University of Electro-Communications
4115 2010JP058904 WO 2010/143535 WIPO SLEEPINESS ASSESSMENT DEVICE Sep 6, 2011 Sep 29, 2011 Nagoya City University
4116 2015JP062325 WO 2015163389 WIPO SLIDING METHOD, PRODUCTION METHOD FOR SLIDING STRUCTURE, SLIDING STRUCTURE, AND DEVICE Nov 26, 2015 Nov 26, 2015 TOHOKU UNIVERSITY
4117 2019JP013523 WO 2019189549 WIPO SLUDGE PROCESSING METHOD, SLUDGE PROCESSING SYSTEM, AND METHOD FOR MANUFACTURING ADSORBENT meetings Jan 29, 2020 Jan 29, 2020 Niigata University
4118 2013JP073498 WO 2014034924 WIPO SLUDGE RECOVERY METHOD AND GRANULAR MATERIAL Sep 26, 2014 Sep 30, 2016 Waseda University
4119 2010JP002149 WO 2010/109889 WIPO SODIUM ION SECONDARY BATTERY meetings Feb 14, 2012 Mar 1, 2012 Tokyo University of Science
4120 2012JP058123 WO 2012/133527 WIPO SODIUM ION SECONDARY BATTERY Oct 17, 2012 Oct 17, 2012 Kyushu University
4121 2003JP002257 WO 2003/074749 WIPO SOFT MAGNETIC METALLIC GLASS ALLOY Feb 22, 2005 Oct 15, 2008 Japan Science and Technology Agency
4122 2017JP022568 WO 2017221901 WIPO SOIL ANALYZING DEVICE AND SOIL ANALYZING METHOD Jan 24, 2018 Apr 23, 2019 Shinshu University
4123 2019JP041187 WO 2020085250 WIPO SOIL EVALUATION SENSOR, SOIL EVALUATION SYSTEM, ELECTRODE FOR SOIL EVALUATION SENSOR, AND DEVICE FOR OBTAINING IMPEDANCE CHARACTERISTIC OF SOIL NEW_EN Jul 29, 2020 Jul 29, 2020 Shizuoka University
4124 2018JP038638 WO 2019082763 WIPO SOIL SENSOR AND SOIL MEASUREMENT METHOD Jul 26, 2019 Jul 26, 2019 Shizuoka University
4125 2014JP071727 WO 2015025869 WIPO SOIL-BORNE DISEASE CONTROL AGENT AND SOIL-BORNE DISEASE CONTROL METHOD USING SAME Nov 5, 2015 Nov 5, 2015 KAGOSHIMA UNIVERSITY
4126 2015JP001413 WO 2015151422 WIPO SOLAR BATTERY AND SOLAR BATTERY PRODUCTION METHOD Nov 19, 2015 Nov 19, 2015 Japan Science and Technology Agency
4127 2013JP072804 WO 2014034634 WIPO SOLAR CELL Aug 13, 2014 Sep 29, 2016 Kyoto University
4128 2012JP053701 WO 2012/111768 WIPO SOLAR CELL Nov 9, 2012 Nov 9, 2012 Hokkaido University
4129 2010JP057846 WO 2010/126162 WIPO SOLAR CELL AND PHOTOELECTRIC CONVERSION ELEMENT Jul 14, 2011 Aug 2, 2011 Hokkaido University
4130 2010JP063073 WO 2011/016441 WIPO SOLAR CELL EVALUATION METHOD, EVALUATION DEVICE, MAINTENANCE METHOD, MAINTENANCE SYSTEM, AND METHOD OF MANUFACTURING SOLAR CELL MODULE achieved Sep 6, 2011 Sep 29, 2011 Nara Institute Science and Technology
4131 2011JP056804 WO 2011/115292 WIPO SOLAR CELL HAVING POROUS STRUCTURE IN WHICH METAL NANOPARTICLES ARE CARRIED IN PORES May 8, 2012 May 31, 2012 Tokyo Institute of Technology
4132 2018JP018005 WO 2018212046 WIPO SOLAR HEAT COLLECTION DEVICE PROVIDED WITH FLUIDIZED BED, AND METHOD FOR COLLECTING SOLAR HEAT USING SAME Jan 23, 2019 Jan 23, 2019 Niigata University
