|発明の名称||MINUTE GROOVE MACHINING METHOD AND DEVICE THEREFOR|
PROBLEM TO BE SOLVED: To improve efficiency, costs, and safety by utilizing the erosion effect by means of abrasive grains and the chemical action of cerium oxide and quartz glass.
SOLUTION: A surface of a hard member 3 to be machined is covered with a masking member 5 provided with a groove provided with a V-shaped taper 27 by corresponding to a position where machining is performed by a harder material than the hardness of the hard member 3, and aqueous solution fluid containing abrasive grains is injected into a part corresponding to the groove from a jet nozzle 11. When the aqueous solution fluid is injected into the V-shaped groove, pressure drop due to the friction of the aqueous solution fluid and the groove is reduced so that the aqueous solution fluid can advance into a thin groove to machine a minute groove.
- 学校法人 東京電機大学 研究推進社会連携センター（承認TLO)
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