|発明の名称||THIN-FILM-FORMING APPARATUS AND THIN-FILM-FORMING METHOD|
PROBLEM TO BE SOLVED: To provide a thin-film-forming apparatus which can measure a thickness of a thin film formed on a substrate with high accuracy, in a state of rotating a carousel rotation drum.
SOLUTION: The thin-film-forming apparatus 1 comprises: the rotation drum 13 which rotates around a rotation axis of Z to Z'; a light projection head 43 which projects a measurement light from one side of the rotation axis of Z to Z'; a total reflection mirror 46 which reflects the measurement light projected from the light projection head 43 toward a monitor substrate S0; a total reflection mirror 51 which reflects the reflection light reflected from the monitor substrate S0 to the other side of the rotation axis Z to Z'; a light-receiving head 54 which receives the light reflected from the total reflection mirror 51; and a film-thickness-computing computer 57 which computes the film thickness of the monitor substrate S0 on the basis of the reflection light that the light-receiving head 54 has received. The thin-film-forming apparatus 1 projects the measurement light and receives the reflection light to and from each different direction with respect to the rotation axis of Z to Z', and accordingly can measure the film thickness with high accuracy without being affected by the interference of the lights.
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