4133 2010JP053624 WO 2010/101239 WIPO SOLAR LIGHT (HEAT) ABSORBING MATERIAL, AND HEAT ABSORBER/STORAGE MATERIAL AND SOLAR LIGHT (HEAT) ABSORBER/CONTROL MATERIAL EACH COMPRISING THE SOLAR LIGHT (HEAT) ABSORBING MATERIAL Mar 17, 2011 Mar 22, 2011 University of the Ryukyus
4134 2004JP016592 WO 2005/045547 WIPO SOLAR PHOTOVOLTAIC POWER GENERATION APPARATUS Jan 30, 2006 Sep 2, 2008 Tokyo Denki University
4135 2011JP069327 WO 2012/026593 WIPO SOLAR POWER GENERATION SYSTEM, CONTROL DEVICE USED FOR SOLAR POWER GENERATION SYSTEM, AND CONTROL METHOD AND PROGRAM FOR THE SAME meetings Mar 5, 2013 Mar 5, 2013 TAMA-TLO
4136 2012JP069574 WO 2013/018826 WIPO SOLAR POWER GENERATION SYSTEM Apr 26, 2013 Apr 26, 2013 Tokyo Institute of Technology
4137 2015JP057015 WO 2015137339 WIPO SOLID CATALYST FOR HYDRIDE ISOMERIZATION REACTION IN AN AQUEOUS MEDIUM Nov 19, 2015 Nov 19, 2015 Japan Science and Technology Agency
4138 2011JP052411 WO 2011/096532 WIPO SOLID ELECTROLYTE AND ELECTROCHEMICAL ELEMENT Mar 22, 2012 Apr 5, 2012 Akita University
4139 2018JP041013 WO 2019093273 WIPO SOLID ELECTROLYTE FOR ALL-SOLID SODIUM BATTERIES, AND ALL-SOLID SODIUM BATTERY Jul 25, 2019 Jul 25, 2019 Osaka Prefecture University
4140 2019JP028881 WO 2020022342 WIPO SOLID ELECTROLYTE FOR ALL-SOLID-STATE SODIUM BATTERY, MANUFACTURING METHOD THEREFOR, AND ALL-SOLID-STATE SODIUM BATTERY Jun 3, 2020 Jun 3, 2020 Osaka Prefecture University
4141 03719228 1501124 EPO SOLID ELECTROLYTE SWITCHING DEVICES, FPGA AND MEMORY DEVICES USING THE SAME, AND METHOD OF MANUFACTURING THE SAME Jul 1, 2011 Jul 1, 2011 Japan Science and Technology Agency
4142 20047017513 1006764510000 Republic of Korea SOLID ELECTROLYTE SWITCHING DEVICE, FPGA USING SAME,MEMORY DEVICE, AND METHOD FOR MANUFACTURING SOLIDELECTROLYTE SWITCHING DEVICE Jul 27, 2011 Sep 11, 2014 Japan Science and Technology Agency
4143 2009JP058835 WO 2009/139382 WIPO SOLID ELECTROLYTE, METHOD FOR PRODUCING THE SAME, AND SECONDARY BATTERY COMPRISING SOLID ELECTROLYTE May 10, 2011 May 25, 2011 TOHOKU UNIVERSITY
4144 2019JP025607 WO2020012971 WIPO SOLID FUEL AND HYBRID ROCKET meetings Oct 30, 2019 Jan 27, 2020 KAGOSHIMA UNIVERSITY
4145 2017JP001141 WO 2017122823 WIPO SOLID PHOTOCATALYTIC MATERIAL FORMED FROM SOLID MATERIAL CONSTITUTED ONLY OF TITANIUM DIOXIDE HAVING PHOTOCATALYTIC FUNCTION, METHOD FOR MANUFACTURING SAME, AND TREATMENT DEVICE meetings Jun 1, 2017 Aug 1, 2017 Advanced Industrial Science and Technology
4146 2012JP068870 WO 2013/018623 WIPO SOLID STATE IMAGE PICK-UP DEVICE, AND PIXEL Aug 13, 2013 Aug 13, 2013 Shizuoka University
4147 2017JP041404 WO 2018092867 WIPO SOLID SUPPORT CONTAINING IGG-BINDING PEPTIDE, AND METHOD FOR SEPARATING IGG Jul 31, 2018 Apr 24, 2019 KAGOSHIMA UNIVERSITY
4148 2012JP059278 WO 2012/133920 WIPO SOLID-STATE DYE LASER MEDIUM AND PROCESS FOR PRODUCTION THEREOF Oct 17, 2012 Oct 17, 2012 Kyushu University
4149 2012JP077623 WO 2013/069470 WIPO SOLID-STATE ELECTRONIC DEVICE May 30, 2013 May 30, 2013 Japan Science and Technology Agency
4150 2012JP077624 WO 2013/069471 WIPO SOLID-STATE ELECTRONIC DEVICE May 30, 2013 May 30, 2013 Japan Science and Technology Agency
4151 2013JP071372 WO 2014024922 WIPO SOLID-STATE IMAGE PICKUP DEVICE meetings Sep 26, 2014 Aug 25, 2015 Shizuoka University
4152 2011JP051813 WO 2011/096340 WIPO SOLID-STATE IMAGE PICKUP DEVICE, METHOD OF READING PIXEL SIGNAL, AND PIXEL May 25, 2012 May 31, 2012 Shizuoka University
4153 2006JP311313 WO 2007/000879 WIPO SOLID-STATE IMAGING ELEMENT AND SIGNAL READING METHOD THEREOF Sep 14, 2007 Oct 15, 2008 Nara Institute Science and Technology
4154 2012JP004890 WO 2013/021585 WIPO SOLID-STATE LASER DEVICE Sep 10, 2013 Sep 10, 2013 National Institutes of Natural Sciences (NINS)
4155 2008JP062164 WO 2009013991 WIPO SOLIDIFIED DETERGENT COMPOSITION AND METHOD FOR PRODUCING THE SAME Apr 8, 2011 Apr 23, 2019 HIROSHIMA UNIVERSITY
4156 2006JP315980 WO 2007/026533 WIPO SOLUBLE TABLET CONTAINING NANOSILICON PARTICLES AND PROCESS FOR PRODUCTION THEREOF Sep 21, 2007 Oct 15, 2008 Tokyo Denki University
4157 2008JP068478 WO 2009/051080 WIPO SOLUTION CONCENTRATION DISTRIBUTION MEASURING DEVICE meetings Apr 6, 2011 May 25, 2011 Okayama University
4158 2018JP042842 WO 2019138697 WIPO SOLUTION FOR DISSOLVING METAL OR METAL SALT, AND USE OF SAME meetings May 15, 2020 May 15, 2020 Kyoto University
4159 2014JP076126 WO 2015050131 WIPO SOLUTION FOR FORMING LAYER THAT CONTAINS SOLID ELECTROLYTE FOR ALL-SOLID-STATE ALKALI METAL SECONDARY BATTERIES, COATED ACTIVE MATERIAL PARTICLES, ELECTRODE, ALL-SOLID-STATE ALKALI METAL SECONDARY BATTERY AND METHOD FOR MANUFACTURING SAME Oct 28, 2015 Nov 6, 2015 Osaka Prefecture University
4160 2010JP066853 WO 2011/037263 WIPO SOLVENT FOR ELECTROLYTIC SOLUTION, ELECTROLYTIC SOLUTION, AND GEL-LIKE ELECTROLYTE Nov 9, 2011 Dec 2, 2011 Shizuoka University
4161 2011JP073338 WO 2012/050088 WIPO SOMATIC DATA-MEASURING APPARATUS AND SOMATIC DATA MEASUREMENT METHOD Mar 5, 2013 Mar 5, 2013 Fukuoka University
4162 2015JP057828 WO 2015141657 WIPO SOUND WAVE SENSOR Apr 20, 2016 Apr 20, 2016 Kyushu Institute of Technology
4163 2012JP051471 WO 2012/102278 WIPO SOUND-ABSORBING BODY AND SOUND INSULATION WALL EQUIPPED WITH SAME meetings achieved Mar 15, 2012 Aug 28, 2012 Kansai University
4164 2016JP075849 WO 2017043424 WIPO SOUND-SYMBOLIZING WORD/PHYSICAL CHARACTERISTIC INFORMATION PROVISION DEVICE, SOUND-SYMBOLIZING WORD/PHYSICAL CHARACTERISTIC INFORMATION PROVISION METHOD, AND SOUND-SYMBOLIZING WORD/PHYSICAL CHARACTERISTIC INFORMATION PROVISION PROGRAM Oct 18, 2017 Apr 22, 2019 The University of Electro-Communications
4165 2015JP070606 WO 2016035461 WIPO SPARK PLASMA SINTERING METHOD, CROWN MATERIAL PRODUCTION METHOD, AND SPARK PLASMA SINTERING DEVICE Aug 4, 2016 Aug 4, 2016 KAGOSHIMA UNIVERSITY
4166 2017JP037043 WO 2018070487 WIPO SPATIAL SOUND GENERATION DEVICE, SPATIAL SOUND GENERATION SYSTEM, SPATIAL SOUND GENERATION METHOD, AND SPATIAL SOUND GENERATION PROGRAM Jul 23, 2018 Jul 23, 2018 Japan Science and Technology Agency
4167 2016JP065061 WO 2016186206 WIPO SPECIFIC MODIFICATION OF ANTIBODY BY IgG-BINDING PEPTIDE meetings Jun 2, 2016 Jan 30, 2019 KAGOSHIMA UNIVERSITY
4168 2011JP063545 WO 2011/158812 WIPO SPECIFICATION DEVICE FOR WATER STATUS OF SOIL, AND METHOD FOR SAME meetings May 17, 2012 May 31, 2012 Toyohashi University of Technology(TCI)
4169 2018JP038601 WO 2019097939 WIPO SPECTRAL ANALYSIS DEVICE AND SPECTRAL ANALYSIS METHOD May 15, 2020 May 15, 2020 Kyoto University
4170 2017JP011411 WO 2017179378 WIPO SPECTRAL CAMERA CONTROL DEVICE, SPECTRAL CAMERA CONTROL PROGRAM, SPECTRAL CAMERA CONTROL SYSTEM, AIRCRAFT EQUIPPED WITH SAID SYSTEM, AND SPECTRAL IMAGE CAPTURING METHOD meetings Nov 7, 2017 Nov 7, 2017 Hokkaido University
4171 2013JP055228 WO 2013/129519 WIPO SPECTRAL CHARACTERISTICS MEASUREMENT DEVICE AND METHOD FOR MEASURING SPECTRAL CHARACTERISTICS Dec 6, 2013 Dec 6, 2013 Kagawa University
4172 2013JP076871 WO 2014054708 WIPO SPECTRAL CHARACTERISTIC MEASUREMENT DEVICE Jul 23, 2014 Aug 24, 2015 Kagawa University
4173 2013JP075904 WO 2014054488 WIPO SPECTRAL CHARACTERISTIC MEASUREMENT DEVICE Sep 26, 2014 Aug 24, 2015 Kagawa University
4174 2010JP001917 WO 2010/106800 WIPO SPECTRAL DEVICE AND METHOD FOR CONTROLLING SAME May 10, 2011 May 24, 2011 Toyohashi University of Technology(TCI)
4175 2011JP060575 WO 2011/142295 WIPO SPECTRAL REFLECTIVITY MEASURING DEVICE AND SPECTRAL REFLECTIVITY MEASURING METHOD May 16, 2012 May 31, 2012 Gunma University
4176 2011JP070273 WO 2012/033096 WIPO SPECTROMETER AND SPECTROMETRIC METHOD meetings Oct 29, 2012 Oct 29, 2012 Kagawa University
4177 2016JP061825 WO 2016171042 WIPO SPECTROMETRY DEVICE Jan 19, 2017 Jan 30, 2019 Kagawa University
4178 2016JP051187 WO 2016121540 WIPO SPECTROMETRY DEVICE AND SPECTROMETRY METHOD Oct 25, 2016 Feb 1, 2019 Kagawa University
4179 2016JP070287 WO 2017007024 WIPO SPECTROSCOPE Apr 11, 2017 Jan 30, 2019 Kagawa University
4180 2009JP060329 WO 2009/151004 WIPO SPECTROSCOPIC DEVICE, AND METHOD FOR DRIVING THE DEVICE May 10, 2011 May 24, 2011 Toyohashi University of Technology(TCI)
4181 2007JP052113 WO 2008/015800 WIPO SPEECH PROCESSING METHOD, SPEECH PROCESSING PROGRAM, AND SPEECH PROCESSING DEVICE meetings achieved Sep 26, 2008 Jan 15, 2009 Nara Institute Science and Technology
4182 2014JP054729 WO 2014133026 WIPO SPEED-SENSORLESS MOTOR CONTROL DEVICE AND METHOD FOR STARTING SPEED-SENSORLESS MOTOR Mar 25, 2015 Jul 21, 2015 Tokyo Institute of Technology
4183 2013JP005538 WO 2014045582 WIPO SPERM ACTIVATING AGENT AND ACTIVATING METHOD USING SAME meetings Oct 28, 2014 Aug 24, 2015 HAMAMATSU UNIVERSITY SCHOOL OF MEDICINE
4184 2007JP064679 WO 2008/013232 WIPO SPHERICAL ABERRATION CORRECTION MODERATING TYPE LENS, SPHERICAL ABERRATION CORRECTION LENS SYSTEM, ELECTRON SPECTROSCOPY DEVICE, AND OPTICAL ELECTRON MICROSCOPE Nov 27, 2008 Nov 26, 2008 Nara Institute Science and Technology
4185 2019JP043715 WO 2020110651 WIPO SPHERICAL BODY DRIVE TYPE MOVEMENT DEVICE NEW_EN Jul 29, 2020 Jul 29, 2020 Kyushu Institute of Technology
4186 2010JP054049 WO 2010/104130 WIPO SPHERICAL ULTRASOUND MOTOR AND CONTROL METHOD FOR A SPHERICAL ULTRASOUND MOTOR Feb 7, 2012 Mar 1, 2012 Tokyo University of Agriculture and Technology
4187 2013JP064685 WO 2013/180085 WIPO SPHYGMOMANOMETER DEVICE meetings Dec 12, 2013 Dec 12, 2013 Shinshu University
4188 2014JP078816 WO 2015064663 WIPO SPIN CONTROL MECHANISM AND SPIN DEVICE Oct 28, 2015 Nov 6, 2015 Japan Science and Technology Agency
4189 2013JP070216 WO 2014024697 WIPO SPIN MOTOR AND SPIN ROTARY MEMBER Jan 23, 2015 Sep 30, 2016 Japan Science and Technology Agency
4190 2012JP078199 WO 2013/065751 WIPO SPIN OSCILLATION DEVICE AND MANUFACTURING METHOD FOR SAME meetings May 22, 2013 May 22, 2013 Kyushu University
4191 2013JP070217 WO 2014027555 WIPO SPIN POLARIZATION TRANSISTOR ELEMENT Jan 23, 2015 Sep 30, 2016 Japan Science and Technology Agency
4192 2013JP079599 WO 2014073452 WIPO SPIN VALVE ELEMENT Feb 10, 2015 Sep 30, 2016 Japan Science and Technology Agency
4193 2017JP013496 WO 2017179440 WIPO SPIN-POLARIZED HIGH BRIGHTNESS ELECTRON GENERATING PHOTOCATHODE AND METHOD FOR MANUFACTURING FOR SAME Nov 7, 2017 Apr 19, 2019 High Energy Accelerator Research Organization
4194 2018JP020636 WO 2018225588 WIPO SPINAL FUSION IMPLANT Oct 24, 2019 Oct 24, 2019 Kobe University
4195 2012JP065765 WO 2012/176812 WIPO SPINE IMMOBILIZATION TOOL Jan 9, 2013 Jan 9, 2013 Akita University
4196 2007JP053929 WO 2008/004356 WIPO SPINNING SOLUTION COMPOSITION, PROCESS FOR PRODUCING REGENERATED SILK FIBER USING THE COMPOSITION, AND REGENERATED SILK FIBER PRODUCED BY THE PROCESS Mar 29, 2011 Mar 29, 2011 Tokyo University of Agriculture and Technology
4197 2005JP016349 WO 2006/028101 WIPO SPINTRONICS MATERIAL AND TMR DEVICE Oct 4, 2007 Sep 3, 2008 Kagoshima TLO
4198 2012JP061753 WO 2012/153732 WIPO SPREAD DEVICE, COMMUNICATION DEVICE, TRANSMISSION DEVICE, COMMUNICATION METHOD AND PROGRAMME Nov 28, 2012 Nov 28, 2012 Kyushu University
4199 2008JP058621 WO 2008/149635 WIPO SPUTTERING APPARATUS FOR FORMING THIN FILM Jan 30, 2009 Jan 30, 2009 Yamaguchi TLO
4200 2009JP058976 WO 2009/139434 WIPO SPUTTERING SYSTEM FOR DEPOSITING THIN FILM AND METHOD FOR DEPOSITING THIN FILM May 9, 2011 May 24, 2011 Yamaguchi TLO

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